JPS6473740A - Jig for attaching pellet - Google Patents

Jig for attaching pellet

Info

Publication number
JPS6473740A
JPS6473740A JP22954787A JP22954787A JPS6473740A JP S6473740 A JPS6473740 A JP S6473740A JP 22954787 A JP22954787 A JP 22954787A JP 22954787 A JP22954787 A JP 22954787A JP S6473740 A JPS6473740 A JP S6473740A
Authority
JP
Japan
Prior art keywords
sheet
ring
pellets
holder
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22954787A
Other languages
Japanese (ja)
Inventor
Takao Naito
Hajime Inoue
Kiyokazu Miyasaka
Yasuhiko Ikeda
Tsutomu Mimata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Renesas Eastern Japan Semiconductor Inc
Original Assignee
Hitachi Tokyo Electronics Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Tokyo Electronics Co Ltd, Hitachi Ltd filed Critical Hitachi Tokyo Electronics Co Ltd
Priority to JP22954787A priority Critical patent/JPS6473740A/en
Publication of JPS6473740A publication Critical patent/JPS6473740A/en
Pending legal-status Critical Current

Links

Landscapes

  • Die Bonding (AREA)
  • Dicing (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PURPOSE:To lessen the amount of positional deviation of semiconductor pellets at the time of pickup of the semiconductor pellets by a method wherein an extensible sheet and a strong adhesive sheet are laminated to each other. CONSTITUTION:A semiconductor wafer is adhered on an extensible sheet 1 and after the wafer is formed into semiconductor pellets by dicing and cracking, this sheet 1 is extended to separate the pellets 2 from one another. After this, the sheet 1 is held on a cylindrical expansion ring 4 using a rubber 3, while a flat ring 5 with a strong adhesive sheet 6 adhered thereon is prepared and this ring 5 is fixed on a ring holder 7. Then, the ring 4 is placed and fixed on this holder 7 in such a way that the ring 4 is made to cover on this holder 7. Then, these sheets 1 and 6 are closely contacted to each other and are laminated to each other. Thereby, even in case the pellets 2 on the sheet 1 are picked up when a pellet attaching is performed, a change in the tension of the sheet 1 is not almost generated as there exists the sheet 6 and the positional deviation of the pellets 2 can be lessened.
JP22954787A 1987-09-16 1987-09-16 Jig for attaching pellet Pending JPS6473740A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22954787A JPS6473740A (en) 1987-09-16 1987-09-16 Jig for attaching pellet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22954787A JPS6473740A (en) 1987-09-16 1987-09-16 Jig for attaching pellet

Publications (1)

Publication Number Publication Date
JPS6473740A true JPS6473740A (en) 1989-03-20

Family

ID=16893876

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22954787A Pending JPS6473740A (en) 1987-09-16 1987-09-16 Jig for attaching pellet

Country Status (1)

Country Link
JP (1) JPS6473740A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100479624B1 (en) * 1997-06-02 2005-08-31 엔테그리스, 아이엔씨. Sticky Film Frame for Electronic Device Storage

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100479624B1 (en) * 1997-06-02 2005-08-31 엔테그리스, 아이엔씨. Sticky Film Frame for Electronic Device Storage

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