JPS6469971A - Checking apparatus of characteristics of semiconductor element - Google Patents

Abstract

PURPOSE:To find out abnormality in characteristics in a wide range from a minute current area to a large current area, by a method wherein a current whose current value changes almost logarithmically is supplied intermittently to a semiconductor element to be tested, and a voltage between the current input/output terminals of the semiconductor element measured at that time is used to analyze the characteristics. CONSTITUTION:A current source 1 supplies a current to a semiconductor 2 to be tested, and an analog voltmeter 3 measures a voltage between the current input/output terminals of the semiconductor element 2 to be tested. A characteristic analyzing circuit 12 conducts the analysis of characteristics by using an output of the voltmeter 3. The value of the current supplied from the current source 1 to the element 2 is made to change almost logarithmically. Therefore, while the minimum of the current value that can usually be detected is only IC = 100 at best even by sampling in increments of 100 the current values from IC = 1000 to IC = 100, for instance, the minimum value being so small as IC = the first power of 2 (= 2) can be detected by also using 10 samples with the current values from IC = the tenth power of 2 to IC = the first power of 2, according to this constitution, when the amount of the change of the current is fixed.