JPS6447053A - Formation of multilayer interconnection - Google Patents
Formation of multilayer interconnectionInfo
- Publication number
- JPS6447053A JPS6447053A JP20352187A JP20352187A JPS6447053A JP S6447053 A JPS6447053 A JP S6447053A JP 20352187 A JP20352187 A JP 20352187A JP 20352187 A JP20352187 A JP 20352187A JP S6447053 A JPS6447053 A JP S6447053A
- Authority
- JP
- Japan
- Prior art keywords
- glass
- insulating film
- coated film
- film
- insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20352187A JPS6447053A (en) | 1987-08-18 | 1987-08-18 | Formation of multilayer interconnection |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20352187A JPS6447053A (en) | 1987-08-18 | 1987-08-18 | Formation of multilayer interconnection |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6447053A true JPS6447053A (en) | 1989-02-21 |
Family
ID=16475526
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20352187A Pending JPS6447053A (en) | 1987-08-18 | 1987-08-18 | Formation of multilayer interconnection |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6447053A (ja) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0474431A (ja) * | 1990-07-16 | 1992-03-09 | Matsushita Electron Corp | 半導体装置およびその製造方法 |
JPH04122026A (ja) * | 1990-09-13 | 1992-04-22 | Nec Corp | 半導体装置の製造方法 |
US5405805A (en) * | 1991-09-13 | 1995-04-11 | Nec Corporation | Method for forming interconnect structure, insulating films and surface protective films of semiconductor device |
US5444023A (en) * | 1993-01-11 | 1995-08-22 | Nec Corporation | Method of fabricating a semiconductor device having a multilayer wiring structure and using a fluorine compound-containing gas |
US5620919A (en) * | 1990-01-12 | 1997-04-15 | Paradigm Technology, Inc. | Methods for fabricating integrated circuits including openings to transistor regions |
US5656861A (en) * | 1990-01-12 | 1997-08-12 | Paradigm Technology, Inc. | Self-aligning contact and interconnect structure |
JP2007294932A (ja) * | 2006-03-28 | 2007-11-08 | Furukawa Electric Co Ltd:The | メタルコアプリント配線板及びその製造方法 |
US11473481B2 (en) | 2020-11-20 | 2022-10-18 | Caterpillar Inc. | Exhaust manifold having turbine connector with turbine foot |
-
1987
- 1987-08-18 JP JP20352187A patent/JPS6447053A/ja active Pending
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5620919A (en) * | 1990-01-12 | 1997-04-15 | Paradigm Technology, Inc. | Methods for fabricating integrated circuits including openings to transistor regions |
US5656861A (en) * | 1990-01-12 | 1997-08-12 | Paradigm Technology, Inc. | Self-aligning contact and interconnect structure |
JPH0474431A (ja) * | 1990-07-16 | 1992-03-09 | Matsushita Electron Corp | 半導体装置およびその製造方法 |
JPH04122026A (ja) * | 1990-09-13 | 1992-04-22 | Nec Corp | 半導体装置の製造方法 |
US5405805A (en) * | 1991-09-13 | 1995-04-11 | Nec Corporation | Method for forming interconnect structure, insulating films and surface protective films of semiconductor device |
US5444023A (en) * | 1993-01-11 | 1995-08-22 | Nec Corporation | Method of fabricating a semiconductor device having a multilayer wiring structure and using a fluorine compound-containing gas |
JP2007294932A (ja) * | 2006-03-28 | 2007-11-08 | Furukawa Electric Co Ltd:The | メタルコアプリント配線板及びその製造方法 |
US11473481B2 (en) | 2020-11-20 | 2022-10-18 | Caterpillar Inc. | Exhaust manifold having turbine connector with turbine foot |
US11988126B2 (en) | 2020-11-20 | 2024-05-21 | Caterpillar Inc. | Exhaust manifold having turbine connector with turbine foot |
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