JPS5444885A - Structure and manufacture of thin film el element - Google Patents
Structure and manufacture of thin film el elementInfo
- Publication number
- JPS5444885A JPS5444885A JP11201877A JP11201877A JPS5444885A JP S5444885 A JPS5444885 A JP S5444885A JP 11201877 A JP11201877 A JP 11201877A JP 11201877 A JP11201877 A JP 11201877A JP S5444885 A JPS5444885 A JP S5444885A
- Authority
- JP
- Japan
- Prior art keywords
- dielectric layer
- laminated
- dielectric layers
- dielectric
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To obtain uniform brightness over the entire luminous surface by securing insulation with the interface state stabilized, by using an Si3N4 film containing O2 atoms as its dielectric layer.
CONSTITUTION: Onto glass substrate 8, transparent electrode 9 of SnO2 or In2O3 is adhered and on it, the 1st Si3N4 dielectric layer 10 is laminated. Further, ZnS luminous layer 11 doped with Mn is provided onto it by an electron beam and after the 2nd dielectric layer 12 of Si3N4 is laminated again, Al back electrode 13 is fixed to its surface. Then, electrodes 9 and 13 are connected to AC power supply 7, thereby causing luminescence. Here, although the Si3N4 film constituting dielectric layers 10 and 12 is formed by the reactive sputtering method, a little N2O is mixed action gas of pure N2 and or of N2 Ar to less than 1%. Consequently, the adhesion of dielectric layers becomes hard and the generation of an interface potential decreases greatly.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11201877A JPS5444885A (en) | 1977-09-16 | 1977-09-16 | Structure and manufacture of thin film el element |
US05/884,475 US4188565A (en) | 1977-09-16 | 1978-03-08 | Oxygen atom containing film for a thin-film electroluminescent element |
DE19782812592 DE2812592A1 (en) | 1977-09-16 | 1978-03-22 | THIN-FILM ELECTROLUMINESCENT DISPLAY ELEMENT AND METHOD OF MANUFACTURING IT |
GB12701/78A GB1602895A (en) | 1977-09-16 | 1978-03-31 | Thin-film electroluminescent element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11201877A JPS5444885A (en) | 1977-09-16 | 1977-09-16 | Structure and manufacture of thin film el element |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5444885A true JPS5444885A (en) | 1979-04-09 |
JPS5718313B2 JPS5718313B2 (en) | 1982-04-15 |
Family
ID=14575909
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11201877A Granted JPS5444885A (en) | 1977-09-16 | 1977-09-16 | Structure and manufacture of thin film el element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5444885A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5455190A (en) * | 1977-10-11 | 1979-05-02 | Sharp Corp | Structure and production of thin film el element |
US5789860A (en) * | 1995-08-11 | 1998-08-04 | Nippondenso Co., Ltd. | Dielectric thin film composition and thin-film EL device using same |
-
1977
- 1977-09-16 JP JP11201877A patent/JPS5444885A/en active Granted
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5455190A (en) * | 1977-10-11 | 1979-05-02 | Sharp Corp | Structure and production of thin film el element |
JPS5824915B2 (en) * | 1977-10-11 | 1983-05-24 | シャープ株式会社 | Thin film EL element |
US5789860A (en) * | 1995-08-11 | 1998-08-04 | Nippondenso Co., Ltd. | Dielectric thin film composition and thin-film EL device using same |
US6036823A (en) * | 1995-08-11 | 2000-03-14 | Denso Corporation | Dielectric thin film and thin-film EL device using same |
DE19632277C2 (en) * | 1995-08-11 | 2002-06-13 | Denso Corp | Dielectric thin film, a thin film electroluminescent device using the same, and methods of manufacturing the electroluminescent device |
Also Published As
Publication number | Publication date |
---|---|
JPS5718313B2 (en) | 1982-04-15 |
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