JPS647495B2 - - Google Patents

Info

Publication number
JPS647495B2
JPS647495B2 JP56097731A JP9773181A JPS647495B2 JP S647495 B2 JPS647495 B2 JP S647495B2 JP 56097731 A JP56097731 A JP 56097731A JP 9773181 A JP9773181 A JP 9773181A JP S647495 B2 JPS647495 B2 JP S647495B2
Authority
JP
Japan
Prior art keywords
gas
silicon nitride
gas mixture
nitride film
reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56097731A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57211736A (en
Inventor
Seiichi Iwamatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP56097731A priority Critical patent/JPS57211736A/ja
Publication of JPS57211736A publication Critical patent/JPS57211736A/ja
Publication of JPS647495B2 publication Critical patent/JPS647495B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P14/69433—

Landscapes

  • Formation Of Insulating Films (AREA)
JP56097731A 1981-06-24 1981-06-24 Manufacture of silicon nitride film Granted JPS57211736A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56097731A JPS57211736A (en) 1981-06-24 1981-06-24 Manufacture of silicon nitride film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56097731A JPS57211736A (en) 1981-06-24 1981-06-24 Manufacture of silicon nitride film

Publications (2)

Publication Number Publication Date
JPS57211736A JPS57211736A (en) 1982-12-25
JPS647495B2 true JPS647495B2 (OSRAM) 1989-02-09

Family

ID=14200031

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56097731A Granted JPS57211736A (en) 1981-06-24 1981-06-24 Manufacture of silicon nitride film

Country Status (1)

Country Link
JP (1) JPS57211736A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59215732A (ja) * 1983-05-24 1984-12-05 Semiconductor Energy Lab Co Ltd 窒化珪素被膜作製方法

Also Published As

Publication number Publication date
JPS57211736A (en) 1982-12-25

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