JPS6480025A - Apparatus for manufacturing semiconductor - Google Patents
Apparatus for manufacturing semiconductorInfo
- Publication number
- JPS6480025A JPS6480025A JP23480987A JP23480987A JPS6480025A JP S6480025 A JPS6480025 A JP S6480025A JP 23480987 A JP23480987 A JP 23480987A JP 23480987 A JP23480987 A JP 23480987A JP S6480025 A JPS6480025 A JP S6480025A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- sputter
- drum
- film
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 3
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000002184 metal Substances 0.000 abstract 3
- 238000002844 melting Methods 0.000 abstract 2
- 229910021332 silicide Inorganic materials 0.000 abstract 2
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 abstract 2
- 230000002269 spontaneous effect Effects 0.000 abstract 2
- 229910000838 Al alloy Inorganic materials 0.000 abstract 1
- 229910018125 Al-Si Inorganic materials 0.000 abstract 1
- 229910018520 Al—Si Inorganic materials 0.000 abstract 1
- 230000004888 barrier function Effects 0.000 abstract 1
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 238000009792 diffusion process Methods 0.000 abstract 1
- 230000002093 peripheral effect Effects 0.000 abstract 1
Landscapes
- Electrodes Of Semiconductors (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23480987A JPS6480025A (en) | 1987-09-21 | 1987-09-21 | Apparatus for manufacturing semiconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23480987A JPS6480025A (en) | 1987-09-21 | 1987-09-21 | Apparatus for manufacturing semiconductor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6480025A true JPS6480025A (en) | 1989-03-24 |
Family
ID=16976732
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23480987A Pending JPS6480025A (en) | 1987-09-21 | 1987-09-21 | Apparatus for manufacturing semiconductor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6480025A (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014502592A (ja) * | 2010-12-27 | 2014-02-03 | エヌウイクスセーイエス | Ｉ−ｉｉｉ−ｖｉ２材料層とモリブデン基板間の改良された界面 |
-
1987
- 1987-09-21 JP JP23480987A patent/JPS6480025A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014502592A (ja) * | 2010-12-27 | 2014-02-03 | エヌウイクスセーイエス | Ｉ−ｉｉｉ−ｖｉ２材料層とモリブデン基板間の改良された界面 |
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