JPS6447040A - Probe card - Google Patents

Abstract

PURPOSE:To render a probe card suitable for an automated process by a method wherein a hole is provided in a substrate through which a marker runs to provide a semiconductor chip with prescribed markings and a transparent material is employed to constitute a region including at least the middle section of the substrate. CONSTITUTION:In a probe card of this design, a substrate 1 is built of a transparent material, a marker 8 goes through a hole 6 provided in the substrate 1, and the marker 8 attaches markings on a semiconductor chip 13. A chip position recognizing pattern 5 is drawn on the substrate 1, a pattern 10 wherein scribe lines 11 cross each other on the semiconductor chip 13 is aligned with the chip position recognizing pattern 5, and the alignment is trimmed by a sensor 9. Probe card terminals 3 for electrical contact with the semiconductor chip 13 radiate on the rear surface of the substrate 1, the terminals 3 are connected respectively to tester-side probe card terminals 2 through the intermediary of wires 4 on the substrate 1, said chip position recognizing pattern 5 is formed on the substrate 1, and said hole 6 is provided obliquely.