JPS647436A - Manufacture of superconductive thin film - Google Patents

Manufacture of superconductive thin film

Info

Publication number
JPS647436A
JPS647436A JP62164931A JP16493187A JPS647436A JP S647436 A JPS647436 A JP S647436A JP 62164931 A JP62164931 A JP 62164931A JP 16493187 A JP16493187 A JP 16493187A JP S647436 A JPS647436 A JP S647436A
Authority
JP
Japan
Prior art keywords
oxide
group iiia
thin film
base
manufacture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62164931A
Other languages
Japanese (ja)
Inventor
Tomoji Kawai
Daisuke Inoue
Yasunori Ando
Shuichi Nogawa
Shinichi Takano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP62164931A priority Critical patent/JPS647436A/en
Publication of JPS647436A publication Critical patent/JPS647436A/en
Pending legal-status Critical Current

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

Landscapes

  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)

Abstract

PURPOSE:To provide a superconductive thin film consisting of laminated of group IIIa-Ba oxide-Cu oxide with high reproductivity by placing group IIIa-Ba and Cu on a base one over another, and irradiating oxygen neutral beam. CONSTITUTION:Three mutually independent evaporation cells 1-3, a base holder 4, and an oxygen ion source 8 are installed in a vacuum chamber. Group IIIa metal, Ba and/or its oxide, and Cu and/or its oxide are placed on a base 9 one over another, and oxygen neutral beam is irradiated to the deposit of Ba, Cu, and/or their oxides to accomplish a film of laminate layers 10-12 of group IIIa metal, Ba oxide-Cu oxide. This allows easy preparation of an oxide ceramic superconductive film with high reproductivity and easily.
JP62164931A 1987-06-30 1987-06-30 Manufacture of superconductive thin film Pending JPS647436A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62164931A JPS647436A (en) 1987-06-30 1987-06-30 Manufacture of superconductive thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62164931A JPS647436A (en) 1987-06-30 1987-06-30 Manufacture of superconductive thin film

Publications (1)

Publication Number Publication Date
JPS647436A true JPS647436A (en) 1989-01-11

Family

ID=15802560

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62164931A Pending JPS647436A (en) 1987-06-30 1987-06-30 Manufacture of superconductive thin film

Country Status (1)

Country Link
JP (1) JPS647436A (en)

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