JPS6438995A - Manufacture of thin film el element - Google Patents
Manufacture of thin film el elementInfo
- Publication number
- JPS6438995A JPS6438995A JP62195981A JP19598187A JPS6438995A JP S6438995 A JPS6438995 A JP S6438995A JP 62195981 A JP62195981 A JP 62195981A JP 19598187 A JP19598187 A JP 19598187A JP S6438995 A JPS6438995 A JP S6438995A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- emission layer
- target
- emission
- brightness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electroluminescent Light Sources (AREA)
Abstract
PURPOSE:To improve the brightness or emission effectiveness of an emission layer by forming an electric shield screen between a substrate and target when forming the emission layer with target components made to be attached to the substrate. CONSTITUTION:Surfaces of each target 13 and 15 are striked by a sputter gas made in a plasma state, and target components striked out from surfaces are made to wholly attach on the insulation film surface on a substrate 1. In the sputter process, when the substrate 1 is covered with e.g. a mesh-state metal plate 21, ion-like charged particles of a sputter gas made to be a plasma state are electrically shielded with the plate 21. This eliminates the damage of a crystal of an emission layer formed thereby or the disarrangement of the crystal, and thereby prevents lowering of an emission efficiency or brightness of the emission layer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62195981A JPS6438995A (en) | 1987-08-04 | 1987-08-04 | Manufacture of thin film el element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62195981A JPS6438995A (en) | 1987-08-04 | 1987-08-04 | Manufacture of thin film el element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6438995A true JPS6438995A (en) | 1989-02-09 |
Family
ID=16350223
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62195981A Pending JPS6438995A (en) | 1987-08-04 | 1987-08-04 | Manufacture of thin film el element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6438995A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2006070633A1 (en) * | 2004-12-28 | 2008-06-12 | 株式会社アルバック | Sputtering source, sputtering apparatus, and thin film manufacturing method |
-
1987
- 1987-08-04 JP JP62195981A patent/JPS6438995A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2006070633A1 (en) * | 2004-12-28 | 2008-06-12 | 株式会社アルバック | Sputtering source, sputtering apparatus, and thin film manufacturing method |
JP4865570B2 (en) * | 2004-12-28 | 2012-02-01 | 株式会社アルバック | Sputtering source, sputtering apparatus, and thin film manufacturing method |
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