JPS6452070A - Microwave plasma cvd device - Google Patents
Microwave plasma cvd deviceInfo
- Publication number
- JPS6452070A JPS6452070A JP62205918A JP20591887A JPS6452070A JP S6452070 A JPS6452070 A JP S6452070A JP 62205918 A JP62205918 A JP 62205918A JP 20591887 A JP20591887 A JP 20591887A JP S6452070 A JPS6452070 A JP S6452070A
- Authority
- JP
- Japan
- Prior art keywords
- microwave
- vacuum vessel
- vicinity
- plasma generating
- generating region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
- G03G5/02—Charge-receiving layers
- G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
- G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Light Receiving Elements (AREA)
- Photoreceptors In Electrophotography (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
PURPOSE:To improve the utilization efficiency of a raw gas and to stably form a homogeneous deposited film with good reproducibility and at a high rate by providing a microwave inlet window in the wall of a vacuum vessel in the vicinity of both ends of a film forming cylindrical carrier, and furnishing an exhaust means in the vicinity of the window. CONSTITUTION:The inside of the vacuum vessel 101 is evacuated through an exhaust hole 104. The cylindrical substrate 105 is rotated, heated by a heater 107 to a prescribed temp., and kept at that temp. The raw gases such as SiH4, H2, and B2H6 are supplied into the vacuum vessel 101, and then the microwave generated from a microwave generator is passed through a waveguide 103 and introduced into a plasma generating region 106 through the microwave inlet window 102. The introduced raw gases are excited by the energy of the microwave, and dissociated to form neutral radical particles, ion particles, electrons, etc. The materials reacts with each other, and a deposited film is formed on the surface of the conductive cylindrical substrate 105 on the plasma generating region 106 side.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62205918A JPS6452070A (en) | 1987-08-19 | 1987-08-19 | Microwave plasma cvd device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62205918A JPS6452070A (en) | 1987-08-19 | 1987-08-19 | Microwave plasma cvd device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6452070A true JPS6452070A (en) | 1989-02-28 |
Family
ID=16514901
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62205918A Pending JPS6452070A (en) | 1987-08-19 | 1987-08-19 | Microwave plasma cvd device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6452070A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5230572A (en) * | 1991-03-28 | 1993-07-27 | Brother Kogyo Kabushiki Kaisha | Tape printer having spacing function |
-
1987
- 1987-08-19 JP JP62205918A patent/JPS6452070A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5230572A (en) * | 1991-03-28 | 1993-07-27 | Brother Kogyo Kabushiki Kaisha | Tape printer having spacing function |
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