JPS6479097A - Compound semiconductor vapor growth device - Google Patents

Compound semiconductor vapor growth device

Info

Publication number
JPS6479097A
JPS6479097A JP23675587A JP23675587A JPS6479097A JP S6479097 A JPS6479097 A JP S6479097A JP 23675587 A JP23675587 A JP 23675587A JP 23675587 A JP23675587 A JP 23675587A JP S6479097 A JPS6479097 A JP S6479097A
Authority
JP
Japan
Prior art keywords
susceptor
growth chamber
hemispherical body
gaseous raw
space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP23675587A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0527598B2 (enrdf_load_stackoverflow
Inventor
Shigenori Takagishi
Hideki Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Sumitomo Electric Industries Ltd
Original Assignee
Nissin Electric Co Ltd
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd, Sumitomo Electric Industries Ltd filed Critical Nissin Electric Co Ltd
Priority to JP23675587A priority Critical patent/JPS6479097A/ja
Publication of JPS6479097A publication Critical patent/JPS6479097A/ja
Publication of JPH0527598B2 publication Critical patent/JPH0527598B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP23675587A 1987-09-21 1987-09-21 Compound semiconductor vapor growth device Granted JPS6479097A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23675587A JPS6479097A (en) 1987-09-21 1987-09-21 Compound semiconductor vapor growth device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23675587A JPS6479097A (en) 1987-09-21 1987-09-21 Compound semiconductor vapor growth device

Publications (2)

Publication Number Publication Date
JPS6479097A true JPS6479097A (en) 1989-03-24
JPH0527598B2 JPH0527598B2 (enrdf_load_stackoverflow) 1993-04-21

Family

ID=17005310

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23675587A Granted JPS6479097A (en) 1987-09-21 1987-09-21 Compound semiconductor vapor growth device

Country Status (1)

Country Link
JP (1) JPS6479097A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002261030A (ja) * 2001-03-02 2002-09-13 Sumitomo Chem Co Ltd ３−５族化合物半導体エピタキシャル成長方法及び装置
JP2004507898A (ja) * 2000-09-01 2004-03-11 アイクストロン、アーゲー 特に結晶質の基板上に、特に結晶質の層を沈積する装置および方法
US7968362B2 (en) 2001-03-27 2011-06-28 Ricoh Company, Ltd. Semiconductor light-emitting device, surface-emission laser diode, and production apparatus thereof, production method, optical module and optical telecommunication system
US11389962B2 (en) 2010-05-24 2022-07-19 Teladoc Health, Inc. Telepresence robot system that can be accessed by a cellular phone
US11453126B2 (en) 2012-05-22 2022-09-27 Teladoc Health, Inc. Clinical workflows utilizing autonomous and semi-autonomous telemedicine devices

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004507898A (ja) * 2000-09-01 2004-03-11 アイクストロン、アーゲー 特に結晶質の基板上に、特に結晶質の層を沈積する装置および方法
JP2002261030A (ja) * 2001-03-02 2002-09-13 Sumitomo Chem Co Ltd ３−５族化合物半導体エピタキシャル成長方法及び装置
US7968362B2 (en) 2001-03-27 2011-06-28 Ricoh Company, Ltd. Semiconductor light-emitting device, surface-emission laser diode, and production apparatus thereof, production method, optical module and optical telecommunication system
US8293555B2 (en) 2001-03-27 2012-10-23 Ricoh Company, Ltd. Semiconductor light-emitting device, surface-emission laser diode, and production apparatus thereof, production method, optical module and optical telecommunication system
US11389962B2 (en) 2010-05-24 2022-07-19 Teladoc Health, Inc. Telepresence robot system that can be accessed by a cellular phone
US11453126B2 (en) 2012-05-22 2022-09-27 Teladoc Health, Inc. Clinical workflows utilizing autonomous and semi-autonomous telemedicine devices

Also Published As

Publication number Publication date
JPH0527598B2 (enrdf_load_stackoverflow) 1993-04-21

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