JPS6454401U - - Google Patents
Info
- Publication number
- JPS6454401U JPS6454401U JP14806687U JP14806687U JPS6454401U JP S6454401 U JPS6454401 U JP S6454401U JP 14806687 U JP14806687 U JP 14806687U JP 14806687 U JP14806687 U JP 14806687U JP S6454401 U JPS6454401 U JP S6454401U
- Authority
- JP
- Japan
- Prior art keywords
- conductor
- insulating
- ground
- ground conductor
- insulating layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004020 conductor Substances 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 239000011810 insulating material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 239000012212 insulator Substances 0.000 description 1
Landscapes
- Waveguides (AREA)
- Microwave Amplifiers (AREA)
Description
第１〜３図は本考案のＭＭＩＣの一実施例を示
す断面図、第４図は本考案の機能を説明する図、
第５図は本考案の他の実施例を示す断面図、第６
図は従来例のＭＭＩＣの斜視図、第７図は従来の
ＭＭＩＣのマイクロストリツプ線路の等価回路を
示す図、第８図は同じマイクロストリツプ線路の
特性インピーダンスを示す図、第９図は同じく伝
搬損失を示す図である。
１……半絶縁性半導体基板、２……ストリツプ
導体、３……絶縁物層、４……接地導体、５……
スリツト、６……ストリツプ導体幅、７……容器
、８……接地導体。
1 to 3 are cross-sectional views showing one embodiment of the MMIC of the present invention, and FIG. 4 is a diagram explaining the functions of the present invention.
FIG. 5 is a sectional view showing another embodiment of the present invention;
The figure is a perspective view of a conventional MMIC, FIG. 7 is a diagram showing an equivalent circuit of a microstrip line of a conventional MMIC, FIG. 8 is a diagram showing the characteristic impedance of the same microstrip line, and FIG. is a diagram similarly showing propagation loss. DESCRIPTION OF SYMBOLS 1... Semi-insulating semiconductor substrate, 2... Strip conductor, 3... Insulator layer, 4... Ground conductor, 5...
Slit, 6... Strip conductor width, 7... Container, 8... Ground conductor.
Claims (1)
面の所定の位置に形成するストリツプ導体と、こ
の導体間に設置するマイクロ波回路と、前記スト
リツプ導体を覆つて形成する絶縁物層と、この絶
縁物層に重ねて設ける接地導体と、この接地導体
と外部回路の接地間を接続する導体と、前記接地
導体を区分し前記絶縁物層を露出するスリツトを
具備することを特徴とするモノリシツクマイクロ
波集積回路。 A semi-insulating or insulating semiconductor substrate, a strip conductor formed at a predetermined position on its surface, a microwave circuit installed between the conductors, an insulating layer formed to cover the strip conductor, and this insulating material. A monolithic microwave characterized by comprising a ground conductor provided in layers, a conductor connecting the ground conductor to the ground of an external circuit, and a slit for dividing the ground conductor and exposing the insulating layer. integrated circuit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14806687U JPS6454401U (en) | 1987-09-30 | 1987-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14806687U JPS6454401U (en) | 1987-09-30 | 1987-09-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6454401U true JPS6454401U (en) | 1989-04-04 |
Family
ID=31419044
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14806687U Pending JPS6454401U (en) | 1987-09-30 | 1987-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6454401U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USRE40251E1 (en) | 1996-12-18 | 2008-04-22 | Seiko Epson Corporation | Optical element, polarization illumination device, and projector |
-
1987
- 1987-09-30 JP JP14806687U patent/JPS6454401U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USRE40251E1 (en) | 1996-12-18 | 2008-04-22 | Seiko Epson Corporation | Optical element, polarization illumination device, and projector |
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