JPS648274A - Glow discharge decomposition device - Google Patents

Glow discharge decomposition device

Info

Publication number
JPS648274A
JPS648274A JP16472687A JP16472687A JPS648274A JP S648274 A JPS648274 A JP S648274A JP 16472687 A JP16472687 A JP 16472687A JP 16472687 A JP16472687 A JP 16472687A JP S648274 A JPS648274 A JP S648274A
Authority
JP
Japan
Prior art keywords
substrate
heat source
glow discharge
film forming
generation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16472687A
Other languages
Japanese (ja)
Other versions
JP2608410B2 (en
Inventor
Hisashi Higuchi
Atsushi Watanabe
Takafumi Ejima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=15798729&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JPS648274(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP62164726A priority Critical patent/JP2608410B2/en
Publication of JPS648274A publication Critical patent/JPS648274A/en
Application granted granted Critical
Publication of JP2608410B2 publication Critical patent/JP2608410B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/02—Charge-receiving layers
    • G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
    • G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

PURPOSE:To prevent the generation of the decomposition product of a film forming gas in a substrate by heating the film forming cylindrical substrate with a heat source provided in the substrate, and setting a heating element in a protecting tube to be used as a partition wall to obtain the heat source. CONSTITUTION:The film forming cylindrical substrate 4 and a glow discharge electrode 2 opposed to the substrate 4 are arranged in an evacuated reaction chamber 1. The substrate 4 is heated to a necessary temp. by the heat source 12 set in the substrate 4, and grounded. Meanwhile, the electrode 2 is connected to a high-frequency power source 5, and glow discharge is generated between the substrates 4. The gas supplied from the injection port 9 of the electrode 2 is decomposed by the discharge, and a film is formed on the substrate 4. In this glow discharge decomposition device, a heating wire 15 is set in the protecting tube 13 of SUS, etc., to be used as the partition wall in the glow discharge region through an insulating member 14 to obtain the cylindrical heat source 12. Consequently, the generation of an abnormal discharge in the heat source 12 is obviated, and the generation of the decoposition product of the film forming gas in the substrate 4 is prevented.
JP62164726A 1987-06-30 1987-06-30 Glow discharge decomposition equipment Expired - Lifetime JP2608410B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62164726A JP2608410B2 (en) 1987-06-30 1987-06-30 Glow discharge decomposition equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62164726A JP2608410B2 (en) 1987-06-30 1987-06-30 Glow discharge decomposition equipment

Publications (2)

Publication Number Publication Date
JPS648274A true JPS648274A (en) 1989-01-12
JP2608410B2 JP2608410B2 (en) 1997-05-07

Family

ID=15798729

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62164726A Expired - Lifetime JP2608410B2 (en) 1987-06-30 1987-06-30 Glow discharge decomposition equipment

Country Status (1)

Country Link
JP (1) JP2608410B2 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58181714A (en) * 1982-04-19 1983-10-24 Sanyo Electric Co Ltd Apparatus for manufacturing photosensitive a-si drum
JPS6013075A (en) * 1983-07-05 1985-01-23 Canon Inc Plasma cvd device
JPS6260858A (en) * 1985-09-09 1987-03-17 Canon Inc Heater for vacuum device
JPS6293375A (en) * 1985-10-18 1987-04-28 Sharp Corp Apparatus for producing photoconductor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58181714A (en) * 1982-04-19 1983-10-24 Sanyo Electric Co Ltd Apparatus for manufacturing photosensitive a-si drum
JPS6013075A (en) * 1983-07-05 1985-01-23 Canon Inc Plasma cvd device
JPS6260858A (en) * 1985-09-09 1987-03-17 Canon Inc Heater for vacuum device
JPS6293375A (en) * 1985-10-18 1987-04-28 Sharp Corp Apparatus for producing photoconductor

Also Published As

Publication number Publication date
JP2608410B2 (en) 1997-05-07

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