JPS6481312A - Vapor phase growth method of compound semiconductor - Google Patents

Vapor phase growth method of compound semiconductor

Info

Publication number
JPS6481312A
JPS6481312A JP24007787A JP24007787A JPS6481312A JP S6481312 A JPS6481312 A JP S6481312A JP 24007787 A JP24007787 A JP 24007787A JP 24007787 A JP24007787 A JP 24007787A JP S6481312 A JPS6481312 A JP S6481312A
Authority
JP
Japan
Prior art keywords
compound semiconductor
epitaxial layer
semiconductor substrate
substrate
gasb
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24007787A
Other languages
English (en)
Inventor
Kikuo Makita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP24007787A priority Critical patent/JPS6481312A/ja
Publication of JPS6481312A publication Critical patent/JPS6481312A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP24007787A 1987-09-24 1987-09-24 Vapor phase growth method of compound semiconductor Pending JPS6481312A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24007787A JPS6481312A (en) 1987-09-24 1987-09-24 Vapor phase growth method of compound semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24007787A JPS6481312A (en) 1987-09-24 1987-09-24 Vapor phase growth method of compound semiconductor

Publications (1)

Publication Number Publication Date
JPS6481312A true JPS6481312A (en) 1989-03-27

Family

ID=17054150

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24007787A Pending JPS6481312A (en) 1987-09-24 1987-09-24 Vapor phase growth method of compound semiconductor

Country Status (1)

Country Link
JP (1) JPS6481312A (ja)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4919766A (ja) * 1972-06-14 1974-02-21
JPS6163598A (ja) * 1984-09-05 1986-04-01 Matsushita Electric Ind Co Ltd 気相成長方法
JPS6272131A (ja) * 1985-09-25 1987-04-02 Sony Corp 気相反応方法及びその方法の実施に直接使用する気相反応装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4919766A (ja) * 1972-06-14 1974-02-21
JPS6163598A (ja) * 1984-09-05 1986-04-01 Matsushita Electric Ind Co Ltd 気相成長方法
JPS6272131A (ja) * 1985-09-25 1987-04-02 Sony Corp 気相反応方法及びその方法の実施に直接使用する気相反応装置

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