JPS57170893A - Manufacture of substrate for forming single crystal film - Google Patents
Manufacture of substrate for forming single crystal filmInfo
- Publication number
- JPS57170893A JPS57170893A JP5430981A JP5430981A JPS57170893A JP S57170893 A JPS57170893 A JP S57170893A JP 5430981 A JP5430981 A JP 5430981A JP 5430981 A JP5430981 A JP 5430981A JP S57170893 A JPS57170893 A JP S57170893A
- Authority
- JP
- Japan
- Prior art keywords
- layers
- glass
- layer
- base material
- prescribed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To inexpensively manufacture glass substrates each having grooves with superior periodicity and shape in large quantities by slicing a glass base material having a periodically layered structure after drawing and selectively removing prescribed glass layers with a prescribed depth by etching.
CONSTITUTION: A layer 6 of fine SiO2-P2O5 glass particles is deposited on a quartz substrate 5, and on the layer 6 a layer 7 of fine SiO2 glass particles is deposited. by alternately repeating the operations, a glass base material 8 having a prescribed number of layers 6, 7 is formed, and it is heated to convert the layers 6, 7 into transparent glass. This material 8 is put in a quartz glass tube 10, and while evacuating the tube 10, the material 8 is heated to a high temp. and drawn in the plane direction of the layers 6, 7 to obtain a glass base material 11 having a part composed of alternately laminated glass layers with different compositions. The material 11 is sliced in a direction perpendicular to the planes of the layers 6, 7, and the surface of each of the resulting thin plates is polished and etched with an aqueous HF soln. or the like. Since the etching speed of the layers 6 is much higher than that of the layers 7, substrates 12 each having periodic grooves are obtd.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5430981A JPS57170893A (en) | 1981-04-13 | 1981-04-13 | Manufacture of substrate for forming single crystal film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5430981A JPS57170893A (en) | 1981-04-13 | 1981-04-13 | Manufacture of substrate for forming single crystal film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57170893A true JPS57170893A (en) | 1982-10-21 |
Family
ID=12966968
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5430981A Pending JPS57170893A (en) | 1981-04-13 | 1981-04-13 | Manufacture of substrate for forming single crystal film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57170893A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02157199A (en) * | 1988-12-12 | 1990-06-15 | Matsushita Electric Ind Co Ltd | Metal mold for single crystal forming substrate and single crystal substrate using same |
| CN105150397A (en) * | 2015-10-27 | 2015-12-16 | 天津英利新能源有限公司 | Glass capable of reducing edge breakage of silicon block cutting and splicing technology |
-
1981
- 1981-04-13 JP JP5430981A patent/JPS57170893A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02157199A (en) * | 1988-12-12 | 1990-06-15 | Matsushita Electric Ind Co Ltd | Metal mold for single crystal forming substrate and single crystal substrate using same |
| CN105150397A (en) * | 2015-10-27 | 2015-12-16 | 天津英利新能源有限公司 | Glass capable of reducing edge breakage of silicon block cutting and splicing technology |
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