JPS6482814A - Piezoelectric body monocrystal wafer and its manufacture - Google Patents

Piezoelectric body monocrystal wafer and its manufacture

Info

Publication number
JPS6482814A
JPS6482814A JP24051087A JP24051087A JPS6482814A JP S6482814 A JPS6482814 A JP S6482814A JP 24051087 A JP24051087 A JP 24051087A JP 24051087 A JP24051087 A JP 24051087A JP S6482814 A JPS6482814 A JP S6482814A
Authority
JP
Japan
Prior art keywords
mirror
piezoelectric body
sandblasting
coarse
distortion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24051087A
Other languages
Japanese (ja)
Inventor
Masahiro Ogiwara
Etsuo Kiuchi
Makoto Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MIMASU HANDOTAI KOGYO KK
Shin Etsu Chemical Co Ltd
Original Assignee
MIMASU HANDOTAI KOGYO KK
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MIMASU HANDOTAI KOGYO KK, Shin Etsu Chemical Co Ltd filed Critical MIMASU HANDOTAI KOGYO KK
Priority to JP24051087A priority Critical patent/JPS6482814A/en
Publication of JPS6482814A publication Critical patent/JPS6482814A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To prevent the generation of a local deep linear flaw to be the cause of a processing distortion layer and a crack by making one surface of a piezoelectric body mono-crystal wafer into a mirror grinding surface, making other surface into a coarse surface by sandblasting, etching the surface of a suitable coarse surface to several microns or below and removing it. CONSTITUTION:A wafer 1 obtained by slicing a piezoelectric body monocrystal pool generates a thickness nonuniformity and a nonuniform unevenness. This is made into the double surface wrapping and the double surface is made into the parallel plane. Next, when a coarse surface 2 due to the sandblasting is formed on one surface, the wrap is generated due to the difference in the distortion of the double surface, and therefore, this is suitably etched and a distortion is removed. Next, other surface is mirror-ground and a mirror 3 is formed. The mirror grinding is executed, the mirror 3 is formed and a protecting film 4 such as seal wax is covered. Next, the coarse surface 2 due to the sandblasting is formed on the other surface, etching is executed suitably and the warp is removed. Next, the protecting film 4 is removed.
JP24051087A 1987-09-25 1987-09-25 Piezoelectric body monocrystal wafer and its manufacture Pending JPS6482814A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24051087A JPS6482814A (en) 1987-09-25 1987-09-25 Piezoelectric body monocrystal wafer and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24051087A JPS6482814A (en) 1987-09-25 1987-09-25 Piezoelectric body monocrystal wafer and its manufacture

Publications (1)

Publication Number Publication Date
JPS6482814A true JPS6482814A (en) 1989-03-28

Family

ID=17060589

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24051087A Pending JPS6482814A (en) 1987-09-25 1987-09-25 Piezoelectric body monocrystal wafer and its manufacture

Country Status (1)

Country Link
JP (1) JPS6482814A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03220810A (en) * 1990-01-25 1991-09-30 Shin Etsu Chem Co Ltd Piezoelectric single crystal wafer and its manufacture
JPH06349795A (en) * 1993-06-08 1994-12-22 Shin Etsu Handotai Co Ltd Manufacture of semiconductor wafer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03220810A (en) * 1990-01-25 1991-09-30 Shin Etsu Chem Co Ltd Piezoelectric single crystal wafer and its manufacture
JPH06349795A (en) * 1993-06-08 1994-12-22 Shin Etsu Handotai Co Ltd Manufacture of semiconductor wafer

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