JPS6262452U - - Google Patents
Info
- Publication number
- JPS6262452U JPS6262452U JP15313985U JP15313985U JPS6262452U JP S6262452 U JPS6262452 U JP S6262452U JP 15313985 U JP15313985 U JP 15313985U JP 15313985 U JP15313985 U JP 15313985U JP S6262452 U JPS6262452 U JP S6262452U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- microstrip line
- elements
- mmic
- ground conductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 239000004020 conductor Substances 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Waveguides (AREA)
- Semiconductor Integrated Circuits (AREA)
Description
第１図ａは本考案のＭＭＩＣの一実施例を示す
単極双投ＭＭＩＣスイツチの平面パターン図、第
１図ｂは第１図ａのＸ―Ｘ′から見た断面図であ
り電気力線の状態を示す図、第２図ａは本考案の
ＭＭＩＣの他の実施例を示す単極双投ＭＭＩＣス
イツチの平面パターン図、第２図ｂは第２図ａの
Ｘ―Ｘ′から見た断面図であり電気力線の状態を
示す図、第３図ａは本考案のＭＭＩＣの他の実施
例を示す多段増幅器のＭＭＩＣの平面パターン図
、第３図ｂは第３図ａのＸ―Ｘ′から見た断面図
であり電気力線の状態を示す図、第４図ａ，ｂ及
び第５図ａ，ｂは従来の単極双投ＭＭＩＣの平面
パターン図及び電気力線の状態を示す断面図であ
る。
１１…接地導体膜、１２…半導体基板、１６―
ａ，１６―ｂ…マイクロストリツプ線路、１７…
誘電体膜、１８…金属膜。
FIG. 1a is a plan pattern diagram of a single-pole double-throw MMIC switch showing an embodiment of the MMIC of the present invention, and FIG. 1b is a cross-sectional view taken along line X-X' in FIG. Figure 2a is a plan pattern diagram of a single pole double throw MMIC switch showing another embodiment of the MMIC of the present invention, Figure 2b is a view taken from X-X' in Figure 2a. FIG. 3a is a cross-sectional view showing the state of electric lines of force, FIG. 3a is a plane pattern diagram of a multi-stage amplifier MMIC showing another embodiment of the MMIC of the present invention, and FIG. 3b is a diagram showing the state of the lines of electric force. 4a, b and 5 a, b are cross-sectional views seen from X', showing the state of the lines of electric force. FIG. 11... Ground conductor film, 12... Semiconductor substrate, 16-
a, 16-b...Microstrip line, 17...
Dielectric film, 18...metal film.
Claims (1)
と、 この半導体基板の他方の面に形成された複数の
素子と、 この複数の素子を相互に接続するマイクロスト
リツプ線路と、 このマイクロストリツプ線路の中の所定のマイ
クロストリツプ線路上を横断して設けられ、前記
半導体基板上に形成された誘電体膜と、この誘電
体膜上に形成された前記マイクロストリツプ線路
を覆う金属膜とを具備したことを特徴とするモノ
リシツクマイクロ波集積回路装置。[Claims for Utility Model Registration] A semiconductor substrate with a ground conductor film formed on one surface, a plurality of elements formed on the other side of the semiconductor substrate, and a microstructure interconnecting the plurality of elements. a dielectric film provided across a predetermined microstrip line in the microstrip line and formed on the semiconductor substrate; A monolithic microwave integrated circuit device comprising: a metal film covering the microstrip line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15313985U JPS6262452U (en) | 1985-10-08 | 1985-10-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15313985U JPS6262452U (en) | 1985-10-08 | 1985-10-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6262452U true JPS6262452U (en) | 1987-04-17 |
Family
ID=31071757
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15313985U Pending JPS6262452U (en) | 1985-10-08 | 1985-10-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6262452U (en) |
-
1985
- 1985-10-08 JP JP15313985U patent/JPS6262452U/ja active Pending