JPS6467893A - Manufacture of electroluminescence display panel - Google Patents

Manufacture of electroluminescence display panel

Info

Publication number
JPS6467893A
JPS6467893A JP62223155A JP22315587A JPS6467893A JP S6467893 A JPS6467893 A JP S6467893A JP 62223155 A JP62223155 A JP 62223155A JP 22315587 A JP22315587 A JP 22315587A JP S6467893 A JPS6467893 A JP S6467893A
Authority
JP
Japan
Prior art keywords
insulating film
resistivity
luminous layer
low
manufacture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62223155A
Other languages
Japanese (ja)
Inventor
Masumi Koizumi
Hiromasa Sugano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP62223155A priority Critical patent/JPS6467893A/en
Publication of JPS6467893A publication Critical patent/JPS6467893A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electroluminescent Light Sources (AREA)

Abstract

PURPOSE:To prevent the infiltration of an etching reagent through a back electrode and improve the reliability by forming an insulating film with the desired thickness using a dedicated metallic mask on the end section of a luminous layer deposition surface. CONSTITUTION:A transparent front electrode 22 is formed on a transparent substrate 21, and an insulating film 23 with high resistivity is formed on the front electrode 22. The first low-resistivity insulating film 24, a luminous layer 25, the second low-resistivity insulating film 26 are formed in this order on the high-resistivity insulating film 23 using the same metallic mask in the same vacuum. The metallic mask is then exchanged, a high-resistivity insulating film 27 is formed on the second low-resistivity insulating film 26, the metal mask is exchanged again, and an insulating film 29 is formed at least on the end section of the deposition surface of the luminous layer 25. The luminous layer 25 is thereby prevented from being infringed by an etching reagent when a back electrode 28 is formed, and the reliability is improved.
JP62223155A 1987-09-08 1987-09-08 Manufacture of electroluminescence display panel Pending JPS6467893A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62223155A JPS6467893A (en) 1987-09-08 1987-09-08 Manufacture of electroluminescence display panel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62223155A JPS6467893A (en) 1987-09-08 1987-09-08 Manufacture of electroluminescence display panel

Publications (1)

Publication Number Publication Date
JPS6467893A true JPS6467893A (en) 1989-03-14

Family

ID=16793654

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62223155A Pending JPS6467893A (en) 1987-09-08 1987-09-08 Manufacture of electroluminescence display panel

Country Status (1)

Country Link
JP (1) JPS6467893A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003115393A (en) * 2001-10-02 2003-04-18 Sony Corp Organic electroluminescence element and its manufacturing method, image display equipment
JP2009004560A (en) * 2007-06-21 2009-01-08 Seiko Epson Corp Semiconductor device, and manufacturing method therefor
JP2020198172A (en) * 2019-05-31 2020-12-10 パイオニア株式会社 Light-emitting device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003115393A (en) * 2001-10-02 2003-04-18 Sony Corp Organic electroluminescence element and its manufacturing method, image display equipment
JP2009004560A (en) * 2007-06-21 2009-01-08 Seiko Epson Corp Semiconductor device, and manufacturing method therefor
JP2020198172A (en) * 2019-05-31 2020-12-10 パイオニア株式会社 Light-emitting device

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