GB1340353A - Cold-cathode and method of manufacturing same - Google Patents
Cold-cathode and method of manufacturing sameInfo
- Publication number
- GB1340353A GB1340353A GB2380671A GB2380671A GB1340353A GB 1340353 A GB1340353 A GB 1340353A GB 2380671 A GB2380671 A GB 2380671A GB 2380671 A GB2380671 A GB 2380671A GB 1340353 A GB1340353 A GB 1340353A
- Authority
- GB
- United Kingdom
- Prior art keywords
- layer
- layers
- porous
- sio
- cathode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000010931 gold Substances 0.000 abstract 5
- 229910018072 Al 2 O 3 Inorganic materials 0.000 abstract 4
- 229910004298 SiO 2 Inorganic materials 0.000 abstract 4
- 239000002184 metal Substances 0.000 abstract 3
- 229910052751 metal Inorganic materials 0.000 abstract 3
- 238000004544 sputter deposition Methods 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 229910006404 SnO 2 Inorganic materials 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- 238000003491 array Methods 0.000 abstract 1
- 239000010406 cathode material Substances 0.000 abstract 1
- 239000004020 conductor Substances 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract 1
- 229910052737 gold Inorganic materials 0.000 abstract 1
- 238000010849 ion bombardment Methods 0.000 abstract 1
- 239000011159 matrix material Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 150000007524 organic acids Chemical class 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
- H01J1/312—Cold cathodes, e.g. field-emissive cathode having an electric field perpendicular to the surface, e.g. tunnel-effect cathodes of metal-insulator-metal [MIM] type
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
Abstract
1340353 Cathode materials and processing PHILIPS ELECTRONIC & ASSOCIATED INDUSTRIES Ltd 19 April 1971 [14 March 1970] 23806/71 Heading H1D A cold cathode comprises a first conductive layer 2; an insulating layer with thick and thin regions, the thin regions being not more than 50Ám wide and formed of a compact layer 7 and a thicker porous layer 9; a discontinuous metal layer 12 on the porous layer with some of the metal 11 diffused into the porous layer and a second conductive layer 4 on the thick regions. The metal 11, 12 is gold and the diffused portions form field emission regions. The cathode comprises a glass substrate 1, layers 2, 3, 4, 8 of Al, SiO 2 , Al and Al 2 O 3 and in an etched hole, layers 7, 9, 12 of dense Al 2 O 3 , porous Al 2 O 3 containing needle shaped Au deposits 11 and Au. The cathode is prepared by vapour depositing the Al layer 2 on the substrate, sputtering on a layer of SiO 2 and adding an Al layer. A matrix of holes in layers 3, 4 are etched using a photo-resist method or ion bombardment and the assembly oxidized to form dense layers 7, 8. A porous Al 2 O 3 layer 9 is deposited electrolytically from an organic acid solution and the Au vapour deposited. The assembly is then heated in vacuum at 300‹ C. with a potential between layers 2, 4 causing some Au to diffuse into layer 9. In another embodiment used in an image intensifier the Al layer 2 is replaced by transparent SnO 2 and photo-conductive layers and dense and porous SiO 2 layers deposited by sputtering in holes in a SiO 2 . The continuous electrodes 2, 4 may be replaced by crossed conductor arrays.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19702012192 DE2012192A1 (en) | 1970-03-14 | 1970-03-14 | Electrical discharge tubes with a cathode consisting of an insulating layer lying between two conductive layers, and a method for producing a cathode intended for such a discharge tube |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1340353A true GB1340353A (en) | 1973-12-12 |
Family
ID=5765098
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB2380671A Expired GB1340353A (en) | 1970-03-14 | 1971-04-19 | Cold-cathode and method of manufacturing same |
Country Status (6)
Country | Link |
---|---|
JP (1) | JPS5224829B1 (en) |
CA (1) | CA937977A (en) |
DE (1) | DE2012192A1 (en) |
FR (1) | FR2084551A5 (en) |
GB (1) | GB1340353A (en) |
NL (1) | NL7103154A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2235819A (en) * | 1989-08-12 | 1991-03-13 | Cathodeon Ltd | Gas discharge display device |
GB2304989A (en) * | 1995-08-04 | 1997-03-26 | Richard Allan Tuck | Field electron emission materials and devices |
EP0874384A1 (en) * | 1997-03-25 | 1998-10-28 | Pioneer Electronic Corporation | Electron emission device and display device using the same |
GB2330687A (en) * | 1997-10-22 | 1999-04-28 | Printable Field Emitters Ltd | Field emission devices |
EP0986084A2 (en) * | 1998-09-11 | 2000-03-15 | Pioneer Corporation | Electron emission device and display apparatus using the same |
EP1271594A1 (en) * | 2001-06-29 | 2003-01-02 | Canon Kabushiki Kaisha | Electron-emitting device, electron source, and image-forming apparatus |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5442193A (en) * | 1994-02-22 | 1995-08-15 | Motorola | Microelectronic field emission device with breakdown inhibiting insulated gate electrode |
JP3874396B2 (en) * | 2000-01-13 | 2007-01-31 | パイオニア株式会社 | ELECTRON EMITTING ELEMENT, MANUFACTURING METHOD THEREOF, AND DISPLAY DEVICE USING ELECTRON EMITTING ELEMENT |
JP4253416B2 (en) | 2000-01-14 | 2009-04-15 | パイオニア株式会社 | Imaging device using electron-emitting device |
-
1970
- 1970-03-14 DE DE19702012192 patent/DE2012192A1/en not_active Withdrawn
-
1971
- 1971-03-10 NL NL7103154A patent/NL7103154A/xx unknown
- 1971-03-11 JP JP1303771A patent/JPS5224829B1/ja active Pending
- 1971-03-11 CA CA107456A patent/CA937977A/en not_active Expired
- 1971-03-12 FR FR7108712A patent/FR2084551A5/fr not_active Expired
- 1971-04-19 GB GB2380671A patent/GB1340353A/en not_active Expired
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2235819A (en) * | 1989-08-12 | 1991-03-13 | Cathodeon Ltd | Gas discharge display device |
GB2304989A (en) * | 1995-08-04 | 1997-03-26 | Richard Allan Tuck | Field electron emission materials and devices |
GB2304989B (en) * | 1995-08-04 | 1997-09-03 | Richard Allan Tuck | Field electron emission materials and devices |
EP0874384A1 (en) * | 1997-03-25 | 1998-10-28 | Pioneer Electronic Corporation | Electron emission device and display device using the same |
GB2330687A (en) * | 1997-10-22 | 1999-04-28 | Printable Field Emitters Ltd | Field emission devices |
GB2330687B (en) * | 1997-10-22 | 1999-09-29 | Printable Field Emitters Ltd | Field emission devices |
EP0986084A2 (en) * | 1998-09-11 | 2000-03-15 | Pioneer Corporation | Electron emission device and display apparatus using the same |
EP0986084A3 (en) * | 1998-09-11 | 2004-01-21 | Pioneer Corporation | Electron emission device and display apparatus using the same |
EP1271594A1 (en) * | 2001-06-29 | 2003-01-02 | Canon Kabushiki Kaisha | Electron-emitting device, electron source, and image-forming apparatus |
US7276843B2 (en) | 2001-06-29 | 2007-10-02 | Canon Kabushiki Kaisha | Electron-emitting device with electron blocking layer, electron source, and image-forming apparatus |
Also Published As
Publication number | Publication date |
---|---|
FR2084551A5 (en) | 1971-12-17 |
CA937977A (en) | 1973-12-04 |
DE2012192A1 (en) | 1971-10-07 |
JPS5224829B1 (en) | 1977-07-04 |
NL7103154A (en) | 1971-09-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
PCNP | Patent ceased through non-payment of renewal fee |