JPS5323570A - Forming method of minute conductive regions to semicond uctor element chip surface - Google Patents
Forming method of minute conductive regions to semicond uctor element chip surfaceInfo
- Publication number
- JPS5323570A JPS5323570A JP9905776A JP9905776A JPS5323570A JP S5323570 A JPS5323570 A JP S5323570A JP 9905776 A JP9905776 A JP 9905776A JP 9905776 A JP9905776 A JP 9905776A JP S5323570 A JPS5323570 A JP S5323570A
- Authority
- JP
- Japan
- Prior art keywords
- chip surface
- element chip
- conductive regions
- minute conductive
- forming method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
PURPOSE: To obtain minute conductive regions conforming to patterns by radiating a laser light beam to a minute conductive material such as Al, In, Sb, Bi, etc. covered and formed beforehand on a transparent glass plate and transferring this to a semiconductor element chip surface.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51099057A JPS5845811B2 (en) | 1976-08-18 | 1976-08-18 | Method for forming minute conductive regions on semiconductor chip surface |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51099057A JPS5845811B2 (en) | 1976-08-18 | 1976-08-18 | Method for forming minute conductive regions on semiconductor chip surface |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5323570A true JPS5323570A (en) | 1978-03-04 |
JPS5845811B2 JPS5845811B2 (en) | 1983-10-12 |
Family
ID=14237033
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51099057A Expired JPS5845811B2 (en) | 1976-08-18 | 1976-08-18 | Method for forming minute conductive regions on semiconductor chip surface |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5845811B2 (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5619634A (en) * | 1979-07-27 | 1981-02-24 | Hitachi Ltd | Semiconductor device |
JPS57122539A (en) * | 1981-01-22 | 1982-07-30 | Toshiba Corp | Integrated circuit |
JPS57211744A (en) * | 1981-06-24 | 1982-12-25 | Hitachi Ltd | Semiconductor integrated circuit device |
JPS60207335A (en) * | 1984-03-31 | 1985-10-18 | Dainippon Printing Co Ltd | Pattern correcting method |
JPS6419739A (en) * | 1988-06-24 | 1989-01-23 | Hitachi Ltd | Semiconductor integrated circuit device |
JPS6427241A (en) * | 1988-06-24 | 1989-01-30 | Hitachi Ltd | Semiconductor integrated circuit device |
JP2012515256A (en) * | 2009-01-14 | 2012-07-05 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | Method for depositing at least one electrically conductive film on a substrate |
-
1976
- 1976-08-18 JP JP51099057A patent/JPS5845811B2/en not_active Expired
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5619634A (en) * | 1979-07-27 | 1981-02-24 | Hitachi Ltd | Semiconductor device |
JPS57122539A (en) * | 1981-01-22 | 1982-07-30 | Toshiba Corp | Integrated circuit |
JPS57211744A (en) * | 1981-06-24 | 1982-12-25 | Hitachi Ltd | Semiconductor integrated circuit device |
JPS60207335A (en) * | 1984-03-31 | 1985-10-18 | Dainippon Printing Co Ltd | Pattern correcting method |
JPS6419739A (en) * | 1988-06-24 | 1989-01-23 | Hitachi Ltd | Semiconductor integrated circuit device |
JPS6427241A (en) * | 1988-06-24 | 1989-01-30 | Hitachi Ltd | Semiconductor integrated circuit device |
JP2012515256A (en) * | 2009-01-14 | 2012-07-05 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | Method for depositing at least one electrically conductive film on a substrate |
Also Published As
Publication number | Publication date |
---|---|
JPS5845811B2 (en) | 1983-10-12 |
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