JPS6442351A - Laser deposition source for superconducting material - Google Patents
Laser deposition source for superconducting materialInfo
- Publication number
- JPS6442351A JPS6442351A JP62198283A JP19828387A JPS6442351A JP S6442351 A JPS6442351 A JP S6442351A JP 62198283 A JP62198283 A JP 62198283A JP 19828387 A JP19828387 A JP 19828387A JP S6442351 A JPS6442351 A JP S6442351A
- Authority
- JP
- Japan
- Prior art keywords
- deposition source
- gas
- base material
- pressure reducing
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008021 deposition Effects 0.000 title abstract 5
- 239000000463 material Substances 0.000 title abstract 5
- 239000007789 gas Substances 0.000 abstract 6
- 229910002480 Cu-O Inorganic materials 0.000 abstract 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 abstract 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 239000000470 constituent Substances 0.000 abstract 1
- 229910001882 dioxygen Inorganic materials 0.000 abstract 1
- 239000010419 fine particle Substances 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
- Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment
Landscapes
- Superconductors And Manufacturing Methods Therefor (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Abstract
PURPOSE:To stably and finely form a superconducting film of a given compsn. onto the surface of a base material by using a complex oxide substance of a specified constitution ratio of each element in the Ba-V-Cu-O system. CONSTITUTION:A deposition source 2 and a base material 3 are arranged in a pressure reducing chamber 1, and a gas in the pressure reducing chamber 1 is drawn through a gas exhaust post 7 to exhaust the gas outside of the chamber. The deposition source 2 consists of the complex oxide sintered body having the constituents shown by the formula. An oxygen gas is continuously blown, through a gas supply port 8, into the pressure reducing chamber 1, and a gas exhaust is continued through the gas exhaust port 7. Thereby, the inside of the pressure reducing chamber 1 is kept in the oxygen atmosphere under a given reduced pressure. Then, a laser beam is irradiated toward the deposition source 2 in the pressure reduced chamber 1. In this irradiation, the power density is controlled within proper values by adjusting a converging lens 6. By performing like this, fine particles evaporate from the surface of the deposition source 2 deposit on the surface of the base material 3 to form a film 9. Thus, the complex oxide superconducting film 9 in the Ba-Y-Cu-O system is formed on the surface of base material 3.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62198283A JPS6442351A (en) | 1987-08-10 | 1987-08-10 | Laser deposition source for superconducting material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62198283A JPS6442351A (en) | 1987-08-10 | 1987-08-10 | Laser deposition source for superconducting material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6442351A true JPS6442351A (en) | 1989-02-14 |
Family
ID=16388549
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62198283A Pending JPS6442351A (en) | 1987-08-10 | 1987-08-10 | Laser deposition source for superconducting material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6442351A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5085166A (en) * | 1989-05-24 | 1992-02-04 | Mitsubishi Denki Kabushiki Kaisha | Laser vapor deposition apparatus |
-
1987
- 1987-08-10 JP JP62198283A patent/JPS6442351A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5085166A (en) * | 1989-05-24 | 1992-02-04 | Mitsubishi Denki Kabushiki Kaisha | Laser vapor deposition apparatus |
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