JPS56164019A - Production of magnetic thin film of oxide - Google Patents

Production of magnetic thin film of oxide

Info

Publication number
JPS56164019A
JPS56164019A JP6938980A JP6938980A JPS56164019A JP S56164019 A JPS56164019 A JP S56164019A JP 6938980 A JP6938980 A JP 6938980A JP 6938980 A JP6938980 A JP 6938980A JP S56164019 A JPS56164019 A JP S56164019A
Authority
JP
Japan
Prior art keywords
thin film
base plate
ferrocene
gas
oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6938980A
Other languages
Japanese (ja)
Inventor
Masuzo Hattori
Tomu Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP6938980A priority Critical patent/JPS56164019A/en
Publication of JPS56164019A publication Critical patent/JPS56164019A/en
Pending legal-status Critical Current

Links

Landscapes

  • Compounds Of Iron (AREA)
  • Thin Magnetic Films (AREA)

Abstract

PURPOSE: A ferrocene gas is blown together with an oxidative carrier gas to the base plate to form a thin film on the plate, then the reduction and oxidation of the thin film are effected to form the objective γ-hematite film capable of high-density recording.
CONSTITUTION: Fe(C6H5)2 (ferrocene) is sublimed by heating and the resulting gas is blown together with a carrier gas of oxygen through a nozzle to the base plate kept to about 350W600°C. The ferrocene, coming into contact with the base plate, is pyrolyzed to form a thin film of iron oxide on the base plate. The thin film is heat treated in a hydrogen-gas atmosphere, then in the air to form γ-hematite (γ-Fe2O3).
COPYRIGHT: (C)1981,JPO&Japio
JP6938980A 1980-05-23 1980-05-23 Production of magnetic thin film of oxide Pending JPS56164019A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6938980A JPS56164019A (en) 1980-05-23 1980-05-23 Production of magnetic thin film of oxide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6938980A JPS56164019A (en) 1980-05-23 1980-05-23 Production of magnetic thin film of oxide

Publications (1)

Publication Number Publication Date
JPS56164019A true JPS56164019A (en) 1981-12-16

Family

ID=13401187

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6938980A Pending JPS56164019A (en) 1980-05-23 1980-05-23 Production of magnetic thin film of oxide

Country Status (1)

Country Link
JP (1) JPS56164019A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4724106A (en) * 1982-03-29 1988-02-09 Futaba Denshi Kogyo Kabushiki Kaisha Process for forming organic film

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS509799A (en) * 1973-06-01 1975-01-31
JPS5265898A (en) * 1975-11-26 1977-05-31 Nippon Telegr & Teleph Corp <Ntt> Preparing oxidized magnetic thin film

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS509799A (en) * 1973-06-01 1975-01-31
JPS5265898A (en) * 1975-11-26 1977-05-31 Nippon Telegr & Teleph Corp <Ntt> Preparing oxidized magnetic thin film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4724106A (en) * 1982-03-29 1988-02-09 Futaba Denshi Kogyo Kabushiki Kaisha Process for forming organic film

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