JPS6464223A - Ion milling device - Google Patents
Ion milling deviceInfo
- Publication number
- JPS6464223A JPS6464223A JP21918087A JP21918087A JPS6464223A JP S6464223 A JPS6464223 A JP S6464223A JP 21918087 A JP21918087 A JP 21918087A JP 21918087 A JP21918087 A JP 21918087A JP S6464223 A JPS6464223 A JP S6464223A
- Authority
- JP
- Japan
- Prior art keywords
- ion beams
- etching
- substrate
- ion
- resist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Drying Of Semiconductors (AREA)
Abstract
PURPOSE:To enable processing, through which re-adhesion is removed completely, by mounting a second ion source capable of irradiating a substrate with ion beams at an angle separate from a first ion source besides the first ion source aiming at processing to a desired pattern. CONSTITUTION:First ion beams 5a etch and pattern a substrate 7, using a photo-resist 9 on the substrate 7 as a mask. Second ion beams 5b from a second ion source are applied from the re-adhesion surface side of an etching substance by first ion beams to the first ion beams 5a. A re-adhesion etching substance adhering on the wall surface of the photo-resist 9 or the etching wall surface of the substrate 7 again by the first ion beams 5a is removed through etching by the second ion beams 5b. Accordingly, no re-attachment is generated both on the side wall of the photo-resist and the side wall of an etching pattern, and no said re-adhesion etching substance is generated on the patterned substrate 7 after the photo-resist 9 is gotten rid of.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21918087A JPH0691044B2 (en) | 1987-09-03 | 1987-09-03 | Ion milling equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21918087A JPH0691044B2 (en) | 1987-09-03 | 1987-09-03 | Ion milling equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6464223A true JPS6464223A (en) | 1989-03-10 |
JPH0691044B2 JPH0691044B2 (en) | 1994-11-14 |
Family
ID=16731452
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21918087A Expired - Fee Related JPH0691044B2 (en) | 1987-09-03 | 1987-09-03 | Ion milling equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0691044B2 (en) |
-
1987
- 1987-09-03 JP JP21918087A patent/JPH0691044B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH0691044B2 (en) | 1994-11-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |