JPS6466502A - Length measurement by reflected light - Google Patents

Length measurement by reflected light

Info

Publication number
JPS6466502A
JPS6466502A JP22303587A JP22303587A JPS6466502A JP S6466502 A JPS6466502 A JP S6466502A JP 22303587 A JP22303587 A JP 22303587A JP 22303587 A JP22303587 A JP 22303587A JP S6466502 A JPS6466502 A JP S6466502A
Authority
JP
Japan
Prior art keywords
reflected light
measured
image sensor
lens
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22303587A
Other languages
Japanese (ja)
Inventor
Tomio Nakamura
Tokuji Takahashi
Kazumi Furuta
Tsuneo Sawazumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Konica Minolta Inc
Original Assignee
Konica Minolta Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Konica Minolta Inc filed Critical Konica Minolta Inc
Priority to JP22303587A priority Critical patent/JPS6466502A/en
Publication of JPS6466502A publication Critical patent/JPS6466502A/en
Pending legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To enable measurement of an object with a greater depth, by making reflected light from an object to be measured incident on an imaging lens while an image sensor is arranged at a fixed distance from the lens to fetch an electrical signal from the image sensor with a parallel light beam of the reflected light as main beam. CONSTITUTION:Reflected light from an object 5 to be measured is made incident on an imaging lens 6 with a slit 8 arranged on an image space focal plane and an image sensor 9 is arranged at a position separated at a fixed distance from the lens 6. Then, a beam parallel with the optical axis of reflected light forms an image on the image sensor 9 as main beam 10 to fetch an electrical signal pertaining to dimensions of the object 5 being measured from the image sensor 9. A linearly polarized laser light is used as light source and reflected with a polarized beam splitter 4 to be made parallel with the imaging lens 6. Then, the light beam is made to irradiate the object 5 being measured through a 1/4 wavelength plate 7 while reflected light from the object 5 being measured forms an image on the imaging element 9 passing through the wavelength plate 7, the lens 6, the splitter 4 and the slit 8.
JP22303587A 1987-09-08 1987-09-08 Length measurement by reflected light Pending JPS6466502A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22303587A JPS6466502A (en) 1987-09-08 1987-09-08 Length measurement by reflected light

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22303587A JPS6466502A (en) 1987-09-08 1987-09-08 Length measurement by reflected light

Publications (1)

Publication Number Publication Date
JPS6466502A true JPS6466502A (en) 1989-03-13

Family

ID=16791823

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22303587A Pending JPS6466502A (en) 1987-09-08 1987-09-08 Length measurement by reflected light

Country Status (1)

Country Link
JP (1) JPS6466502A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04110907U (en) * 1991-03-13 1992-09-25 株式会社キーエンス Dimension measuring device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58191904A (en) * 1982-05-04 1983-11-09 Nippon Telegr & Teleph Corp <Ntt> Bidirectional gap detector
JPS61218905A (en) * 1985-03-26 1986-09-29 Citizen Watch Co Ltd Gap measuring instrument
JPS61262604A (en) * 1985-05-17 1986-11-20 Hitachi Ltd Dimension measuring instrument
JPS6281723A (en) * 1985-10-07 1987-04-15 Hitachi Ltd Inspection device for lsi wafer pattern and the like
DE3619412A1 (en) * 1986-06-12 1987-12-17 Hoesch Stahl Ag METHOD AND DEVICE FOR ROLL GAP MEASUREMENT AND CONTROL

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58191904A (en) * 1982-05-04 1983-11-09 Nippon Telegr & Teleph Corp <Ntt> Bidirectional gap detector
JPS61218905A (en) * 1985-03-26 1986-09-29 Citizen Watch Co Ltd Gap measuring instrument
JPS61262604A (en) * 1985-05-17 1986-11-20 Hitachi Ltd Dimension measuring instrument
JPS6281723A (en) * 1985-10-07 1987-04-15 Hitachi Ltd Inspection device for lsi wafer pattern and the like
DE3619412A1 (en) * 1986-06-12 1987-12-17 Hoesch Stahl Ag METHOD AND DEVICE FOR ROLL GAP MEASUREMENT AND CONTROL

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04110907U (en) * 1991-03-13 1992-09-25 株式会社キーエンス Dimension measuring device

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