JPS6438996A - Manufacture of thin film el element - Google Patents
Manufacture of thin film el elementInfo
- Publication number
- JPS6438996A JPS6438996A JP62195982A JP19598287A JPS6438996A JP S6438996 A JPS6438996 A JP S6438996A JP 62195982 A JP62195982 A JP 62195982A JP 19598287 A JP19598287 A JP 19598287A JP S6438996 A JPS6438996 A JP S6438996A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- emission layer
- emission
- parallel
- brightness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electroluminescent Light Sources (AREA)
Abstract
PURPOSE:To improve the brightness or emission effectiveness of an emission layer by forming a magnetic field in parallel to the substrate surface between a substrate and target when forming the emission layer with target components made to be attached to the substrate. CONSTITUTION:When an emission layer is wholly attached and formed on a substrate 1, a magnetic field in parallel to the substrate 1 surface is formed between the substrate 1 and targets 13 and 15. By the magnet field, ion-like charged particles of a sputter gas made to be a plasma state are made to receive an outer force in the parallel direction to the substrate 1, as a result, ions are not collided with the surface of the emission layer formed on the substrate 1. This prevents lowering of the emission effectiveness or brightness of the emission layer with eliminating the damage of a crystal or the disarrangement of a crystal arrangement of the emission layer formed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62195982A JPS6438996A (en) | 1987-08-04 | 1987-08-04 | Manufacture of thin film el element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62195982A JPS6438996A (en) | 1987-08-04 | 1987-08-04 | Manufacture of thin film el element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6438996A true JPS6438996A (en) | 1989-02-09 |
Family
ID=16350240
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62195982A Pending JPS6438996A (en) | 1987-08-04 | 1987-08-04 | Manufacture of thin film el element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6438996A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01161743U (en) * | 1988-04-30 | 1989-11-10 | ||
JPH04248292A (en) * | 1991-01-24 | 1992-09-03 | Fuji Electric Co Ltd | Formation method of luminous membrane of electro-luminescence display panel |
JPWO2006070633A1 (en) * | 2004-12-28 | 2008-06-12 | 株式会社アルバック | Sputtering source, sputtering apparatus, and thin film manufacturing method |
JP2009138230A (en) * | 2007-12-06 | 2009-06-25 | Ulvac Japan Ltd | Sputtering system and film deposition method |
-
1987
- 1987-08-04 JP JP62195982A patent/JPS6438996A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01161743U (en) * | 1988-04-30 | 1989-11-10 | ||
JPH04248292A (en) * | 1991-01-24 | 1992-09-03 | Fuji Electric Co Ltd | Formation method of luminous membrane of electro-luminescence display panel |
JPWO2006070633A1 (en) * | 2004-12-28 | 2008-06-12 | 株式会社アルバック | Sputtering source, sputtering apparatus, and thin film manufacturing method |
JP4865570B2 (en) * | 2004-12-28 | 2012-02-01 | 株式会社アルバック | Sputtering source, sputtering apparatus, and thin film manufacturing method |
JP2009138230A (en) * | 2007-12-06 | 2009-06-25 | Ulvac Japan Ltd | Sputtering system and film deposition method |
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