JPS6448022U - - Google Patents

Info

Publication number
JPS6448022U
JPS6448022U JP14273987U JP14273987U JPS6448022U JP S6448022 U JPS6448022 U JP S6448022U JP 14273987 U JP14273987 U JP 14273987U JP 14273987 U JP14273987 U JP 14273987U JP S6448022 U JPS6448022 U JP S6448022U
Authority
JP
Japan
Prior art keywords
insulating material
cooling fluid
heat insulating
semiconductor
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14273987U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0519950Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987142739U priority Critical patent/JPH0519950Y2/ja
Publication of JPS6448022U publication Critical patent/JPS6448022U/ja
Application granted granted Critical
Publication of JPH0519950Y2 publication Critical patent/JPH0519950Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Furnace Details (AREA)
JP1987142739U 1987-09-18 1987-09-18 Expired - Lifetime JPH0519950Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987142739U JPH0519950Y2 (enrdf_load_stackoverflow) 1987-09-18 1987-09-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987142739U JPH0519950Y2 (enrdf_load_stackoverflow) 1987-09-18 1987-09-18

Publications (2)

Publication Number Publication Date
JPS6448022U true JPS6448022U (enrdf_load_stackoverflow) 1989-03-24
JPH0519950Y2 JPH0519950Y2 (enrdf_load_stackoverflow) 1993-05-25

Family

ID=31408943

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987142739U Expired - Lifetime JPH0519950Y2 (enrdf_load_stackoverflow) 1987-09-18 1987-09-18

Country Status (1)

Country Link
JP (1) JPH0519950Y2 (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006351774A (ja) * 2005-06-15 2006-12-28 Tokyo Electron Ltd 熱処理装置、ヒータ及びヒータの製造方法
WO2007097199A1 (ja) * 2006-02-20 2007-08-30 Tokyo Electron Limited 熱処理装置、ヒータ及びその製造方法
JP2011138936A (ja) * 2009-12-28 2011-07-14 Hitachi Kokusai Electric Inc 加熱装置
JP2014079990A (ja) * 2012-10-18 2014-05-08 Tokyo Electron Ltd 断熱壁体の製造方法及び断熱壁体
JP2015040323A (ja) * 2013-08-21 2015-03-02 東京エレクトロン株式会社 断熱壁体の製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56146227A (en) * 1980-04-16 1981-11-13 Hitachi Ltd Heat treatment furnace
JPS59143039U (ja) * 1983-03-11 1984-09-25 富士通株式会社 加熱炉
JPS61241916A (ja) * 1985-04-18 1986-10-28 Deisuko Saiyaa Japan:Kk 半導体熱処理装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56146227A (en) * 1980-04-16 1981-11-13 Hitachi Ltd Heat treatment furnace
JPS59143039U (ja) * 1983-03-11 1984-09-25 富士通株式会社 加熱炉
JPS61241916A (ja) * 1985-04-18 1986-10-28 Deisuko Saiyaa Japan:Kk 半導体熱処理装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006351774A (ja) * 2005-06-15 2006-12-28 Tokyo Electron Ltd 熱処理装置、ヒータ及びヒータの製造方法
EP1895575A4 (en) * 2005-06-15 2009-10-21 Tokyo Electron Ltd HEAT TREATMENT DEVICE
WO2007097199A1 (ja) * 2006-02-20 2007-08-30 Tokyo Electron Limited 熱処理装置、ヒータ及びその製造方法
JP2011138936A (ja) * 2009-12-28 2011-07-14 Hitachi Kokusai Electric Inc 加熱装置
JP2014079990A (ja) * 2012-10-18 2014-05-08 Tokyo Electron Ltd 断熱壁体の製造方法及び断熱壁体
JP2015040323A (ja) * 2013-08-21 2015-03-02 東京エレクトロン株式会社 断熱壁体の製造方法

Also Published As

Publication number Publication date
JPH0519950Y2 (enrdf_load_stackoverflow) 1993-05-25

Similar Documents

Publication Publication Date Title
JPS6448022U (enrdf_load_stackoverflow)
CA2152297A1 (en) Spinner head for flash flow processing
US4913912A (en) Plastic injection mold apparatus with multiple tip torpedo heater
FR2581168B1 (fr) Appareil pour la production d'un jet de gaz a haute temperature
JPS6035244B2 (ja) 高温チヤンネル多重注入銃
US4108712A (en) Heat sealing machine with cooling means
JPH04308718A (ja) 射出成形装置
US4352659A (en) Method of heating an end of a length of plastic pipe and a circulating air furnace for carrying out the method
JPS6340647B2 (enrdf_load_stackoverflow)
US5126003A (en) Apparatus for welding multiply webs of synthetic thermoplastic material
US5085572A (en) Multiple tip torpedo heater
JP2656839B2 (ja) 真空熱処理炉
JPH0434399Y2 (enrdf_load_stackoverflow)
RU96110756A (ru) Сублимационный аппарат
JPH0410553Y2 (enrdf_load_stackoverflow)
JPS63167161U (enrdf_load_stackoverflow)
JPH0350028U (enrdf_load_stackoverflow)
SU906815A2 (ru) Воздухонагреватель дл термоусадочной пленки
JP3693016B2 (ja) 熱風発生装置
SU960047A1 (ru) Нагревательна плита пресса
JPH042391Y2 (enrdf_load_stackoverflow)
JPS5624938A (en) High pressure oxidizing apparatus
JPH0215490B2 (enrdf_load_stackoverflow)
JP2545476B2 (ja) 円筒形状断熱シュ―トの形状保持処理の為の装置
JPH0577957B2 (enrdf_load_stackoverflow)