JPS6415705A - Production of fine element - Google Patents
Production of fine elementInfo
- Publication number
- JPS6415705A JPS6415705A JP17140687A JP17140687A JPS6415705A JP S6415705 A JPS6415705 A JP S6415705A JP 17140687 A JP17140687 A JP 17140687A JP 17140687 A JP17140687 A JP 17140687A JP S6415705 A JPS6415705 A JP S6415705A
- Authority
- JP
- Japan
- Prior art keywords
- resist
- sensitivity
- gratings
- coated
- prebaked
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Diffracting Gratings Or Hologram Optical Elements (AREA)
Abstract
PURPOSE:To prevent the 'hemming' of gratings, etc., and to produce fine elements having excellent shape characteristics by dividing the resist to be coated on a substrate to two layers and using the resist having the lower sensitivity than the sensitivity of the upper layer for the lower layer. CONSTITUTION:A transparent conductive film 2 for preventing the charge-up of an electron beam is formed on a glass substrate 1 and the negative type resist 6 is spin-coated thereon to the coating film thickness of 0.1-0.5 times the max. groove depth of the fine elements and is prebaked. The negative type resist 5 having the sensitivity of 1.1-2 times the sensitivity of the resist 6 is further coated thereon and is prebaked. While the distribution corresponding to the shapes of the gratings 5A, 6A is applied thereto, the resist is exposed by the electron beam 4 and is developed, by which the gratings having the good saw tooth shape are obtd.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17140687A JPS6415705A (en) | 1987-07-09 | 1987-07-09 | Production of fine element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17140687A JPS6415705A (en) | 1987-07-09 | 1987-07-09 | Production of fine element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6415705A true JPS6415705A (en) | 1989-01-19 |
Family
ID=15922557
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17140687A Pending JPS6415705A (en) | 1987-07-09 | 1987-07-09 | Production of fine element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6415705A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6105644A (en) * | 1997-02-06 | 2000-08-22 | Sumitomo Rubber Industries, Ltd. | Pneumatic tire including three asymmetrically arranged main grooves |
US20210157042A1 (en) * | 2017-06-02 | 2021-05-27 | Dispelix Oy | Method of manufacturing a master plate and a master plate |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6221102A (en) * | 1985-07-19 | 1987-01-29 | Matsushita Electric Ind Co Ltd | Manufacture of fresnel lens |
-
1987
- 1987-07-09 JP JP17140687A patent/JPS6415705A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6221102A (en) * | 1985-07-19 | 1987-01-29 | Matsushita Electric Ind Co Ltd | Manufacture of fresnel lens |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6105644A (en) * | 1997-02-06 | 2000-08-22 | Sumitomo Rubber Industries, Ltd. | Pneumatic tire including three asymmetrically arranged main grooves |
US20210157042A1 (en) * | 2017-06-02 | 2021-05-27 | Dispelix Oy | Method of manufacturing a master plate and a master plate |
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