JPS6415705A - Production of fine element - Google Patents

Production of fine element

Info

Publication number
JPS6415705A
JPS6415705A JP17140687A JP17140687A JPS6415705A JP S6415705 A JPS6415705 A JP S6415705A JP 17140687 A JP17140687 A JP 17140687A JP 17140687 A JP17140687 A JP 17140687A JP S6415705 A JPS6415705 A JP S6415705A
Authority
JP
Japan
Prior art keywords
resist
sensitivity
gratings
coated
prebaked
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17140687A
Other languages
Japanese (ja)
Inventor
Teruhiro Shiono
Kentaro Setsune
Osamu Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP17140687A priority Critical patent/JPS6415705A/en
Publication of JPS6415705A publication Critical patent/JPS6415705A/en
Pending legal-status Critical Current

Links

Landscapes

  • Diffracting Gratings Or Hologram Optical Elements (AREA)

Abstract

PURPOSE:To prevent the 'hemming' of gratings, etc., and to produce fine elements having excellent shape characteristics by dividing the resist to be coated on a substrate to two layers and using the resist having the lower sensitivity than the sensitivity of the upper layer for the lower layer. CONSTITUTION:A transparent conductive film 2 for preventing the charge-up of an electron beam is formed on a glass substrate 1 and the negative type resist 6 is spin-coated thereon to the coating film thickness of 0.1-0.5 times the max. groove depth of the fine elements and is prebaked. The negative type resist 5 having the sensitivity of 1.1-2 times the sensitivity of the resist 6 is further coated thereon and is prebaked. While the distribution corresponding to the shapes of the gratings 5A, 6A is applied thereto, the resist is exposed by the electron beam 4 and is developed, by which the gratings having the good saw tooth shape are obtd.
JP17140687A 1987-07-09 1987-07-09 Production of fine element Pending JPS6415705A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17140687A JPS6415705A (en) 1987-07-09 1987-07-09 Production of fine element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17140687A JPS6415705A (en) 1987-07-09 1987-07-09 Production of fine element

Publications (1)

Publication Number Publication Date
JPS6415705A true JPS6415705A (en) 1989-01-19

Family

ID=15922557

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17140687A Pending JPS6415705A (en) 1987-07-09 1987-07-09 Production of fine element

Country Status (1)

Country Link
JP (1) JPS6415705A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6105644A (en) * 1997-02-06 2000-08-22 Sumitomo Rubber Industries, Ltd. Pneumatic tire including three asymmetrically arranged main grooves
US20210157042A1 (en) * 2017-06-02 2021-05-27 Dispelix Oy Method of manufacturing a master plate and a master plate

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6221102A (en) * 1985-07-19 1987-01-29 Matsushita Electric Ind Co Ltd Manufacture of fresnel lens

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6221102A (en) * 1985-07-19 1987-01-29 Matsushita Electric Ind Co Ltd Manufacture of fresnel lens

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6105644A (en) * 1997-02-06 2000-08-22 Sumitomo Rubber Industries, Ltd. Pneumatic tire including three asymmetrically arranged main grooves
US20210157042A1 (en) * 2017-06-02 2021-05-27 Dispelix Oy Method of manufacturing a master plate and a master plate

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