JPS647436A - Manufacture of superconductive thin film - Google Patents
Manufacture of superconductive thin filmInfo
- Publication number
- JPS647436A JPS647436A JP62164931A JP16493187A JPS647436A JP S647436 A JPS647436 A JP S647436A JP 62164931 A JP62164931 A JP 62164931A JP 16493187 A JP16493187 A JP 16493187A JP S647436 A JPS647436 A JP S647436A
- Authority
- JP
- Japan
- Prior art keywords
- oxide
- group iiia
- thin film
- base
- manufacture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
- Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment
Landscapes
- Superconductors And Manufacturing Methods Therefor (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Abstract
PURPOSE:To provide a superconductive thin film consisting of laminated of group IIIa-Ba oxide-Cu oxide with high reproductivity by placing group IIIa-Ba and Cu on a base one over another, and irradiating oxygen neutral beam. CONSTITUTION:Three mutually independent evaporation cells 1-3, a base holder 4, and an oxygen ion source 8 are installed in a vacuum chamber. Group IIIa metal, Ba and/or its oxide, and Cu and/or its oxide are placed on a base 9 one over another, and oxygen neutral beam is irradiated to the deposit of Ba, Cu, and/or their oxides to accomplish a film of laminate layers 10-12 of group IIIa metal, Ba oxide-Cu oxide. This allows easy preparation of an oxide ceramic superconductive film with high reproductivity and easily.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62164931A JPS647436A (en) | 1987-06-30 | 1987-06-30 | Manufacture of superconductive thin film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62164931A JPS647436A (en) | 1987-06-30 | 1987-06-30 | Manufacture of superconductive thin film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS647436A true JPS647436A (en) | 1989-01-11 |
Family
ID=15802560
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62164931A Pending JPS647436A (en) | 1987-06-30 | 1987-06-30 | Manufacture of superconductive thin film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS647436A (en) |
-
1987
- 1987-06-30 JP JP62164931A patent/JPS647436A/en active Pending
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