JPH02120839U - - Google Patents
Info
- Publication number
- JPH02120839U JPH02120839U JP3063589U JP3063589U JPH02120839U JP H02120839 U JPH02120839 U JP H02120839U JP 3063589 U JP3063589 U JP 3063589U JP 3063589 U JP3063589 U JP 3063589U JP H02120839 U JPH02120839 U JP H02120839U
- Authority
- JP
- Japan
- Prior art keywords
- dielectric layer
- integrated circuit
- microwave integrated
- monolithic microwave
- dielectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004020 conductor Substances 0.000 claims 2
- 239000004642 Polyimide Substances 0.000 claims 1
- 229920001721 polyimide Polymers 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Landscapes
- Junction Field-Effect Transistors (AREA)
- Waveguides (AREA)
Description
第1図は本考案を説明する為の断面図、第2図
は従来例を説明する為の断面図である。
FIG. 1 is a sectional view for explaining the present invention, and FIG. 2 is a sectional view for explaining a conventional example.
Claims (1)
られ、その表面を覆うようにして誘電体層が形成
され、該誘電体層の表面に接地導体を形成したこ
とを特徴とするモノリシツクマイクロ波集積回路
。 (2) 前記誘電体層がポリイミドを主体とする絶
縁層であることを特徴とする請求項第1項に記載
のモノリシツクマイクロ波集積回路。[Claims for Utility Model Registration] (1) A strip conductor is provided on one surface of a dielectric substrate, a dielectric layer is formed to cover the surface, and a ground conductor is formed on the surface of the dielectric layer. A monolithic microwave integrated circuit featuring: (2) The monolithic microwave integrated circuit according to claim 1, wherein the dielectric layer is an insulating layer mainly made of polyimide.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989030635U JPH0749810Y2 (en) | 1989-03-16 | 1989-03-16 | Monolithic microwave integrated circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989030635U JPH0749810Y2 (en) | 1989-03-16 | 1989-03-16 | Monolithic microwave integrated circuit |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH02120839U true JPH02120839U (en) | 1990-09-28 |
JPH0749810Y2 JPH0749810Y2 (en) | 1995-11-13 |
Family
ID=31255869
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1989030635U Expired - Lifetime JPH0749810Y2 (en) | 1989-03-16 | 1989-03-16 | Monolithic microwave integrated circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0749810Y2 (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6053089A (en) * | 1983-09-02 | 1985-03-26 | Nec Corp | Semiconductor device |
JPS62294303A (en) * | 1986-06-13 | 1987-12-21 | Matsushita Electric Ind Co Ltd | Semiconductor device and its manufacture |
JPS6459942A (en) * | 1987-08-31 | 1989-03-07 | Nec Corp | Formation of multilayer interconnection |
-
1989
- 1989-03-16 JP JP1989030635U patent/JPH0749810Y2/en not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6053089A (en) * | 1983-09-02 | 1985-03-26 | Nec Corp | Semiconductor device |
JPS62294303A (en) * | 1986-06-13 | 1987-12-21 | Matsushita Electric Ind Co Ltd | Semiconductor device and its manufacture |
JPS6459942A (en) * | 1987-08-31 | 1989-03-07 | Nec Corp | Formation of multilayer interconnection |
Also Published As
Publication number | Publication date |
---|---|
JPH0749810Y2 (en) | 1995-11-13 |