JPS55120147A - Semiconductor substrate detector - Google Patents

Semiconductor substrate detector

Info

Publication number
JPS55120147A
JPS55120147A JP2843779A JP2843779A JPS55120147A JP S55120147 A JPS55120147 A JP S55120147A JP 2843779 A JP2843779 A JP 2843779A JP 2843779 A JP2843779 A JP 2843779A JP S55120147 A JPS55120147 A JP S55120147A
Authority
JP
Japan
Prior art keywords
probe
semiconductor substrate
substrate
contact
potential
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2843779A
Other languages
Japanese (ja)
Inventor
Hiromi Takano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP2843779A priority Critical patent/JPS55120147A/en
Publication of JPS55120147A publication Critical patent/JPS55120147A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Abstract

PURPOSE:To precisely detect the contact of an IC inspecting probe provided on a probe card with a semiconductor substrate by detecting the potential between the probe and the substrate. CONSTITUTION:Any probe 5 on a probe card 4 is connected to the terminal 7 of a semiconductor substrate detector 3, and a specimen base 2 carrying a semiconductor substrate 1 is connected to a terminal 6. A comprator 12 compares the standard potential generated by a generator 13 in the detector 3 with the potential of the probe as obtained from an input terminal set to detect the contact of the probe with the substrate 1. The existence of the contact may be detected by altering the detecting range of the resistance value between the probe and the substrate upon control of the standard potential by a controller 16 and freely selecting the resistance value in the range from high to low resistances. According to this method, it can extend the short life of the probe card due to the deformation of the probe and the like.
JP2843779A 1979-03-12 1979-03-12 Semiconductor substrate detector Pending JPS55120147A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2843779A JPS55120147A (en) 1979-03-12 1979-03-12 Semiconductor substrate detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2843779A JPS55120147A (en) 1979-03-12 1979-03-12 Semiconductor substrate detector

Publications (1)

Publication Number Publication Date
JPS55120147A true JPS55120147A (en) 1980-09-16

Family

ID=12248635

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2843779A Pending JPS55120147A (en) 1979-03-12 1979-03-12 Semiconductor substrate detector

Country Status (1)

Country Link
JP (1) JPS55120147A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61206238A (en) * 1985-03-08 1986-09-12 Nippon Maikuronikusu:Kk Automatic semiconductor wafer prober
JPS63119518A (en) * 1986-11-08 1988-05-24 昭和電工株式会社 Solid electrolytic capacitor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52128071A (en) * 1976-04-20 1977-10-27 Nec Corp Automatic test unit

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52128071A (en) * 1976-04-20 1977-10-27 Nec Corp Automatic test unit

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61206238A (en) * 1985-03-08 1986-09-12 Nippon Maikuronikusu:Kk Automatic semiconductor wafer prober
JPS63119518A (en) * 1986-11-08 1988-05-24 昭和電工株式会社 Solid electrolytic capacitor
JPH0577283B2 (en) * 1986-11-08 1993-10-26 Showa Denko Kk

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