JPS5768043A - Measuring method and device for characteristics of semiconductor wafer - Google Patents

Measuring method and device for characteristics of semiconductor wafer

Info

Publication number
JPS5768043A
JPS5768043A JP14290180A JP14290180A JPS5768043A JP S5768043 A JPS5768043 A JP S5768043A JP 14290180 A JP14290180 A JP 14290180A JP 14290180 A JP14290180 A JP 14290180A JP S5768043 A JPS5768043 A JP S5768043A
Authority
JP
Japan
Prior art keywords
measuring
wafer
measured
electrode
terminal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14290180A
Other languages
Japanese (ja)
Inventor
Takio Naito
Hideharu Fujii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14290180A priority Critical patent/JPS5768043A/en
Publication of JPS5768043A publication Critical patent/JPS5768043A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Abstract

PURPOSE:To measure the accurate characteristic values of a semiconductor wafer by contacting two pairs of measuring circuits having stages of two pieces electrically insulating and two independent probes with an element to be measured of wafer, thereby removing the influence of the contact resistance. CONSTITUTION:A wafer 1 is placed on 2-terminal stage integral with semicircular metallic pieces 2A, 2B via an insulator 9. A probe contacted with the element 3 to be measured of a wafer 1 is connected, for example, at one side to a measuring terminal 7A as a measuring electrode 4A through a voltmeter 8 and is connected at the other side to a measuring terminal 7B as a power source electrode 4B through a power source 5 and an ammeter 6. In this manner the characteristics (Zener voltage Vz) when a reference current Iz is flowed between the electrode 4B and the stage 2B can be measured by the voltmeter 8. Thus, it can eliminate the influence of contacting resistors R1, R2 affecting when a pair of measuring circuits are merely used, and constantly stable measuring result can be accurately obtained.
JP14290180A 1980-10-15 1980-10-15 Measuring method and device for characteristics of semiconductor wafer Pending JPS5768043A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14290180A JPS5768043A (en) 1980-10-15 1980-10-15 Measuring method and device for characteristics of semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14290180A JPS5768043A (en) 1980-10-15 1980-10-15 Measuring method and device for characteristics of semiconductor wafer

Publications (1)

Publication Number Publication Date
JPS5768043A true JPS5768043A (en) 1982-04-26

Family

ID=15326228

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14290180A Pending JPS5768043A (en) 1980-10-15 1980-10-15 Measuring method and device for characteristics of semiconductor wafer

Country Status (1)

Country Link
JP (1) JPS5768043A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5034684A (en) * 1988-10-24 1991-07-23 Tokyo Electron Limited Probe device and method of controlling the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5034684A (en) * 1988-10-24 1991-07-23 Tokyo Electron Limited Probe device and method of controlling the same

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