JPS53114679A - Plasm etching unit - Google Patents

Plasm etching unit

Info

Publication number
JPS53114679A
JPS53114679A JP2971877A JP2971877A JPS53114679A JP S53114679 A JPS53114679 A JP S53114679A JP 2971877 A JP2971877 A JP 2971877A JP 2971877 A JP2971877 A JP 2971877A JP S53114679 A JPS53114679 A JP S53114679A
Authority
JP
Japan
Prior art keywords
etching unit
plasm
plasm etching
etch
films
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2971877A
Other languages
Japanese (ja)
Other versions
JPS6124817B2 (en
Inventor
Masanao Itoga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP2971877A priority Critical patent/JPS53114679A/en
Publication of JPS53114679A publication Critical patent/JPS53114679A/en
Publication of JPS6124817B2 publication Critical patent/JPS6124817B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)

Abstract

PURPOSE: To enable to etch for films of different types, by connecting the bias circuit able to change the bias voltage to a high frequency source and by controlling the force attracting electrons through the control of negative potential of a metallic plate.
COPYRIGHT: (C)1978,JPO&Japio
JP2971877A 1977-03-17 1977-03-17 Plasm etching unit Granted JPS53114679A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2971877A JPS53114679A (en) 1977-03-17 1977-03-17 Plasm etching unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2971877A JPS53114679A (en) 1977-03-17 1977-03-17 Plasm etching unit

Publications (2)

Publication Number Publication Date
JPS53114679A true JPS53114679A (en) 1978-10-06
JPS6124817B2 JPS6124817B2 (en) 1986-06-12

Family

ID=12283881

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2971877A Granted JPS53114679A (en) 1977-03-17 1977-03-17 Plasm etching unit

Country Status (1)

Country Link
JP (1) JPS53114679A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55118637A (en) * 1979-03-06 1980-09-11 Chiyou Lsi Gijutsu Kenkyu Kumiai Plasma etching apparatus
JPS5664437A (en) * 1979-08-22 1981-06-01 Onera (Off Nat Aerospatiale) Method and device for chemically etching integrated circuit by dry process
JPS5750435A (en) * 1980-09-11 1982-03-24 Toshiba Corp Plasma etching device
US4433214A (en) * 1981-12-24 1984-02-21 Motorola, Inc. Acoustical transducer with a slotted piston suspension
JPS60140763U (en) * 1984-02-24 1985-09-18 日本電子株式会社 plasma equipment

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS48103433A (en) * 1972-04-17 1973-12-25

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS48103433A (en) * 1972-04-17 1973-12-25

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55118637A (en) * 1979-03-06 1980-09-11 Chiyou Lsi Gijutsu Kenkyu Kumiai Plasma etching apparatus
JPS5664437A (en) * 1979-08-22 1981-06-01 Onera (Off Nat Aerospatiale) Method and device for chemically etching integrated circuit by dry process
JPH0313741B2 (en) * 1979-08-22 1991-02-25 Onera (Off Nat Aerospatiale)
JPS5750435A (en) * 1980-09-11 1982-03-24 Toshiba Corp Plasma etching device
JPH0136247B2 (en) * 1980-09-11 1989-07-31 Toshiba Kk
US4433214A (en) * 1981-12-24 1984-02-21 Motorola, Inc. Acoustical transducer with a slotted piston suspension
JPS60140763U (en) * 1984-02-24 1985-09-18 日本電子株式会社 plasma equipment
JPS629324Y2 (en) * 1984-02-24 1987-03-04

Also Published As

Publication number Publication date
JPS6124817B2 (en) 1986-06-12

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