KR101382145B1 - Vacuum transfer robot - Google Patents
Vacuum transfer robot Download PDFInfo
- Publication number
- KR101382145B1 KR101382145B1 KR1020120117169A KR20120117169A KR101382145B1 KR 101382145 B1 KR101382145 B1 KR 101382145B1 KR 1020120117169 A KR1020120117169 A KR 1020120117169A KR 20120117169 A KR20120117169 A KR 20120117169A KR 101382145 B1 KR101382145 B1 KR 101382145B1
- Authority
- KR
- South Korea
- Prior art keywords
- link member
- driving force
- driving device
- driving
- arm
- Prior art date
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J11/00—Manipulators not otherwise provided for
- B25J11/0095—Manipulators transporting wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J18/00—Arms
- B25J18/02—Arms extensible
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
- B25J9/042—Cylindrical coordinate type comprising an articulated arm
- B25J9/043—Cylindrical coordinate type comprising an articulated arm double selective compliance articulated robot arms [SCARA]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer
Landscapes
- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
A transfer vacuum robot is disclosed. A conveying vacuum robot, comprising: a lower body portion having a guide block for vertically linear movement along a guide line and a first driving device for transmitting power to the guide block; A guide part having a second driving device which is located inside the lower body member and is fastened to the guide block and rotates vertically and moves vertically; a rotating frame formed of a hollow inside and rotating by the rotational force of the second driving device And an upper body part having a third driving device disposed inside the rotating frame and an upper cover disposed at an upper end of the rotating frame and connected to the third driving device to prevent injection of foreign substances into the chamber; A plurality of hands including a driving force arm connected to the third driving device to receive a driving force and having a linear movement while having an auxiliary arm spaced apart from the driving force arm by a predetermined distance to minimize stiffness and shaking; It provides a transfer vacuum robot comprising a portion. .
Description
The present invention relates to a transfer vacuum robot, and more particularly, to a transfer vacuum robot for transferring a substrate between a process chamber and a space for storing a substrate such as a wafer, the transfer vacuum robot having a finger and a transfer accuracy And a transfer vacuum robot capable of reducing the area occupied in a chamber having a small turning radius.
In conventional transfer vacuum robots, the arms or linkages of the transfer device are configured in a coaxial manner, for example using a plurality of motors, for example, to allow movement in three degrees of freedom or more. The outermost axis may be coupled to a hub for rotating multiple arms, for example around a rotational center axis, and the two inner axes may be connected to each of the multiple arms through independent belt and pulley configurations.
In order to mount two hands on an arm of such a transport vacuum robot, which is being used, an arm is extended or an upper arm and a lower arm are disposed up and down. However, in this configuration, as the length of the arm becomes longer, the structural rigidity is lowered, which causes a problem that the precision of the transfer operation is lowered. When the rigidity of the arm is increased to improve the precision, the weight of the arm increases or the size of the conveying device becomes large, which makes installation difficult. Further, in the case of having a special structure in order to increase the structural stiffness of the arm, there is a problem that the operation speed of the transfer device is lowered because of the restriction of the operation of the transfer device.
SUMMARY OF THE INVENTION It is an object of the present invention to provide a transfer vacuum robot capable of increasing the structural rigidity of each hand while enhancing the accuracy of the transfer operation.
It is another object of the present invention to provide a transfer vacuum robot which minimizes the space occupied by the equipment by minimizing the turning radius of the transfer vacuum robot, thereby minimizing the space for maintaining the vacuum.
It is another object of the present invention to provide a transfer vacuum robot which has a symmetrical structure of parts of an arm when a transfer vacuum robot is assembled, thereby improving rigidity and being compatible with each other and being easy to assemble.
In addition, an object of the present invention is to provide a transfer vacuum robot capable of precise control by disposing an upper hand and a lower hand on the same drive shaft.
In order to achieve the above object, a transport vacuum robot, a lower body portion having a guide block for performing a vertical linear movement along the guide line and a first drive device for transmitting power to the guide block; A guide part disposed in the lower body member and having a second driving device coupled to the guide block to rotate vertically; The chamber is formed in a hollow and rotated by the rotational force of the second drive device and the third drive device disposed in the plurality of the rotating frame and the upper end of the rotating frame and the chamber is connected to the third drive device An upper body part having an upper cover to prevent the injection of foreign matter into the interior; A plurality of hands including a driving force arm connected to the third driving device to receive a driving force and having a linear movement while having an auxiliary arm spaced apart from the driving force arm by a predetermined distance to minimize stiffness and shaking; It provides a transfer vacuum robot comprising a portion.
Preferably, the driving force arm is connected to the third driving device and the drive joint member for transmitting the driving force and the first link member and the first link member having a predetermined length in the form of a bar while being engaged with the drive joint member; It is preferable to have a second link member which is fastened and is shorter in length than the first link member.
In addition, the auxiliary arm is connected to a third driving device which is spaced apart from a predetermined distance, and a third link which is spaced apart from the first link member while being engaged with the bearing joint member and the bearing joint member which do not transmit the driving force. It is preferable to have a fourth link member which is engaged with the member and the third link member and is shorter than the third link member and is spaced apart from the second link member by a predetermined distance.
In addition, the driving force arm and the auxiliary arm are preferably arranged in a plurality of layers on the basis of the rotation axis connected to the third driving device in order to minimize the area for maintaining the vacuum state.
In addition, it is preferable that the arms are arranged in multiple layers with respect to the rotation axis connected with the third driving device and the positions of the arms are formed symmetrically with respect to each other for precise control by applying the same mechanical features.
In addition, the first link member and the second link member is preferably connected by a gear.
In addition, the rotating frame and the cover is transport vacuum robot, characterized in that separated from each other.
According to another aspect of the present invention, there is provided a transfer vacuum robot, comprising: an upper cover having a third area coupled to a lower end thereof and having a large area; A hand portion including a driving force arm connected to the third driving device to receive a driving force and having a linear movement while having a supplementary arm spaced apart from the driving force arm by a predetermined distance to minimize stiffness and shaking; To provide a transfer vacuum robot.
In addition, the driving force arm is coupled to the first link member and the first link member having a predetermined length in the form of a bar while being coupled to the drive joint member and the drive joint member which are connected to the third driving device to transmit the driving force. It is preferable to have a second link member having a length shorter than that of the first link member.
In addition, the auxiliary arm is connected to a third driving device which is spaced apart from a predetermined distance, and a third link which is spaced apart from the first link member while being engaged with the bearing joint member and the bearing joint member which do not transmit the driving force. It is preferable to have a fourth link member which is engaged with the member and the third link member and is shorter than the third link member and spaced apart from the second link member by a predetermined distance.
According to another aspect of the present invention, a process apparatus driven with the transport vacuum robot described.
The transfer vacuum robot according to the present invention has the effect of providing a driving vacuum arm and a subsidiary arm in each upper hand / lower hand so as to increase the rigidity generated during driving and improve the accuracy of the transfer operation .
In addition, it is possible to minimize the space occupied by the equipment by minimizing the turning radius of the transfer vacuum robot, thereby minimizing the space for maintaining the vacuum, thereby saving maintenance cost.
In addition, by providing a transfer vacuum robot having a symmetrical structure for easy assembly, there is an effect that each part can be compatible with each other.
In addition, by using a rotating frame and the upper cover, the user can easily separate the upper cover and there is an effect of providing a transfer vacuum robot that is easy to maintain the boss.
In addition, there is an effect of providing a transfer vacuum robot capable of precise control by applying the same stiffness to the upper hand and the lower hand.
1 is a front view of a transfer vacuum robot according to an embodiment of the present invention;
Figure 2 is a plan view of Figure 1;
Figure 3 is a side view of Figure 1;
4 is a sectional view of Fig. 3; Fig.
5 is a partially enlarged view of FIG. 4.
Figure 6 is a trajectory diagram showing the trajectory of the driving force arm and the auxiliary arm of the transport vacuum robot according to an embodiment of the present invention.
FIG. 7 is a a cross-sectional view of FIG. 2; FIG.
FIG. 8 is a bb cross-sectional view of FIG. 2; FIG.
Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description of the present invention, detailed descriptions according to related known functions or configurations will be omitted when it is determined that the detailed description may unnecessarily obscure the subject matter of the present invention.
Prior to the entry, in describing the present invention, even if the embodiments are different, the same reference numerals are used for the same configuration, and the description thereof may be omitted as necessary.
Fig. 1 is a front view of a transfer vacuum robot according to an embodiment of the present invention, Fig. 2 is a plan view of Fig. 1, Fig. 3 is a side view of Fig. 1, and Fig. 4 is a sectional view of Fig.
The transporting vacuum robot according to the preferred embodiment of the present invention includes a
The
The
The
The connecting
The
The first rotating
The
The upper body portion 30 supports the
The
The
The plurality of
The first rotary joint 320 receives the driving force of the
The
The
5 is a partially enlarged view of FIG. 4, FIG. 6 is a trajectory diagram showing a trajectory of a driving force arm and an auxiliary arm of a transport vacuum robot according to an exemplary embodiment of the present invention.
Referring to the drawings, the
The driving
The
The
The
The
The
FIG. 7 is a-a sectional view of FIG. 2, and FIG. 8 is a b-b sectional view of FIG. 2.
Referring to FIG. 5, when the driving
It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. It is therefore to be understood that the embodiments described above are illustrative and not restrictive in every respect and that the scope of the present invention is defined by the appended claims rather than the foregoing description, And all changes or modifications derived from equivalents thereof should be construed as being included within the scope of the present invention.
1: Feed vacuum robot
10: Lower body part
110:
20:
210: second drive device 220: frame portion 230: first rotating member 240: driving force transmission shaft 30: upper body portion
310: third driving device 320: first rotating joint 330: upper cover 350: rotating frame 370: rotating shaft
50: upper hand
60: lower hand
70 cancer
72: driving force arm 74: auxiliary arm
711: first link member 712: drive joint member 713: second link member 714: bearing joint member 715: third link member 717: fourth link member
80: Vacuum chamber
Claims (11)
A lower body portion 10 having a guide block for performing linear motion along the guide line and a first drive device 110 for transmitting power to the guide block;
A guide unit (20) located inside the lower body part and coupled to the guide block to rotate and move vertically;
A third driving device 310 in which a plurality of the rotating frames 350 are formed inside the rotating frame 350 and the rotating frame 350 is rotated by the rotation of the second driving device 210, And an upper cover (330) disposed at an upper end of the third driving unit (310) and connected to the third driving unit (310) to prevent the injection of foreign substances into the chamber.
The driving force arm 72 is connected to the third driving device 310 to receive a driving force and is linearly spaced apart from the driving force arm 72, and has an auxiliary arm 74 for minimizing rigidity and shaking. In order to minimize the area maintaining the vacuum state, the driving force arm 72 and the auxiliary arm 74 are arranged in a plurality of layers on the basis of the rotation shaft 370 connected to the third driving device 310 to perform a linear movement. A plurality of hand portions comprising an arm 70
Including a transport vacuum robot.
The driving force arm 72,
A driving joint member 712 connected to the third driving device 310 and transmitting a driving force;
The first link member 711 is fastened to the drive joint member 712 and has a predetermined length of a bar shape.
And a second link member (713) fastened to the first link member (711) and shorter in length than the first link member (711).
The auxiliary arm 74,
A bearing joint member 714 connected to the third driving device 310 spaced apart from the driving force arm 72 and not transmitting a driving force;
A third link member 715 fastened to the bearing joint member 714 and spaced apart from the first link member 711 by a predetermined distance;
And a fourth link member 717 which is fastened to the third link member 715 and is shorter than the third link member 715 and is spaced apart from the second link member 713 by a predetermined distance. Characterized by a transfer vacuum robot.
In order to perform precise control by applying the same mechanical characteristics, the arms 70 are arranged in multiple layers with respect to the rotation shaft 370 connected to the third driving device 310 and the positions of the arms 70 are symmetrical with each other. Transfer vacuum robot, characterized in that formed as.
The first link member 711 and the second link member 713 is a transfer vacuum robot, characterized in that connected by a gear.
Wherein the rotary frame (350) and the upper lid (330) are separated from each other.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020120117169A KR101382145B1 (en) | 2012-10-22 | 2012-10-22 | Vacuum transfer robot |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020120117169A KR101382145B1 (en) | 2012-10-22 | 2012-10-22 | Vacuum transfer robot |
Publications (1)
Publication Number | Publication Date |
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KR101382145B1 true KR101382145B1 (en) | 2014-04-17 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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KR1020120117169A KR101382145B1 (en) | 2012-10-22 | 2012-10-22 | Vacuum transfer robot |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019521869A (en) * | 2016-06-28 | 2019-08-08 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | Dual robot including spaced upper arms and alternating lists, and system and method including them |
US20220384240A1 (en) * | 2021-05-31 | 2022-12-01 | T-Robotics Co, Ltd. | Substrate Transfer Robot For Transferring Substrate In Vacuum Chamber |
KR20230061938A (en) | 2021-10-29 | 2023-05-09 | 주식회사 라온테크 | Wafer transfer robot apparatus based on direct drive motor |
US11850742B2 (en) | 2019-06-07 | 2023-12-26 | Applied Materials, Inc. | Dual robot including splayed end effectors and systems and methods including same |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000195923A (en) * | 1998-12-28 | 2000-07-14 | Hitachi Ltd | Robot for carrying, carrier, carrier in vacuum chamber, and process treatment equipment |
JP2011101912A (en) | 2009-11-10 | 2011-05-26 | Yaskawa Electric Corp | Arm mechanism and vacuum robot equipped with the same |
KR101160242B1 (en) * | 2006-11-14 | 2012-06-26 | 가부시키가이샤 알박 | Rotation introducing mechanism, substrate transfer device, and vacuum treating apparatus |
-
2012
- 2012-10-22 KR KR1020120117169A patent/KR101382145B1/en active IP Right Grant
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000195923A (en) * | 1998-12-28 | 2000-07-14 | Hitachi Ltd | Robot for carrying, carrier, carrier in vacuum chamber, and process treatment equipment |
KR101160242B1 (en) * | 2006-11-14 | 2012-06-26 | 가부시키가이샤 알박 | Rotation introducing mechanism, substrate transfer device, and vacuum treating apparatus |
JP2011101912A (en) | 2009-11-10 | 2011-05-26 | Yaskawa Electric Corp | Arm mechanism and vacuum robot equipped with the same |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019521869A (en) * | 2016-06-28 | 2019-08-08 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | Dual robot including spaced upper arms and alternating lists, and system and method including them |
US10814475B2 (en) | 2016-06-28 | 2020-10-27 | Applied Materials, Inc. | Dual robot including spaced upper arms and interleaved wrists and systems and methods including same |
US10850390B2 (en) | 2016-06-28 | 2020-12-01 | Applied Materials, Inc. | Dual robot including spaced upper arms and interleaved wrists and systems and methods including same |
US11850742B2 (en) | 2019-06-07 | 2023-12-26 | Applied Materials, Inc. | Dual robot including splayed end effectors and systems and methods including same |
US20220384240A1 (en) * | 2021-05-31 | 2022-12-01 | T-Robotics Co, Ltd. | Substrate Transfer Robot For Transferring Substrate In Vacuum Chamber |
KR20230061938A (en) | 2021-10-29 | 2023-05-09 | 주식회사 라온테크 | Wafer transfer robot apparatus based on direct drive motor |
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