JPS64720A - Manufacture of single crystal thin-film - Google Patents
Manufacture of single crystal thin-filmInfo
- Publication number
- JPS64720A JPS64720A JP15446187A JP15446187A JPS64720A JP S64720 A JPS64720 A JP S64720A JP 15446187 A JP15446187 A JP 15446187A JP 15446187 A JP15446187 A JP 15446187A JP S64720 A JPS64720 A JP S64720A
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- film
- section
- crystal silicon
- crystal thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Recrystallisation Techniques (AREA)
Abstract
PURPOSE: To obtain a single crystal thin-film, a crystal orientation of which coincides with that of a single crystal substrate, by leaving a region, in which the single crystal thin film as species is brought into contact directly with a single crystal thin-film in the lower layer of the single crystal thin-film or the single crystal substrate, when the single crystal thin-film as species is patterned.
CONSTITUTION: An SiO2 film 7 is formed onto a single crystal silicon film 61 through a normal CVD method, and only a section from which the single crystal silicon film 61 must be exposed is patterned through a normal photolithographic method, thus shaping an opening section 6a. A polycrystalline silicon film 8 and an SiO2 film 9 are formed onto the opening section 6a, a region in which the upper section of the single crystal silicon film 61 is brought into contact directly with an exposed section 1a in a single crystal silicon substrate 1 is scanned with argon laser beams 10 up to other regions, and a melting section 11 is solidified in the direction of the arrow 13. That is, the polycrystalline silicon film 8 is changed into a single crystal, and a single crystal silicon film 12, a crystal orientation of which coincides with the single crystal silicon substrate 1, is acquired. Regions up to the region of the single crystal silicon substrate 1a are melted at that time.
COPYRIGHT: (C)1989,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62154461A JPH0795525B2 (en) | 1987-06-23 | 1987-06-23 | Method for manufacturing single crystal thin film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62154461A JPH0795525B2 (en) | 1987-06-23 | 1987-06-23 | Method for manufacturing single crystal thin film |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPS64720A true JPS64720A (en) | 1989-01-05 |
| JPH01720A JPH01720A (en) | 1989-01-05 |
| JPH0795525B2 JPH0795525B2 (en) | 1995-10-11 |
Family
ID=15584747
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62154461A Expired - Lifetime JPH0795525B2 (en) | 1987-06-23 | 1987-06-23 | Method for manufacturing single crystal thin film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0795525B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007120601A (en) * | 2005-10-27 | 2007-05-17 | Honda Motor Co Ltd | Centrifugal clutch |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5853821A (en) * | 1981-09-25 | 1983-03-30 | Toshiba Corp | Preparation of laminated semiconductor device |
-
1987
- 1987-06-23 JP JP62154461A patent/JPH0795525B2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5853821A (en) * | 1981-09-25 | 1983-03-30 | Toshiba Corp | Preparation of laminated semiconductor device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007120601A (en) * | 2005-10-27 | 2007-05-17 | Honda Motor Co Ltd | Centrifugal clutch |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0795525B2 (en) | 1995-10-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |