JPS56164020A - Production of magnetic thin film of oxide - Google Patents

Production of magnetic thin film of oxide

Info

Publication number
JPS56164020A
JPS56164020A JP6939080A JP6939080A JPS56164020A JP S56164020 A JPS56164020 A JP S56164020A JP 6939080 A JP6939080 A JP 6939080A JP 6939080 A JP6939080 A JP 6939080A JP S56164020 A JPS56164020 A JP S56164020A
Authority
JP
Japan
Prior art keywords
gas
base plate
ferrocene
vessel
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6939080A
Other languages
Japanese (ja)
Other versions
JPS644336B2 (en
Inventor
Masuzo Hattori
Tomu Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP6939080A priority Critical patent/JPS56164020A/en
Publication of JPS56164020A publication Critical patent/JPS56164020A/en
Publication of JPS644336B2 publication Critical patent/JPS644336B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compounds Of Iron (AREA)
  • Chemical Vapour Deposition (AREA)
  • Thin Magnetic Films (AREA)

Abstract

PURPOSE: A ferrocene gas is blown together with an oxidative carrier gas to the base plate which is placed in plasma to form a thin film, which is reduced, then oxidized to give the objective γ-hematite film capable of high-density recording.
CONSTITUTION: A base plate of heat-resistant glass is placed in a vessel and the inside of the vessel is vacuumed to about 10-1 Torr. In the meantime, ferrocene is sublimed by heating and sent together with an oxygen gas as a carrier through the pipe that is kept to a temperature at which the sublimed ferrocene does not solidify, then introduced into the vessel including plasma. The base plate is kept to about 150W600°C. The resultant iron oxide film on the base plate is heat treated in a hydrogen-gas atmopshere, then in an oxygen-gas atmosphere to produce the objective γ-hematite film.
COPYRIGHT: (C)1981,JPO&Japio
JP6939080A 1980-05-23 1980-05-23 Production of magnetic thin film of oxide Granted JPS56164020A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6939080A JPS56164020A (en) 1980-05-23 1980-05-23 Production of magnetic thin film of oxide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6939080A JPS56164020A (en) 1980-05-23 1980-05-23 Production of magnetic thin film of oxide

Publications (2)

Publication Number Publication Date
JPS56164020A true JPS56164020A (en) 1981-12-16
JPS644336B2 JPS644336B2 (en) 1989-01-25

Family

ID=13401216

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6939080A Granted JPS56164020A (en) 1980-05-23 1980-05-23 Production of magnetic thin film of oxide

Country Status (1)

Country Link
JP (1) JPS56164020A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60116118A (en) * 1983-11-29 1985-06-22 Tdk Corp Magnetic thin film

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS509799A (en) * 1973-06-01 1975-01-31
JPS5265898A (en) * 1975-11-26 1977-05-31 Nippon Telegr & Teleph Corp <Ntt> Preparing oxidized magnetic thin film

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS509799A (en) * 1973-06-01 1975-01-31
JPS5265898A (en) * 1975-11-26 1977-05-31 Nippon Telegr & Teleph Corp <Ntt> Preparing oxidized magnetic thin film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60116118A (en) * 1983-11-29 1985-06-22 Tdk Corp Magnetic thin film

Also Published As

Publication number Publication date
JPS644336B2 (en) 1989-01-25

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