JPS56164019A - Production of magnetic thin film of oxide - Google Patents
Production of magnetic thin film of oxideInfo
- Publication number
- JPS56164019A JPS56164019A JP6938980A JP6938980A JPS56164019A JP S56164019 A JPS56164019 A JP S56164019A JP 6938980 A JP6938980 A JP 6938980A JP 6938980 A JP6938980 A JP 6938980A JP S56164019 A JPS56164019 A JP S56164019A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- base plate
- ferrocene
- gas
- oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: A ferrocene gas is blown together with an oxidative carrier gas to the base plate to form a thin film on the plate, then the reduction and oxidation of the thin film are effected to form the objective γ-hematite film capable of high-density recording.
CONSTITUTION: Fe(C6H5)2 (ferrocene) is sublimed by heating and the resulting gas is blown together with a carrier gas of oxygen through a nozzle to the base plate kept to about 350W600°C. The ferrocene, coming into contact with the base plate, is pyrolyzed to form a thin film of iron oxide on the base plate. The thin film is heat treated in a hydrogen-gas atmosphere, then in the air to form γ-hematite (γ-Fe2O3).
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6938980A JPS56164019A (en) | 1980-05-23 | 1980-05-23 | Production of magnetic thin film of oxide |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6938980A JPS56164019A (en) | 1980-05-23 | 1980-05-23 | Production of magnetic thin film of oxide |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56164019A true JPS56164019A (en) | 1981-12-16 |
Family
ID=13401187
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6938980A Pending JPS56164019A (en) | 1980-05-23 | 1980-05-23 | Production of magnetic thin film of oxide |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56164019A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4724106A (en) * | 1982-03-29 | 1988-02-09 | Futaba Denshi Kogyo Kabushiki Kaisha | Process for forming organic film |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS509799A (en) * | 1973-06-01 | 1975-01-31 | ||
JPS5265898A (en) * | 1975-11-26 | 1977-05-31 | Nippon Telegr & Teleph Corp <Ntt> | Preparing oxidized magnetic thin film |
-
1980
- 1980-05-23 JP JP6938980A patent/JPS56164019A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS509799A (en) * | 1973-06-01 | 1975-01-31 | ||
JPS5265898A (en) * | 1975-11-26 | 1977-05-31 | Nippon Telegr & Teleph Corp <Ntt> | Preparing oxidized magnetic thin film |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4724106A (en) * | 1982-03-29 | 1988-02-09 | Futaba Denshi Kogyo Kabushiki Kaisha | Process for forming organic film |
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