JPS6473740A - Jig for attaching pellet - Google Patents
Jig for attaching pelletInfo
- Publication number
- JPS6473740A JPS6473740A JP22954787A JP22954787A JPS6473740A JP S6473740 A JPS6473740 A JP S6473740A JP 22954787 A JP22954787 A JP 22954787A JP 22954787 A JP22954787 A JP 22954787A JP S6473740 A JPS6473740 A JP S6473740A
- Authority
- JP
- Japan
- Prior art keywords
- sheet
- ring
- pellets
- holder
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Die Bonding (AREA)
- Dicing (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
PURPOSE:To lessen the amount of positional deviation of semiconductor pellets at the time of pickup of the semiconductor pellets by a method wherein an extensible sheet and a strong adhesive sheet are laminated to each other. CONSTITUTION:A semiconductor wafer is adhered on an extensible sheet 1 and after the wafer is formed into semiconductor pellets by dicing and cracking, this sheet 1 is extended to separate the pellets 2 from one another. After this, the sheet 1 is held on a cylindrical expansion ring 4 using a rubber 3, while a flat ring 5 with a strong adhesive sheet 6 adhered thereon is prepared and this ring 5 is fixed on a ring holder 7. Then, the ring 4 is placed and fixed on this holder 7 in such a way that the ring 4 is made to cover on this holder 7. Then, these sheets 1 and 6 are closely contacted to each other and are laminated to each other. Thereby, even in case the pellets 2 on the sheet 1 are picked up when a pellet attaching is performed, a change in the tension of the sheet 1 is not almost generated as there exists the sheet 6 and the positional deviation of the pellets 2 can be lessened.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22954787A JPS6473740A (en) | 1987-09-16 | 1987-09-16 | Jig for attaching pellet |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22954787A JPS6473740A (en) | 1987-09-16 | 1987-09-16 | Jig for attaching pellet |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6473740A true JPS6473740A (en) | 1989-03-20 |
Family
ID=16893876
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP22954787A Pending JPS6473740A (en) | 1987-09-16 | 1987-09-16 | Jig for attaching pellet |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6473740A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100479624B1 (en) * | 1997-06-02 | 2005-08-31 | 엔테그리스, 아이엔씨. | Sticky Film Frame for Electronic Device Storage |
-
1987
- 1987-09-16 JP JP22954787A patent/JPS6473740A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100479624B1 (en) * | 1997-06-02 | 2005-08-31 | 엔테그리스, 아이엔씨. | Sticky Film Frame for Electronic Device Storage |
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