JPS6466502A - Length measurement by reflected light - Google Patents
Length measurement by reflected lightInfo
- Publication number
- JPS6466502A JPS6466502A JP22303587A JP22303587A JPS6466502A JP S6466502 A JPS6466502 A JP S6466502A JP 22303587 A JP22303587 A JP 22303587A JP 22303587 A JP22303587 A JP 22303587A JP S6466502 A JPS6466502 A JP S6466502A
- Authority
- JP
- Japan
- Prior art keywords
- reflected light
- measured
- image sensor
- lens
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
PURPOSE:To enable measurement of an object with a greater depth, by making reflected light from an object to be measured incident on an imaging lens while an image sensor is arranged at a fixed distance from the lens to fetch an electrical signal from the image sensor with a parallel light beam of the reflected light as main beam. CONSTITUTION:Reflected light from an object 5 to be measured is made incident on an imaging lens 6 with a slit 8 arranged on an image space focal plane and an image sensor 9 is arranged at a position separated at a fixed distance from the lens 6. Then, a beam parallel with the optical axis of reflected light forms an image on the image sensor 9 as main beam 10 to fetch an electrical signal pertaining to dimensions of the object 5 being measured from the image sensor 9. A linearly polarized laser light is used as light source and reflected with a polarized beam splitter 4 to be made parallel with the imaging lens 6. Then, the light beam is made to irradiate the object 5 being measured through a 1/4 wavelength plate 7 while reflected light from the object 5 being measured forms an image on the imaging element 9 passing through the wavelength plate 7, the lens 6, the splitter 4 and the slit 8.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22303587A JPS6466502A (en) | 1987-09-08 | 1987-09-08 | Length measurement by reflected light |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22303587A JPS6466502A (en) | 1987-09-08 | 1987-09-08 | Length measurement by reflected light |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6466502A true JPS6466502A (en) | 1989-03-13 |
Family
ID=16791823
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP22303587A Pending JPS6466502A (en) | 1987-09-08 | 1987-09-08 | Length measurement by reflected light |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6466502A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04110907U (en) * | 1991-03-13 | 1992-09-25 | 株式会社キーエンス | Dimension measuring device |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58191904A (en) * | 1982-05-04 | 1983-11-09 | Nippon Telegr & Teleph Corp <Ntt> | Bidirectional gap detector |
JPS61218905A (en) * | 1985-03-26 | 1986-09-29 | Citizen Watch Co Ltd | Gap measuring instrument |
JPS61262604A (en) * | 1985-05-17 | 1986-11-20 | Hitachi Ltd | Dimension measuring instrument |
JPS6281723A (en) * | 1985-10-07 | 1987-04-15 | Hitachi Ltd | Inspection device for lsi wafer pattern and the like |
DE3619412A1 (en) * | 1986-06-12 | 1987-12-17 | Hoesch Stahl Ag | METHOD AND DEVICE FOR ROLL GAP MEASUREMENT AND CONTROL |
-
1987
- 1987-09-08 JP JP22303587A patent/JPS6466502A/en active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58191904A (en) * | 1982-05-04 | 1983-11-09 | Nippon Telegr & Teleph Corp <Ntt> | Bidirectional gap detector |
JPS61218905A (en) * | 1985-03-26 | 1986-09-29 | Citizen Watch Co Ltd | Gap measuring instrument |
JPS61262604A (en) * | 1985-05-17 | 1986-11-20 | Hitachi Ltd | Dimension measuring instrument |
JPS6281723A (en) * | 1985-10-07 | 1987-04-15 | Hitachi Ltd | Inspection device for lsi wafer pattern and the like |
DE3619412A1 (en) * | 1986-06-12 | 1987-12-17 | Hoesch Stahl Ag | METHOD AND DEVICE FOR ROLL GAP MEASUREMENT AND CONTROL |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04110907U (en) * | 1991-03-13 | 1992-09-25 | 株式会社キーエンス | Dimension measuring device |
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