JPS6479938A - Production of perpendicular magnetic recording medium - Google Patents

Abstract

PURPOSE:To form a vertical magnetizing film consisting essentially of a ferromagnetic member and a ferromagnetic oxide and to obtain a floppy disk excellent in the uniformity of an envelope by making the vapor flow of the ferromagnetic member substantially vertically incident on a substrate and making a gas flow including oxygen incident substantially in parallel to the vapor flow. CONSTITUTION:The long film shape substrate 1 is supported to a drum 4 disposed in a vacuum vessel 5 and the substrate 1 is supported and moved by substrate winding and taking up shafts 2, 3. An evaporation source 9 is disposed at a lower side vertically of the center of the shaft of this drum 4 and three nozzles 8 for supplying a mixed gas including the oxygen are disposed at a prescribed interval in a direction of the axis of the drum in the vicinity of the downstream side of the travel direction of the substrate of this evaporation source 9 so as to make the gas flow including the oxygen incident substantially in parallel to the vapor flow by the ends of the respective nozzles 8. The incident angle of ferromagnetic vapor to the substrate 1 from the evaporation source 9 is regulated by a shielding plate 10A to make the vapor flow of the ferromagnetic member vertically incident and the vapor flow including the oxygen incident substantially in parallel to the vapor flow.