JPS61121889A - Industrial robot - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to an industrial robot, and particularly to an industrial robot that can be used while maintaining a clean atmosphere.

(Prior Art) For example, in the process of bonding copper foil to a plastic ring substrate in a line for manufacturing printed circuit boards, the work must be performed in a clean atmosphere because dust is not likely to adhere to the process. For this reason, although there has been a demand for automation, the current situation is that the use of industrial robots has the risk of scattering dust, so the work must be done by one person.

(Object of the Invention) An object of the present invention is to provide an industrial robot that can be used while maintaining a clean atmosphere.

(Disclosure of the Invention) The present invention relates to an improvement of an industrial robot configured by connecting a linear motion member, a rotating member, and a rotating member in a number corresponding to the degree of freedom required for a supporting member.

In the present invention, hollow portions are formed in the supporting member, the linear motion member, the rotating member, and the rotating member, and the hollow portions are communicated with the outside air by airtight seals at each connecting portion of the respective members, and the linear motion The hollow part of the member and the hollow parts of the rotating member and the rotating member are each independently communicated with the exhaust means.

(Example) Embodiments of the present invention will be described below with reference to the drawings.

As shown in FIG. 1, the industrial robot 1 of the present invention includes:
A linear motion member 3, a first rotation member 4, a second rotation member 5, and a rotation member 6 are sequentially connected to the support member 2. The support member 2 has a first space 2a inside, the linear motion member 3 has a first hollow part 3a and a second space 3b, and the first rotating member 4 has a second hollow part 4a and a second hollow part 4b. A third hollow portion 5a is formed inside the rotating member 5, and a fourth hollow portion 6a is formed inside the rotating member 6.

The support member 2 is constructed by extending an inner cylinder 2b and an outer cylinder 2c upward, while the linear motion member 3 has an inner cylinder 3c and an outer cylinder 3d extending downward. The outer cylinder 3d of the translational member 3 is fitted into the outer cylinder 2c of the support member 2 so as to be vertically movable.

A first airtight seal 7a is interposed between the first airtight seal 7a and the first connecting portion 7 that isolates the first space 2a and the first hollow portion 3a from the outside air and communicates with each other.

On the other hand, the inner tube 3b of the linear motion member 3 is loosely fitted into the inner tube 2b of the support member 2 with a gap. A first drive device 12 and two guide devices 13 are arranged at intervals of 120 degrees in the first hollow portion 3a between the inner tube 2b and the outer tube 3d. The first drive device 12 is a motor 1 fixed to the inner cylinder 2b.
2a is directly connected to this motor 12a and its rotation angle information (
That is, a shaft encoder 12b that outputs vertical position information of the linear motion member 3), a ball screw 12c directly connected to the output shaft of the motor 12a, and a pole nut 12b provided on the outer cylinder 3d and movably screwed into the ball screw 12c. It is configured. On the other hand, the guide device 13
1 is a guide cylinder 1 in which a rod 13a provided on an outer cylinder 3d and a rod 13a provided on an inner cylinder 2b are fitted so as to be vertically movable.
3b.

A wire cable insertion port 3e and an intake port 3f are opened near the lower end of the inner cylinder 3b, while a wire pipe 2d, a main intake pipe 2e, and a sub intake pipe 2f are attached to the side of the support member 2.
A first flexible tube 14 communicates between the electrical conduit 2d and the electrical wire/cable insertion port 3e, and a second flexible tube 15 communicates between the main intake pipe 2e and the intake port 3f. In addition, the first
And the second flexible tubes 14 and 15 have sufficient length, and the first
They are arranged spirally within the space 2a.

A base end of a first rotating member 4 is supported by a bearing 8b on the linear moving member 3 so as to be able to rotate around a vertical axis, and a second airtight seal 8a is interposed between the linear moving member 3 and the first rotating member 4. is,
A second connecting portion 8 is configured that isolates the second space portion 3b and the second hollow portion 4a from the outside air and communicates with each other. Furthermore, a second drive device 16 is disposed inside the first hollow portion 3a. The second drive device 16 is a motor 16a attached to the linear motion member 3, and is directly connected to this motor 16a, and its rotation angle information (i.e. A shaft encoder 16b that outputs information on the rotation angle of the first rotation member 4 relative to the linear motion member 3, and a timing pulley 16c fixed to the output shaft of the motor 16a.
, a reduction gear 16d with a high reduction ratio, which is interposed between the linear motion member 3 and the first rotating member 4, and whose input shaft is pivotally supported by the linear motion member 3.
, a timing pulley 16e fixed to the input shaft of the reducer 16d, and a timing belt 16f wound between the timing pulleys 16c and 156. Note that the upper part of the linear motion member 3 is covered with a cover 3g.

At the tip of the first rotating member 4, the base end of the second rotating member 4 is supported by a bearing 9b (cross roller bearing) so as to be able to rotate around a vertical axis, and between the first rotating member 4 and the second rotating member 5. A third airtight seal 9a is interposed therein, thereby forming a third connecting portion 9 that communicates with the second and third hollow portions 4a and 5a by blocking them from the outside air. A third drive device 17 is disposed across the second space portion 3b and the second hollow portion 4a. The third TfA moving device 17 is an arm 4 integrated with the first rotating member 4.
A motor 17a is provided so as to be substantially coaxial with the reducer 16d with respect to b, and is directly connected to this motor 17a and has rotation angle information (i.e., the rotation angle of the second rotation member 5 with respect to the first rotation member 4). a timing pulley 17C fixed to the output shaft of the motor 17a; a speed reducer 17d whose input shaft is pivotally supported by the first rotating member 4; and a reducer 17d interposed between the second rotating member 5; It is comprised of a timing pulley 17e fixed to the input shaft of this reducer 17d and a timing belt 17f wound between timing boots J17c and 17e. The upper and lower openings of the second hollow portion 4a of the first rotating member 4 are covered by covers 40 and 4d.

A rotating member 6 is rotatably supported around a vertical axis by a bearing 1ob at the tip of the second rotating member 5, and a fourth airtight seal 10a is interposed between the second rotating member 5 and the rotating member 6. A fourth connecting portion 10 is configured to isolate the third and fourth hollow portions 5a+6a from the outside air and communicate with each other. Second
The fourth drive device 18 extends between the hollow part 4a and the third hollow part 5a.
is installed. The fourth drive device 18 is the first rotating member 4
A motor 18a fixed to the motor 18a, a shaft encoder 18b that is directly connected to the motor 18a and outputs its rotation angle information (that is, information on the rotation angle of the rotation member 6 with respect to the first rotation member 4), and the engagement of the motor 18a and the lever gear 18c. Reducer 18d to which rotational force is transmitted, this reducer 1
Chain sprocket 18e installed on the output side of 8d
, a two-stage chain sprocket 18f that is supported on the second rotating member 5 on the same axis as the reducer 17d, and a chain-free sprocket 18g that is integrally formed with the rotating member 6 and has the same number of teeth as the second-stage chain sprocket 18f. , an endless chain 18h wound between the chain sprocket 18e and the second-stage chain sprocket 18f, an endless chain 18i wound between the second-stage chain sprocket 18"f and the chain sprocket 18g, and the second rotating member 5. The upper opening of the 8@2 rotating member 5 is configured by a tension chain sprocket 18j that adjusts the tension of the endless chain 18i.
covered by b.

The rotating member 6 has a suction cup 1 as an end effector at the bottom.
9, and the fourth hollow portion 6a of the rotating member 6 is configured to also serve as an intake pipe of the suction cup 19.

Each of the airtight seals 7a, 8a, 9a, and 1aa is made of tetrafluoroethylene-based rubber that is wear-resistant and dust-free.

Wire cables and shaft encoders 12b for supplying power and control signals to each of the motors 12a, 16a, 17a and 18a.

The electric wire cables (all not shown) that take out the output signals from 16b, 17b, and 18b are connected to each of the above-mentioned necessary components from the inner tube 3b via the electric wire cable tube 2d, the first flexible tube 14, and the electric wire cable insertion port 3e. It is branched and wired at various locations. Note that the wiring to the motor 16a and the shaft encoder 16b is carried out by passing an electric wire cable through the inner cylinder 3c while maintaining a sealing property near the upper end of the inner cylinder 3c. Further, the electric wire cables are installed with a sufficient margin so that there is no problem even when the linear motion member 3 moves up and down.

The main intake pipe 2e and the auxiliary intake pipe 2f are connected to the suction sides of exhaust pumps Ila and 11b as exhaust means 11, respectively. Further, the exhaust pumps 11a and llb are driven by motors llc and 1lcl, and each exhaust pump llb is driven by a motor llc and 1lcl.
The discharged air of a and llb is discharged to the outside of the work chamber. Then, when the exhaust pump lla is operated by the motor Lie, the air sucked from the suction cup 19 is transferred to the fourth hollow part 6a, the third hollow part 5a, the second hollow part 4a and the third hollow part 4a as shown by arrows (solid lines). 2 Exhaust pump lla via space 3b
The suction cup 19 suctions the conveyed object and also suctions the dust generated at each of these passage points, so that the work chamber is kept clean without scattering dust. To release the adsorption of the conveyed object, use the motor llc.
All you have to do is stop it. Note that this suction force is possible at, for example, a gauge pressure of about 0.4 atmospheres.

The fourth rotating member 6, the second and first rotating members 5°4
．． The first suction passage formed by the third and second hollow parts 6a, 5a, and 4a communicates with the exhaust pump lla via the second space 3b of the translation member 3.
The second suction passage is formed by the first hollow part 3a of the support member 2 and communicates with the exhaust pump llb through the first space part 2a of the support member 2. It is designed to be substantially unaffected by pressure fluctuations that occur in the second suction passage due to changes in volume due to the movement of the valve 3.

Furthermore, when the translational member 3 is moved up and down, the air pressure in the first space 2a and the first hollow portion 3a changes, so the translational member 3
The capacity of the exhaust pump Ilb is determined so that the pressure in the first space part 2a and the first hollow part 3a does not become higher than, for example, the outside pressure even if the pressure drops at the maximum speed. Then, due to the action of this pump llb, the second drive device 1 of the linearly moving member 3
The dust in the installation space 6, the first space 2a, and the first hollow part 3a is sucked and exhausted as shown by the arrow (dotted chain line), and is kept clean without being scattered inside the work chamber.

Note that even if the linear motion member 3 moves up and down and the intake port 3f moves up and down,
Since it is connected to the main intake pipe 2e by the second flexible pipe 15, there is no problem in the passage of intake air.

The industrial robot 1 is configured to be controlled by a playback method by a computer (not shown). That is, in the first drive device 12, the rotation of the ball screw 12c causes the pole nut 12d to move up and down, and the linear motion member 3 to move forward and backward in the up and down direction. Also, the second
In the drive device E16, the first pivot member 4 pivots with respect to the linear motion member 3 within a horizontal plane. Further, the third drive device 1
At 7, the second pivot member 5 pivots in a horizontal plane.

Further, the rotating member 6 rotates about the vertical axis.

Note that even if the second rotating member 5 rotates, the rotation angle of the rotating member 6 with respect to the first rotating member 4 remains unchanged.

In this way, the industrial robot 1 is configured as a transport robot with four degrees of freedom. In addition, in FIGS. 2 and 3, the movable range of the industrial robot 1 is shown surrounded by a two-dot chain line and hatched.

The present invention is not limited to the above-mentioned embodiments. 1) Industrial robots include, in addition to horizontally rotating articulated robots as in the above-mentioned embodiments, vertically rotating articulated robots, polar coordinate robots, and cylindrical robots. The same applies to coordinate robots or Cartesian coordinate robots, etc.; N) The degrees of freedom of industrial robots are not limited to 4 degrees of freedom, and may have other numbers of degrees of freedom. ii) If a suction cup is provided as the end effector as in the above embodiment, the suction exhaust for operating the suction cup and the suction exhaust for suctioning dust inside the robot can be made common. However, in addition to such a suction cup, the end effector may be equipped with an electromagnetic suction tool or other gripping device, and lv) Industrial robots are not used for transportation, but for industrial purposes other than transportation. (Effects of the Invention) As described above, the present invention combines the hollow part of the linear member with large pressure fluctuations and the hollow part of the rotating member and rotating member with almost no pressure fluctuation. Since the air is exhausted independently of each other, the rain hollow parts do not affect each other, and all the dust generated from various devices inside the robot can be collected without leaking into the work room, making it easier to work. The room can be kept clean, and work processes in the clean room can be easily automated.

[Brief explanation of drawings]

The drawings show an embodiment of the present invention, and FIG. 1 is a longitudinal sectional side view showing an industrial robot, FIG. 2 is a schematic diagram thereof, and FIG. 3 is a schematic plan view thereof. DESCRIPTION OF SYMBOLS 1...Industrial robot, 2...Support member, 3...Linear motion member, 3a...First hollow part, 4...・First rotating member, 4a...
Second hollow part, 5... Second rotating member, 5a...
...Third hollow part, 6...Rotating member, 6a...
... Fourth hollow part, 7... First connecting part, 7a
...First airtight seal, 8...Second connecting portion, 8a...Second airtight seal, 9...
Third connecting part, 9a...Third airtight seal, 10.
...Fourth connecting part, 10a... Fourth airtight seal, 11... Exhaust means. 3'g: 1 Procedural Amendment Document dated March 74, 1985 to 1 Case Display Showa Otsu 0 Patent Application No.! , 3/I? No. 2 Name of the invention Industrial robot 3 Relationship with the case of the person making the amendment Address of patent applicant No. 6 #r26, Ozone-cho, Nishinomiya City, Hyogo Prefecture Name
(235) ShinMaywa Industries Co., Ltd. Representative Susumu Tamagawa 4th generation Postal code 650 Address Asahi Seimei Sannomiya Building, 1-3-11 Sannomiya-cho, Chuo-ku, Kobe, Hyogo Telephone: Kobe (078) 332-2671 (Main) ) 1m
1 Name (6873) Tanaka - 5 Date of amendment order Iroma], - 6 Subject of amendment (1) Column for detailed explanation of the invention in the specification (2) Column for brief explanation of drawings in the specification 7. Contents of the amendment (1) "Yoshishi" in the first line of page 13 of the specification is corrected to "Yoi." (2) Add "aspects" next to "synopsis" on line 7 of page 1 of the specification. that's all

Claims (1)

[Claims] (1) An industrial robot configured by connecting a linear motion member, a rotation member, and a rotation member to a support member, wherein a hollow portion is formed in the support member, the translation member, the rotation member, and the rotation member. , each member is connected to the outside air at each connecting portion, with each hollow portion being closed off and communicated with the outside air by an airtight seal, and the hollow portion of the linear motion member and the hollow portions of the rotating member and the rotating member are independently exhausted from each other. An industrial robot characterized by being connected to means.