JPS6473519A - Production of thin film magnetic head - Google Patents

Production of thin film magnetic head

Info

Publication number
JPS6473519A
JPS6473519A JP22984187A JP22984187A JPS6473519A JP S6473519 A JPS6473519 A JP S6473519A JP 22984187 A JP22984187 A JP 22984187A JP 22984187 A JP22984187 A JP 22984187A JP S6473519 A JPS6473519 A JP S6473519A
Authority
JP
Japan
Prior art keywords
resist
properties
changed
thin film
plasma treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22984187A
Other languages
Japanese (ja)
Other versions
JPH0770025B2 (en
Inventor
Shoichi Tsutsumi
Yoshio Takahashi
Kazuo Nakamura
Ikuo Ozasa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP62229841A priority Critical patent/JPH0770025B2/en
Publication of JPS6473519A publication Critical patent/JPS6473519A/en
Publication of JPH0770025B2 publication Critical patent/JPH0770025B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE:To completely remove a resist and to obtain stable and uniform characteristics by subjecting the resist to an oxygen plasma treatment to remove the properties-changed resist on the surface of the resist before a resist cleaning stage. CONSTITUTION:A substrate 1 is subjected to ion milling by projection of ion beams (arrows A) thereto. The properties-changed resist 3a is formed on the surface of the resist 3 at the time when an insulating protective film 2 is patterned. The properties-changed resist 3a is then removed by subjecting this substrate 1 to the oxygen plasma treatment and the resist 3 is removed by cleaning such as ultrasonic cleaning using an org. solvent. The properties- changed layer of the resist surface is removed by such oxygen plasma treatment before the resist cleaning stage, by which the complete removal of the resist in the cleaning stage is executed. The formation of the thin film coil having stable characteristics is thereby enabled.
JP62229841A 1987-09-16 1987-09-16 Method of manufacturing thin film magnetic head Expired - Fee Related JPH0770025B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62229841A JPH0770025B2 (en) 1987-09-16 1987-09-16 Method of manufacturing thin film magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62229841A JPH0770025B2 (en) 1987-09-16 1987-09-16 Method of manufacturing thin film magnetic head

Publications (2)

Publication Number Publication Date
JPS6473519A true JPS6473519A (en) 1989-03-17
JPH0770025B2 JPH0770025B2 (en) 1995-07-31

Family

ID=16898522

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62229841A Expired - Fee Related JPH0770025B2 (en) 1987-09-16 1987-09-16 Method of manufacturing thin film magnetic head

Country Status (1)

Country Link
JP (1) JPH0770025B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101106631B1 (en) 2003-02-13 2012-01-20 웰스태트 테러퓨틱스 코포레이션 Compounds for the Treatment of Metabolic Disorders
KR20080089453A (en) 2006-01-25 2008-10-06 웰스태트 테러퓨틱스 코포레이션 Compounds for the treatment of metabolic disorders
JP2009531280A (en) 2006-01-25 2009-09-03 ウェルスタット セラピューティクス コーポレイション Compounds for treating metabolic disorders

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59104718A (en) * 1982-12-08 1984-06-16 Comput Basic Mach Technol Res Assoc Production of thin film magnetic head
JPS61177615A (en) * 1985-01-31 1986-08-09 Sharp Corp Production for thin film magnetic head

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59104718A (en) * 1982-12-08 1984-06-16 Comput Basic Mach Technol Res Assoc Production of thin film magnetic head
JPS61177615A (en) * 1985-01-31 1986-08-09 Sharp Corp Production for thin film magnetic head

Also Published As

Publication number Publication date
JPH0770025B2 (en) 1995-07-31

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees