KR101382145B1

KR101382145B1 - Vacuum transfer robot

Info

Publication number: KR101382145B1
Application number: KR1020120117169A
Authority: KR
Inventors: 이성직; 오영일
Original assignee: 주식회사 나온테크
Priority date: 2012-10-22
Filing date: 2012-10-22
Publication date: 2014-04-17

Abstract

A transfer vacuum robot is disclosed. A conveying vacuum robot, comprising: a lower body portion having a guide block for vertically linear movement along a guide line and a first driving device for transmitting power to the guide block; A guide part having a second driving device which is located inside the lower body member and is fastened to the guide block and rotates vertically and moves vertically; a rotating frame formed of a hollow inside and rotating by the rotational force of the second driving device And an upper body part having a third driving device disposed inside the rotating frame and an upper cover disposed at an upper end of the rotating frame and connected to the third driving device to prevent injection of foreign substances into the chamber; A plurality of hands including a driving force arm connected to the third driving device to receive a driving force and having a linear movement while having an auxiliary arm spaced apart from the driving force arm by a predetermined distance to minimize stiffness and shaking; It provides a transfer vacuum robot comprising a portion. .

Description

Vacuum transfer robot {Vacuum transfer robot}

The present invention relates to a transfer vacuum robot, and more particularly, to a transfer vacuum robot for transferring a substrate between a process chamber and a space for storing a substrate such as a wafer, the transfer vacuum robot having a finger and a transfer accuracy And a transfer vacuum robot capable of reducing the area occupied in a chamber having a small turning radius.

In conventional transfer vacuum robots, the arms or linkages of the transfer device are configured in a coaxial manner, for example using a plurality of motors, for example, to allow movement in three degrees of freedom or more. The outermost axis may be coupled to a hub for rotating multiple arms, for example around a rotational center axis, and the two inner axes may be connected to each of the multiple arms through independent belt and pulley configurations.

In order to mount two hands on an arm of such a transport vacuum robot, which is being used, an arm is extended or an upper arm and a lower arm are disposed up and down. However, in this configuration, as the length of the arm becomes longer, the structural rigidity is lowered, which causes a problem that the precision of the transfer operation is lowered. When the rigidity of the arm is increased to improve the precision, the weight of the arm increases or the size of the conveying device becomes large, which makes installation difficult. Further, in the case of having a special structure in order to increase the structural stiffness of the arm, there is a problem that the operation speed of the transfer device is lowered because of the restriction of the operation of the transfer device.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a transfer vacuum robot capable of increasing the structural rigidity of each hand while enhancing the accuracy of the transfer operation.

It is another object of the present invention to provide a transfer vacuum robot which minimizes the space occupied by the equipment by minimizing the turning radius of the transfer vacuum robot, thereby minimizing the space for maintaining the vacuum.

It is another object of the present invention to provide a transfer vacuum robot which has a symmetrical structure of parts of an arm when a transfer vacuum robot is assembled, thereby improving rigidity and being compatible with each other and being easy to assemble.

In addition, an object of the present invention is to provide a transfer vacuum robot capable of precise control by disposing an upper hand and a lower hand on the same drive shaft.

In order to achieve the above object, a transport vacuum robot, a lower body portion having a guide block for performing a vertical linear movement along the guide line and a first drive device for transmitting power to the guide block; A guide part disposed in the lower body member and having a second driving device coupled to the guide block to rotate vertically; The chamber is formed in a hollow and rotated by the rotational force of the second drive device and the third drive device disposed in the plurality of the rotating frame and the upper end of the rotating frame and the chamber is connected to the third drive device An upper body part having an upper cover to prevent the injection of foreign matter into the interior; A plurality of hands including a driving force arm connected to the third driving device to receive a driving force and having a linear movement while having an auxiliary arm spaced apart from the driving force arm by a predetermined distance to minimize stiffness and shaking; It provides a transfer vacuum robot comprising a portion.

Preferably, the driving force arm is connected to the third driving device and the drive joint member for transmitting the driving force and the first link member and the first link member having a predetermined length in the form of a bar while being engaged with the drive joint member; It is preferable to have a second link member which is fastened and is shorter in length than the first link member.

In addition, the auxiliary arm is connected to a third driving device which is spaced apart from a predetermined distance, and a third link which is spaced apart from the first link member while being engaged with the bearing joint member and the bearing joint member which do not transmit the driving force. It is preferable to have a fourth link member which is engaged with the member and the third link member and is shorter than the third link member and is spaced apart from the second link member by a predetermined distance.

In addition, the driving force arm and the auxiliary arm are preferably arranged in a plurality of layers on the basis of the rotation axis connected to the third driving device in order to minimize the area for maintaining the vacuum state.

In addition, it is preferable that the arms are arranged in multiple layers with respect to the rotation axis connected with the third driving device and the positions of the arms are formed symmetrically with respect to each other for precise control by applying the same mechanical features.

In addition, the first link member and the second link member is preferably connected by a gear.

In addition, the rotating frame and the cover is transport vacuum robot, characterized in that separated from each other.

According to another aspect of the present invention, there is provided a transfer vacuum robot, comprising: an upper cover having a third area coupled to a lower end thereof and having a large area; A hand portion including a driving force arm connected to the third driving device to receive a driving force and having a linear movement while having a supplementary arm spaced apart from the driving force arm by a predetermined distance to minimize stiffness and shaking; To provide a transfer vacuum robot.

In addition, the driving force arm is coupled to the first link member and the first link member having a predetermined length in the form of a bar while being coupled to the drive joint member and the drive joint member which are connected to the third driving device to transmit the driving force. It is preferable to have a second link member having a length shorter than that of the first link member.

In addition, the auxiliary arm is connected to a third driving device which is spaced apart from a predetermined distance, and a third link which is spaced apart from the first link member while being engaged with the bearing joint member and the bearing joint member which do not transmit the driving force. It is preferable to have a fourth link member which is engaged with the member and the third link member and is shorter than the third link member and spaced apart from the second link member by a predetermined distance.

According to another aspect of the present invention, a process apparatus driven with the transport vacuum robot described.

The transfer vacuum robot according to the present invention has the effect of providing a driving vacuum arm and a subsidiary arm in each upper hand / lower hand so as to increase the rigidity generated during driving and improve the accuracy of the transfer operation .

In addition, it is possible to minimize the space occupied by the equipment by minimizing the turning radius of the transfer vacuum robot, thereby minimizing the space for maintaining the vacuum, thereby saving maintenance cost.

In addition, by providing a transfer vacuum robot having a symmetrical structure for easy assembly, there is an effect that each part can be compatible with each other.

In addition, by using a rotating frame and the upper cover, the user can easily separate the upper cover and there is an effect of providing a transfer vacuum robot that is easy to maintain the boss.

In addition, there is an effect of providing a transfer vacuum robot capable of precise control by applying the same stiffness to the upper hand and the lower hand.

1 is a front view of a transfer vacuum robot according to an embodiment of the present invention;
Figure 2 is a plan view of Figure 1;
Figure 3 is a side view of Figure 1;
4 is a sectional view of Fig. 3; Fig.
5 is a partially enlarged view of FIG. 4.
Figure 6 is a trajectory diagram showing the trajectory of the driving force arm and the auxiliary arm of the transport vacuum robot according to an embodiment of the present invention.
FIG. 7 is a a cross-sectional view of FIG. 2; FIG.
FIG. 8 is a bb cross-sectional view of FIG. 2; FIG.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description of the present invention, detailed descriptions according to related known functions or configurations will be omitted when it is determined that the detailed description may unnecessarily obscure the subject matter of the present invention.

Prior to the entry, in describing the present invention, even if the embodiments are different, the same reference numerals are used for the same configuration, and the description thereof may be omitted as necessary.

Fig. 1 is a front view of a transfer vacuum robot according to an embodiment of the present invention, Fig. 2 is a plan view of Fig. 1, Fig. 3 is a side view of Fig. 1, and Fig. 4 is a sectional view of Fig.

The transporting vacuum robot according to the preferred embodiment of the present invention includes a lower body portion 10 for supporting other components and a connection portion 20 disposed inside the lower body portion 10 and capable of ascending or descending, An upper body portion 30 disposed at an upper portion of the connection portion 20 and a connection portion 20 and an upper body portion 30 disposed at an upper end portion of the upper body portion 30 and spaced apart from each other by a predetermined distance, Hand < / RTI >

The lower body portion 10 supports other components and is disposed on the ground. The lower body part 10 includes a first driving device 110 for driving the connecting part 20 in a vertical linear motion and a guide part 22 for guiding the upward and downward linear movement of the connecting part 20 located inside the lower body part 10 120).

The first driving device 110 includes a motor that is disposed inside the lower body portion 10 and is electrically driven. The motor is connected to a pulley provided at an end portion of the ball screw shaft spaced apart by a predetermined distance from the driving portion side. The ball screw shaft allows the connecting portion 20 to linearly move in a vertical direction between predetermined height sections.

The guide part 120 is located inside the lower body part 10 and includes a rail extending in the height direction and a block moving on the rail. When more than one rail is provided, it is preferable that each rail is arrange | positioned at equal angle intervals. For example, if there are three rails, they are arranged at intervals of 120 degrees. The block is connected to the connecting portion 20 to guide the vertical movement of the up and down.

The connecting portion 20 linearly moves upward and downward in the lower body portion 10. The connection part 20 rotatably supports the upper body part 30. The connection part 20 includes a frame part 220 connected to the guide part 120 of the lower body part 10, and a second driving device 210 and a second driving device 210 positioned inside the frame part 220. ).

The frame portion 220 is connected to a block that is guided along the rails of the guide portion 120. The frame unit 220 vertically moves between predetermined height sections. The frame part 220 has a hollow shape, and the first rotating member 230 (reduction gear) is disposed in the hollow part. The frame portion 220 may be made of a lightweight metal material such as aluminum to increase the structural rigidity and at the same time reduce the weight of the entire apparatus.

The first rotating member 230 is disposed in the hollow portion provided above the frame portion 220. The first rotating member 230 may have a hollow portion, and the air supply pipe may be disposed through the hollow portion. Various power cables and the like may be disposed to vomit the hollow portion of the first rotating member 230.

The second driving device 210 includes a motor which is located inside the frame portion 220 and is electrically driven. Since the first rotating member 230 has a hollow portion through which an air supply pipe or a power cable can pass, it is difficult to directly connect with the rotating shaft of the motor. Therefore, the second driving device 210 preferably includes a driving force transmission shaft 240 having a rotation axis extending in parallel with the rotation axis of the motor and the rotation axis of the driving force transmission unit. The driving force transmission shaft 240 is preferably formed in a hollow shape. The rotating shaft of the second drive device 210 motor is connected to a pulley and a belt provided at one end of the driving force transmission shaft 240, and the pulley provided at the other end of the driving force transmission shaft 240 is provided at the lower end of the first rotating member 230. It is connected by a pulley and a belt. It is preferable to keep the distance between the driving force transmission shaft 240 and the rotating shaft of the rotating member 230 to minimize the width of the lower body portion 10 to a minimum. The second driving device 210 rotates the upper body part 30 as a result of transmitting a rotational driving force to the rotating member 230.

The upper body portion 30 supports the upper hand 50 and the lower hand 60. The upper body portion 30 includes a rotating frame 350 rotated by a rotational force from the driving force transmission shaft 240 and an upper cover 330 for preventing foreign substances generated inside the rotating frame 350 from entering the processing chamber, And a plurality of third driving devices 310 coupled to lower ends of the lid 330 to drive the upper hand 50 and the lower hand 60, respectively.

The rotating frame 350 prevents dust from being discharged to the outside. The rotation frame 350 is connected to the driving force transmission shaft 240. The rotating frame 350 is preferably formed in a hollow shape. The rotation frame 350 allows various cables to be connected to the third driving device 310 from the inside of the hollow shaft of the driving force transmission shaft 240. The rotating frame 350 prevents the dust and dust generated during the driving of the third driving device 310 from being injected into the vacuum chamber 80.

The upper cover 330 is fastened to the upper end of the rotating frame 350. The upper cover 330 prevents the dust and dust generated during the driving inside the rotating frame 350 from being injected into the vacuum chamber 80. The upper cover 330 is preferably formed to be separable from the rotary frame 350. This is because the upper hand 50 / the lower hand 60 can be quickly replaced at an abnormal time. Furthermore, it is intended to cope flexibly with a failure occurring in the production process. A plurality of first rotating joints and a plurality of second rotating joints are disposed at the lower end of the upper cover 330.

The plurality of third driving devices 310 includes a motor which is located inside the upper body 30 and is electrically driven. The third driving device 310 transmits the driving force in association with the plurality of first rotating joints 320. The first rotary joint 320 preferably uses a speed reducer. It is preferable that the plurality of third driving devices 310 are provided with four motors corresponding to the first rotating joint 320. This is not intended to limit the number of the third driving devices 310. It is preferable that the third driving device 310 is disposed in the upward direction. Preferably, the drive shaft of the third drive device 310 is coupled to the first rotary joint 320. This is not to limit the connection of the third driving device 310 and the first rotating joint 320. For example, they can be connected using pulleys and belts.

The first rotary joint 320 receives the driving force of the third driving device 310 and transmits the driving force to the upper hand 50 / the lower hand 60. It is preferable that the first rotary joint 320 uses a speed reducer. The first rotary joint 320 is connected to the drive shaft of the third drive device 310. The first rotary joint 320 is preferably connected to the rotary shaft 370 to reduce the rotation speed and increase the torque. The first rotary joint 320 is disposed at the lower end of the upper cover 330. A plurality of first rotation joints 320 are spaced apart from each other by a predetermined distance. This is spaced apart in a range where the third driving device 310 does not interfere with each other.

The upper hand 50 and the lower hand 60 include a finger 520 that supports the substrate while linearly moving by an arm 70 and an arm 70 that are linearly moved by receiving the driving force of the rotary shaft 370 .

The upper hand 50 / lower hand 60 may be made of a lightweight metal material such as aluminum to increase the structural rigidity and simultaneously reduce the weight of the entire apparatus. The upper hand 50 / the lower hand 60 are disposed at the upper end of the upper body portion 30. [

Finger 520 is preferably made of a material with low vibration generated without damaging the substrate and the wafer due to static electricity. Finger 520 is preferably formed with a mounting groove on which the substrate is seated. The finger 520 may be provided with a suction port to facilitate movement of the substrate from the arm 70.

5 is a partially enlarged view of FIG. 4, FIG. 6 is a trajectory diagram showing a trajectory of a driving force arm and an auxiliary arm of a transport vacuum robot according to an exemplary embodiment of the present invention.

Referring to the drawings, the arm 70 connects the upper hand 50 and the lower hand 60 to the rotation shaft 370, respectively. The arm (70) includes a driving force arm (72) for transmitting a driving force for rectilinear motion and an auxiliary arm (74) for preventing the driving force arm (72) from shaking.

The driving force arm 72 converts the driving force of the third driving device into a linear motion and performs a linear motion. The driving force arm 72 includes a first link member 711 having a predetermined length and a second link member 713 fastened to the first link member 711 and a first link member 711 connected to the rotating shaft 370 And a driving joint member 712 which is formed integrally. The first link member 711 is preferably longer than the second link member 713.

The first link member 711 is formed into a bar shape having a rectangular shape. In order to increase the structural rigidity of the first link member 711, it may be made of a light metal material such as aluminum. The first link member 711 is formed so as to be hollow inside to reduce the weight of the entire apparatus. One end of the first link member 711 is coupled with the driving joint member 712 and connected to the rotating shaft, and the other end is coupled to the second rotating joint (not shown), so that the second link member 713 performs linear motion . The first link member 711 rotates at a predetermined angle to advance the second link member 713. [ That is, when the first link member 711 rotates by a predetermined angle, the second link member 713 performs linear motion. This is a phenomenon in which a two-link link performs a linear movement in a certain range.

The second link member 713 is formed in the shape of a rectangular bar so as to have a constant partial rigidity. The second link member 713 may be made of a light metal material such as aluminum in order to enhance the structural rigidity. The second link member 713 is formed so as to be hollow inside to reduce the weight of the entire apparatus. One end of the second link member 713 is rotatably connected to the first link member 711 through a second rotational joint (not shown), and the other end is connected to the finger.

The auxiliary arm 74 is disposed apart from the driving force arm 72 by a certain distance. The auxiliary arm 72 performs a linear motion when the driving force arm 72 is converted into a linear motion. The auxiliary arm 74 has a third link member 715 having a predetermined length and a fourth link member 717 and a third link member 715 which are fastened to the third link member 715 and connected to the rotation shaft 370 And a bearing joint member 714 which is formed integrally therewith.

The third link member 715 is formed in the shape of a bar having a rectangular shape. The third link member 715 may be made of a light metal material such as aluminum in order to enhance the structural rigidity. The third link member 715 is formed so as to be hollow inside to reduce the weight of the entire apparatus. One end of the third link member 715 is coupled with the bearing joint member 714 and connected to the rotation shaft, and the other end is coupled to the second rotation joint (not shown), so that the fourth link member 717 performs a linear motion . That is, the auxiliary arm 74 linearly moves by the driving force generated by the driving force arm 72. [ At this time, the auxiliary arm 74 minimizes the shaking generated during driving. Further, the auxiliary arm 74 prevents the arm 70 from sagging.

The fourth link member 717 is formed in the form of a rectangular bar so as to have a certain partial rigidity. It may be made of a lightweight metal material such as aluminum in order to enhance the structural rigidity of the fourth link member 717. [ The fourth link member 717 is formed so as to be hollow inside to reduce the weight of the entire apparatus. One end of the fourth link member 717 is rotatably connected to the fourth link member 717 through a second rotation joint (not shown), and the other end is connected to the finger.

FIG. 7 is a-a sectional view of FIG. 2, and FIG. 8 is a b-b sectional view of FIG. 2.

Referring to FIG. 5, when the driving force arm 72 is disposed at the lower end of the rotary shaft 370 for transmitting a driving force, an auxiliary arm 74 is disposed at an upper end spaced apart by a certain distance. This is to prevent the lower hand and the upper hand from being simultaneously driven. Further, by disposing the driving force arm 72 and the auxiliary arm 74 from the rotating shaft 370 in a multi-layered structure, the arm 70 which is generated at the time of driving can be prevented from swinging and sagging. Further, by disposing the driving force arm 72 and the auxiliary arm 74 in a mutually different layer, the production cost of the product can be reduced by using the same parts. In addition, the same mechanical features can be precisely controlled by applying the upper hand 50 / the lower hand 60 under the same conditions.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. It is therefore to be understood that the embodiments described above are illustrative and not restrictive in every respect and that the scope of the present invention is defined by the appended claims rather than the foregoing description, And all changes or modifications derived from equivalents thereof should be construed as being included within the scope of the present invention.

1: Feed vacuum robot
10: Lower body part
110:
20:
210: second drive device 220: frame portion 230: first rotating member 240: driving force transmission shaft 30: upper body portion
310: third driving device 320: first rotating joint 330: upper cover 350: rotating frame 370: rotating shaft
50: upper hand
60: lower hand
70 cancer
72: driving force arm 74: auxiliary arm
711: first link member 712: drive joint member 713: second link member 714: bearing joint member 715: third link member 717: fourth link member
80: Vacuum chamber

Claims

As a transfer vacuum robot,
A lower body portion 10 having a guide block for performing linear motion along the guide line and a first drive device 110 for transmitting power to the guide block;
A guide unit (20) located inside the lower body part and coupled to the guide block to rotate and move vertically;
A third driving device 310 in which a plurality of the rotating frames 350 are formed inside the rotating frame 350 and the rotating frame 350 is rotated by the rotation of the second driving device 210, And an upper cover (330) disposed at an upper end of the third driving unit (310) and connected to the third driving unit (310) to prevent the injection of foreign substances into the chamber.
The driving force arm 72 is connected to the third driving device 310 to receive a driving force and is linearly spaced apart from the driving force arm 72, and has an auxiliary arm 74 for minimizing rigidity and shaking. In order to minimize the area maintaining the vacuum state, the driving force arm 72 and the auxiliary arm 74 are arranged in a plurality of layers on the basis of the rotation shaft 370 connected to the third driving device 310 to perform a linear movement. A plurality of hand portions comprising an arm 70
Including a transport vacuum robot.

The method according to claim 1,
The driving force arm 72,
A driving joint member 712 connected to the third driving device 310 and transmitting a driving force;
The first link member 711 is fastened to the drive joint member 712 and has a predetermined length of a bar shape.
And a second link member (713) fastened to the first link member (711) and shorter in length than the first link member (711).

The method according to claim 2,
The auxiliary arm 74,
A bearing joint member 714 connected to the third driving device 310 spaced apart from the driving force arm 72 and not transmitting a driving force;
A third link member 715 fastened to the bearing joint member 714 and spaced apart from the first link member 711 by a predetermined distance;
And a fourth link member 717 which is fastened to the third link member 715 and is shorter than the third link member 715 and is spaced apart from the second link member 713 by a predetermined distance. Characterized by a transfer vacuum robot.

delete

The method of claim 3,
In order to perform precise control by applying the same mechanical characteristics, the arms 70 are arranged in multiple layers with respect to the rotation shaft 370 connected to the third driving device 310 and the positions of the arms 70 are symmetrical with each other. Transfer vacuum robot, characterized in that formed as.

The method according to any one of claims 2, 3 and 5,
The first link member 711 and the second link member 713 is a transfer vacuum robot, characterized in that connected by a gear.

The method of claim 3,
Wherein the rotary frame (350) and the upper lid (330) are separated from each other.

delete