JPS6472570A - Photovoltaic device - Google Patents

Abstract

PURPOSE:To improve adhesive properties to an amorphous silicon film without largely increasing a sheet resistance value as a transparent electrode film by forming the electrode film of tin oxide to have a laminated construction of a layer containing fluorine and a layer containing no fluorine, and bringing the layer containing no fluorine into contact with the amorphous silicon layer. CONSTITUTION:The transparent electrode film 2 of a photovoltaic device in which the transparent electrode film 2, an amorphous silicon film 3 containing an optical active layer and a back face electrode film 4 are laminated is composed of tin oxide having at least two layers of a layer 2a containing fluorine and a layer 2b containing no fluorine, and the layer 2b is brought into contact with the film 3. For example, the film 2 made of SnO2 having the layer 2a containing the F of the side in contact with a translucent substrate 1 and the layer 2b containing no F thereon is formed on the substrate 1 made of glass or the like. The amorphous silicon film 3 having a pin junction in which a p-type layer 3p, an i-type layer 3i as an optical active layer and an n-type layer 3n are laminated in this order from the side of the film 2, and a rear surface electrode film 4 made of aluminum or the like are formed thereon.