JPS6477924A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS6477924A
JPS6477924A JP23551387A JP23551387A JPS6477924A JP S6477924 A JPS6477924 A JP S6477924A JP 23551387 A JP23551387 A JP 23551387A JP 23551387 A JP23551387 A JP 23551387A JP S6477924 A JPS6477924 A JP S6477924A
Authority
JP
Japan
Prior art keywords
silicon
substrate
layer
film
whole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23551387A
Other languages
English (en)
Inventor
Fumitake Mieno
Atsuhiro Tsukune
Masahide Nishimura
Tsutomu Nakazawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP23551387A priority Critical patent/JPS6477924A/ja
Publication of JPS6477924A publication Critical patent/JPS6477924A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Recrystallisation Techniques (AREA)
JP23551387A 1987-09-18 1987-09-18 Manufacture of semiconductor device Pending JPS6477924A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23551387A JPS6477924A (en) 1987-09-18 1987-09-18 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23551387A JPS6477924A (en) 1987-09-18 1987-09-18 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS6477924A true JPS6477924A (en) 1989-03-23

Family

ID=16987101

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23551387A Pending JPS6477924A (en) 1987-09-18 1987-09-18 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS6477924A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015041707A (ja) * 2013-08-22 2015-03-02 東京エレクトロン株式会社 凹部を充填する方法及び処理装置
JP2016092051A (ja) * 2014-10-30 2016-05-23 東京エレクトロン株式会社 凹部を充填する方法及び処理装置
JP2016092029A (ja) * 2014-10-29 2016-05-23 東京エレクトロン株式会社 凹部を充填する方法及び処理装置
JP2016150879A (ja) * 2015-02-18 2016-08-22 東京エレクトロン株式会社 凹部を充填する方法及び処理装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015041707A (ja) * 2013-08-22 2015-03-02 東京エレクトロン株式会社 凹部を充填する方法及び処理装置
JP2016092029A (ja) * 2014-10-29 2016-05-23 東京エレクトロン株式会社 凹部を充填する方法及び処理装置
JP2016092051A (ja) * 2014-10-30 2016-05-23 東京エレクトロン株式会社 凹部を充填する方法及び処理装置
JP2016150879A (ja) * 2015-02-18 2016-08-22 東京エレクトロン株式会社 凹部を充填する方法及び処理装置

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