JPS56164020A - Production of magnetic thin film of oxide - Google Patents
Production of magnetic thin film of oxideInfo
- Publication number
- JPS56164020A JPS56164020A JP6939080A JP6939080A JPS56164020A JP S56164020 A JPS56164020 A JP S56164020A JP 6939080 A JP6939080 A JP 6939080A JP 6939080 A JP6939080 A JP 6939080A JP S56164020 A JPS56164020 A JP S56164020A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- base plate
- ferrocene
- vessel
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Compounds Of Iron (AREA)
- Chemical Vapour Deposition (AREA)
- Thin Magnetic Films (AREA)
Abstract
PURPOSE: A ferrocene gas is blown together with an oxidative carrier gas to the base plate which is placed in plasma to form a thin film, which is reduced, then oxidized to give the objective γ-hematite film capable of high-density recording.
CONSTITUTION: A base plate of heat-resistant glass is placed in a vessel and the inside of the vessel is vacuumed to about 10-1 Torr. In the meantime, ferrocene is sublimed by heating and sent together with an oxygen gas as a carrier through the pipe that is kept to a temperature at which the sublimed ferrocene does not solidify, then introduced into the vessel including plasma. The base plate is kept to about 150W600°C. The resultant iron oxide film on the base plate is heat treated in a hydrogen-gas atmopshere, then in an oxygen-gas atmosphere to produce the objective γ-hematite film.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6939080A JPS56164020A (en) | 1980-05-23 | 1980-05-23 | Production of magnetic thin film of oxide |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6939080A JPS56164020A (en) | 1980-05-23 | 1980-05-23 | Production of magnetic thin film of oxide |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56164020A true JPS56164020A (en) | 1981-12-16 |
JPS644336B2 JPS644336B2 (en) | 1989-01-25 |
Family
ID=13401216
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6939080A Granted JPS56164020A (en) | 1980-05-23 | 1980-05-23 | Production of magnetic thin film of oxide |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56164020A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60116118A (en) * | 1983-11-29 | 1985-06-22 | Tdk Corp | Magnetic thin film |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS509799A (en) * | 1973-06-01 | 1975-01-31 | ||
JPS5265898A (en) * | 1975-11-26 | 1977-05-31 | Nippon Telegr & Teleph Corp <Ntt> | Preparing oxidized magnetic thin film |
-
1980
- 1980-05-23 JP JP6939080A patent/JPS56164020A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS509799A (en) * | 1973-06-01 | 1975-01-31 | ||
JPS5265898A (en) * | 1975-11-26 | 1977-05-31 | Nippon Telegr & Teleph Corp <Ntt> | Preparing oxidized magnetic thin film |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60116118A (en) * | 1983-11-29 | 1985-06-22 | Tdk Corp | Magnetic thin film |
Also Published As
Publication number | Publication date |
---|---|
JPS644336B2 (en) | 1989-01-25 |
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