JPS6477944A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS6477944A
JPS6477944A JP23586287A JP23586287A JPS6477944A JP S6477944 A JPS6477944 A JP S6477944A JP 23586287 A JP23586287 A JP 23586287A JP 23586287 A JP23586287 A JP 23586287A JP S6477944 A JPS6477944 A JP S6477944A
Authority
JP
Japan
Prior art keywords
substrate
onto
sio2
film
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23586287A
Other languages
English (en)
Inventor
Fumitake Mieno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP23586287A priority Critical patent/JPS6477944A/ja
Publication of JPS6477944A publication Critical patent/JPS6477944A/ja
Pending legal-status Critical Current

Links

JP23586287A 1987-09-18 1987-09-18 Manufacture of semiconductor device Pending JPS6477944A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23586287A JPS6477944A (en) 1987-09-18 1987-09-18 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23586287A JPS6477944A (en) 1987-09-18 1987-09-18 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS6477944A true JPS6477944A (en) 1989-03-23

Family

ID=16992351

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23586287A Pending JPS6477944A (en) 1987-09-18 1987-09-18 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS6477944A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001068451A (ja) * 1999-08-27 2001-03-16 Tokai Univ エッチング方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001068451A (ja) * 1999-08-27 2001-03-16 Tokai Univ エッチング方法

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