JPS6447019A - Glassy carbon coated susceptor - Google Patents
Glassy carbon coated susceptorInfo
- Publication number
- JPS6447019A JPS6447019A JP20477787A JP20477787A JPS6447019A JP S6447019 A JPS6447019 A JP S6447019A JP 20477787 A JP20477787 A JP 20477787A JP 20477787 A JP20477787 A JP 20477787A JP S6447019 A JPS6447019 A JP S6447019A
- Authority
- JP
- Japan
- Prior art keywords
- surface roughness
- carbonic
- susceptor
- glassy carbon
- base material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20477787A JPS6447019A (en) | 1987-08-18 | 1987-08-18 | Glassy carbon coated susceptor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20477787A JPS6447019A (en) | 1987-08-18 | 1987-08-18 | Glassy carbon coated susceptor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6447019A true JPS6447019A (en) | 1989-02-21 |
JPH0561774B2 JPH0561774B2 (ja) | 1993-09-07 |
Family
ID=16496176
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20477787A Granted JPS6447019A (en) | 1987-08-18 | 1987-08-18 | Glassy carbon coated susceptor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6447019A (ja) |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2640964A1 (ja) * | 1988-12-26 | 1990-06-29 | Toshiba Ceramics Co | |
JPH02255593A (ja) * | 1989-03-28 | 1990-10-16 | Denki Kagaku Kogyo Kk | プラズマcvd用黒鉛サセプター |
JPH10195660A (ja) * | 1997-01-06 | 1998-07-28 | Tokuyama Toshiba Ceramics Kk | 気相成長用縦型サセプター |
JP2002043397A (ja) * | 2000-07-26 | 2002-02-08 | Hitachi Chem Co Ltd | サセプター |
JP2002220663A (ja) * | 2001-01-29 | 2002-08-09 | Anelva Corp | マグネトロンスパッタリング装置 |
JP2003017435A (ja) * | 2001-06-28 | 2003-01-17 | Ibiden Co Ltd | ガラス状炭素被覆イオン注入装置用部材 |
US6702898B2 (en) * | 1997-12-26 | 2004-03-09 | Canon Kabushiki Kaisha | Deposited film forming apparatus |
KR100520914B1 (ko) * | 2001-07-30 | 2005-10-11 | 도시바세라믹스가부시키가이샤 | 웨이퍼처리부재 |
US20080110402A1 (en) * | 2006-11-10 | 2008-05-15 | Saint-Gobain Ceramics & Plastics, Inc. | Susceptor and method of forming a led device using such susceptor |
JP2012222287A (ja) * | 2011-04-13 | 2012-11-12 | Shimadzu Corp | プラズマcvd成膜装置および基板搭載装置 |
-
1987
- 1987-08-18 JP JP20477787A patent/JPS6447019A/ja active Granted
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2640964A1 (ja) * | 1988-12-26 | 1990-06-29 | Toshiba Ceramics Co | |
JPH02255593A (ja) * | 1989-03-28 | 1990-10-16 | Denki Kagaku Kogyo Kk | プラズマcvd用黒鉛サセプター |
JPH10195660A (ja) * | 1997-01-06 | 1998-07-28 | Tokuyama Toshiba Ceramics Kk | 気相成長用縦型サセプター |
US6702898B2 (en) * | 1997-12-26 | 2004-03-09 | Canon Kabushiki Kaisha | Deposited film forming apparatus |
US6946167B2 (en) | 1997-12-26 | 2005-09-20 | Canon Kabushiki Kaisha | Deposited film forming apparatus and deposited film forming method |
JP2002043397A (ja) * | 2000-07-26 | 2002-02-08 | Hitachi Chem Co Ltd | サセプター |
JP2002220663A (ja) * | 2001-01-29 | 2002-08-09 | Anelva Corp | マグネトロンスパッタリング装置 |
JP2003017435A (ja) * | 2001-06-28 | 2003-01-17 | Ibiden Co Ltd | ガラス状炭素被覆イオン注入装置用部材 |
KR100520914B1 (ko) * | 2001-07-30 | 2005-10-11 | 도시바세라믹스가부시키가이샤 | 웨이퍼처리부재 |
US20080110402A1 (en) * | 2006-11-10 | 2008-05-15 | Saint-Gobain Ceramics & Plastics, Inc. | Susceptor and method of forming a led device using such susceptor |
JP2012222287A (ja) * | 2011-04-13 | 2012-11-12 | Shimadzu Corp | プラズマcvd成膜装置および基板搭載装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0561774B2 (ja) | 1993-09-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
EXPY | Cancellation because of completion of term |