JPS61121888A - Industrial robot - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention is used in the technical field of industrial robots, and particularly relates to an industrial robot that can be used while maintaining a clean atmosphere.

(Prior art) For example, in the process of bonding copper foil to a plastic board on a line that manufactures printed circuit boards, work is required to be done in a clean atmosphere because dust does not adhere to it. Although there is a demand for automation, the current situation is that industrial robots have no choice but to rely on manual work because there is a risk of scattering dust. The purpose is to provide an industrial robot that can be used while maintaining a good atmosphere.

(Disclosure of the Invention) This invention relates to an improvement in an industrial robot configured by sequentially connecting a number of movable members according to the degree of freedom required for the support member. The member is characterized in that a central part is formed in the member, the hollow part is communicated with the outside air at each connecting part of each member by an airtight seal, and the hollow part is further communicated with an exhaust means. It can be used while maintaining a clean atmosphere.

(Example) Hereinafter, the present invention will be described in detail.The industrial robot of the present invention shown in FIG. The first movable members 4 are sequentially connected. The support member 2 has a first hollow part 2a, the seventh movable member 3 has a second hollow part 3a*3'aI, and the second movable member 4 has a third hollow part 4a.

A third hollow portion 5a is formed inside the third movable J member 5, and a fifth hollow portion 6a is formed inside the first movable member 4, respectively.

The support member 2 is constructed by extending an inner cylinder 2b and an outer cylinder 2C upward, while the first movable member 3 is an outer cylinder 6C in which an inner cylinder 3b and an outer cylinder 3C are extended downward. is outer cylinder 2C
Both cylinders 2' + 3' are mounted so that they can move up and down.
A first airtight seal 7a is inserted between the rain hollow part 2a.
+ 3 a t - The first part that is isolated from the outside air and communicates with each other.
A connecting portion 7 is configured. On the other hand, the inner cylinder 3b is
It is loosely fitted with a gap between the two. In the second hollow part 3a between the inner cylinder 2b and the outer cylinder 5C, a first drive device 12 and λ guide devices 13 are arranged at intervals of /2θ degrees. A shaft encoder 12b5 is fixed to the cylinder 2b and is directly connected to the motor 12a and outputs rotation angle information (that is, vertical position information of the first movable member 3). ! and a pole nut 12b provided on the outer cylinder 3C and movably screwed into the pole screw 120! l is configured. On the other hand, the guide device 13 is configured by a guide rod 13a provided in the outer cylinder 3C and a guide cylinder 13b provided in the inner cylinder 2b and fitted with a rod 13a so as to be vertically movable.

A wire cable insertion port 3d and an intake port 3e are opened near the lower end of the inner cylinder 3b, while a wire pipe 2d, a main intake pipe 2e, and a sub intake pipe 2f are fitted to the side of the support member 2, so that the wires can be inserted into the inner cylinder 3b. Between the pipe 2d and the electric wire cable insertion port 3d is an expandable W/flexible pipe 14, which connects the main intake pipe 2e and the intake port 3.
e are communicated with each other by a first flexible tube 15 that can be expanded and contracted.

The base end of the first movable member 4 is rotatably supported by a bearing 8b on the first movable member 3 on a vertical shaft, and a first airtight seal 8 & A second connecting portion 8 is constructed in which the rain hollow portions 3a, 3'a'4at are interposed and communicated with each other while being isolated from the outside air. Further, a first drive device 12 is disposed within the second hollow portion 3a. The second drive device 16 is directly connected to the motor 16a provided on the first movable member B, so that all the rotation angle information (that is, the rotation angle information of the first movable member 4 with respect to the first movable member 3) is directly connected to the motor 16a. Output shaft encoder 16
b. A timing gear 1, 116c fixed to the output shaft of the motor 16a is interposed between the first movable member 3 and the second movable member 4, and its input shaft is pivotally supported by the first movable member B. Reducer 16d1 with high original reduction ratio Timing pulley 16e and timing pulley 16C fixed to the input shaft of this reducer 16d! 116G and 16f. Note that the upper part of the seventh movable member B is covered by a cover 3.

At the tip of the first movable member 4, the base end of the third movable member 4 is supported by a bearing 9b (crossed roller bearing) so as to be able to rotate around a vertical axis, and a third movable and communicating third connection 89 is formed. ing. A third drive device 17 is disposed across the second hollow portion 3/a and the third hollow portion 4a. The third drive device 17 includes a motor 17a provided on the arm 4b integral with the first movable member 4 so as to be substantially coaxial with the reducer 16d, and is directly connected to the motor 17a.
A shaft encoder 17b1 that outputs rotation angle information (that is, rotation angle information of the third movable member 5 with respect to the first movable member 4); a timing pulley 170 fixed to the output shaft of the motor 17a; A reducer 17d whose input shaft is pivotally supported by the gJ movable member 4 and interposed between it and the g3 movable member 5.
1. The speed reducer 17d is composed of a timing pulley 17e fixed to the input shaft of the reducer 17d and a timing belt 17f wound between the timing pulleys 17c and 17e. The upper and lower openings of the third hollow part &a of the λ-th movable member 4 are covered by covers 4C and 4d.

A third movable member 6 has a bearing 10b at the tip of the third movable member 5.
+c, the g-th airtight seal 10 is rotatably supported on a vertical shaft, and is provided between the third movable member 5 and the q-th movable member 6.
A is the interposed type, and the rain hollow part 5a.

6at-G connection part 10 that dialyzes with outside air and communicates with each other
is configured. A ninth drive device 18 is disposed across the third hollow portion 4a and the third hollow portion 5a. The ninth drive device 18 includes a motor 18a fixed to the second movable member 4, and is directly connected to the motor 18a to provide rotation angle information (that is, rotation angle information of the second movable member 6 with respect to the second movable member 4) t- Output shaft encoder 18b, motor 1
A reduction gear 18d to which rotational force is transmitted through meshing of a rainbow bevel gear 18C, a chain sprocket 18e provided on the output side of the reduction gear 18d, and a third movable member 5 supported on the same axis as the reduction gear 17d. The two-stage chain sprocket) 18f is integrally formed with the movable member B.
Chain sprocket 18q and chain sprocket 1861 have the same number of teeth as stage chain sprocket 18f.
An endless chain (18h) wrapped between the two-stage chain/sprocket 18f (1λ stage chain sprocket) 1
8f and a chain sprocket 18cr, and a tensile chain/sprocket 18j provided on the third movable member 5 to adjust the tension of the endless chain/181. Note that the upper opening of the third movable member 5 is covered with a cover 5b.

The third movable member 6 is provided with a suction cup 19f as an end effector of the tumor rod 1 at its lower part, and the fifth hollow part 6a of the third movable member 6 is configured to also serve as an intake pipe of the suction cup 19. There is.

Each of the airtight seams 7a+8a, 9a and 10a is made of fluorinated ethylene rubber which is wear resistant and dust-free.

Electric wire cables and shaft encoders 12b, 16b for supplying power and control signals to each of the motors 12a+16a, 17a and 18a.

The electric wire cables (both not shown) that take out the output signals from 17b and 18b are routed from the inner tube 3b to each of the above-mentioned necessary locations via the electric wire cable tube 2d, the first flexible tube 14, and the electric wire cable insertion port 3d. They are connected in a branched manner.

The electric wires and cables are installed with a sufficient margin so that there is no support even when the first movable member 6 moves up and down.

Suction sides of exhaust pumps 11a and 11b serving as exhaust means 11 are communicated with the main intake pipe 2e and the auxiliary intake pipe 2f, respectively. Also, an exhaust pump 11a.

11b is driven by motors 11C and 11d. The air discharged from each exhaust bong 7'11a, 11b is discharged to the outside of the work room.

In this way, when the exhaust pumps 11a and 11b are operated by the motor 11 (!, 11d), the air sucked from the suction cup 19 is transferred to the fifth hollow part 6as and the third hollow part as shown by arrows (solid lines). 5a, the third hollow part 4 & and the first hollow part 3a, 3'a' are suctioned and evacuated by the exhaust pump 11a, and the suction cup 19 operates to suck the conveyed object, and at the same time, the conveyed object is Dust is also sucked in,
The work room can be kept clean without scattering dust.

To release the attraction of the conveyed object, the motor 11C may be stopped.

Note that this suction force is, for example, a gauge pressure of 0. It is possible to do this at about 100 mph atmospheric pressure.

On the other hand, if the first movable member 3t moves up and down, the hollow part 2a,
Since the atmospheric pressure in the exhaust pump 3a changes, the shape of the exhaust pump 11b is determined so that even if the first movable member 3 descends at the maximum speed, the pressure in the hollow parts 2a and 3a does not become higher than, for example, the outside atmospheric pressure. Due to the action of the pump 11b, the dust in the hollow part where the ninth drive device 18 of the first movable member 3 is installed and the hollow part 2a16a is sucked and exhausted as shown by the arrow (dotted chain line), and is exhausted into the working chamber. It is kept clean without being scattered. Note that even if the first movable member 3 goes up and down and the intake port 3e goes up and down, there is no problem in the passage of intake air since it is connected to the main intake pipe 2e by the λ-th flexible pipe 15.

The industrial robot 1 is configured to be controlled by a playback method by a computer (not shown). That is, in the first drive device 12, the ball nut 12d moves up and down due to the rotation of the pole scratcher 12C, and the first movable member 3 moves up and down. Further, in the second drive device 16, the second movable member 4 rotates within a horizontal plane with respect to the first movable member 3. Further, in the third drive device 17, the third movable member 5 rotates within a horizontal plane.

Furthermore, the second movable member 6 rotates around the vertical axis.

Note that even if the third movable member 5 turns, the rotation angle of the G-th movable member 6 with respect to the λ-th movable member 4 remains unchanged.

In this way, the industrial robot 1 is configured as a transportation robot with multiple degrees of freedom. In addition, in FIGS. 2 and 3, the movable range t-2 of the industrial robot 1 is shown surrounded by a dotted chain line and hatched. This invention is not limited to the above-described embodiments, i) As for industrial robots, in addition to horizontally rotating articulated robots such as those in the above-mentioned embodiments, vertically rotating articulated robots, polar coordinate robots, cylindrical coordinate robots, etc. ii) The degree of freedom of the industrial robot is not limited to the degree of freedom of G, but may have other numbers of degrees of freedom; If the end effector is equipped with a suction cup, the suction exhaust for operating the suction cup and the round suction and exhaust for suctioning the dust inside the robot can be shared. In addition to the board, it may be equipped with an electromagnetic suction device or other grasping device, and the industrial robot may be used for other purposes rather than transportation.

V) Although the first and λ-th flexible tubes 14 and 15 are expandable and retractable, they may be constructed by arranging tubes that are not expandable and have sufficient length in a spiral manner.

(Effects of the Invention) The present invention has a supporting member and a movable member successively connected thereto, each having a hollow portion inside, the hollow portions of each member being communicated with the outside air by an airtight seal at the connecting portion, and the hollow portion is communicated with the exhaust means to reduce the pressure to below atmospheric pressure, so that all the dust generated from various devices inside the robot can be collected without leaking into the work room.
The work room can be kept clean. Therefore, a remarkable effect can be achieved in that the work process in the clean room can be easily automated.

[Brief explanation of drawings]

The drawings show an embodiment of the present invention, and FIG. 1 is a vertical sectional view of the interior of an industrial robot, FIG. 1 is a schematic diagram thereof, and FIG. 3 is a schematic plan view of the same. 1...Industrial robot, 2...Support member, 2
a second hollow part, 4... second movable member, 4a...
...Third hollow part, 5...Third movable member, 5a
....Da hollow part, 6...G movable member, 6a...Fifth hollow part (intake pipe), 7...
...First connecting part, 7a...First airtight seal, 8
...Second connecting part, 8a...Second airtight seal, 9...Third connecting part, 9a...Third airtight seal, 10...・・・G connection part, 10a・
...1st airtight seal, 11...exhaust means, 19...suction cup Figure 3 Procedures Amendment Showa Showa Otsuta July 2010/G Date 1 Incident Indication 1978 Patent Application No. 2 G53 Otsu No. 7 2 Name of the invention Industrial robot 3 Relationship with the case of the person making the amendment Patent applicant address No. 26, No. J, Kozone-cho, Nishinomiya City, Hyogo Prefecture Name
(235) ShinMaywa Industries Co., Ltd. Representative: Tonji Tamagawa 4 Agent Postal code: 650 Address: Asahi Seimei Sannomiya Building, 1-3-11 Sannomiya-cho, Chuo-ku, Kobe, Hyogo Prefecture Telephone: Kobe (078) 332-2671 (Main) [Monday 1 name (6873), ノ廿=恢) 正 - ( lick rib 1 biku 5 Date of amendment order
J""-' (voluntary amendment) ~&- 6 Detailed explanation of the invention of the specification subject to amendment 7 Contents of amendment (1) Page 5 of the specification, line 3 and lines 7 to 5 of"
Delete Stretchable. (2) Delete "r3a," in the second line of page 5 of the specification. (3) "In this way, motor 11(!, 11dJ" in line 20 of page 2 of the specification is corrected to "and motor 11C". (4) ", 11b" in line 1 of page 1θ of the specification. (5) Delete "r3a," on page 1θ, line G of the specification.

Claims (3)

[Claims] (1) An industrial robot configured by sequentially connecting movable members to a supporting member, wherein a hollow portion is formed in the supporting member and the movable member, and the hollow portion is sealed with an airtight seal at each connecting portion of each of the members. 1. An industrial robot, characterized in that the robot communicates with outside air in a sealed manner, and further, the hollow part communicates with exhaust means. (2) The industrial robot according to claim 1, wherein the hollow portion is provided with a drive device for driving each movable member. (3) The industrial robot according to claim 1 or 2, wherein the movable member is provided with a suction cup at the tip, and an intake pipe of the suction cup is communicated with the hollow part.