JPS6445792A - Production of article coated with pyrolytic boron nitride - Google Patents

Production of article coated with pyrolytic boron nitride

Info

Publication number
JPS6445792A
JPS6445792A JP20082487A JP20082487A JPS6445792A JP S6445792 A JPS6445792 A JP S6445792A JP 20082487 A JP20082487 A JP 20082487A JP 20082487 A JP20082487 A JP 20082487A JP S6445792 A JPS6445792 A JP S6445792A
Authority
JP
Japan
Prior art keywords
coating layer
graphite
graphite substrate
thickness
boron nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20082487A
Other languages
Japanese (ja)
Other versions
JPH0798708B2 (en
Inventor
Kenji Kadota
Yoshimitsu Kawagoe
Hiroaki Tanji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denka Co Ltd
Original Assignee
Denki Kagaku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denki Kagaku Kogyo KK filed Critical Denki Kagaku Kogyo KK
Priority to JP20082487A priority Critical patent/JPH0798708B2/en
Publication of JPS6445792A publication Critical patent/JPS6445792A/en
Publication of JPH0798708B2 publication Critical patent/JPH0798708B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)

Abstract

PURPOSE:To contrive prevention of a coating layer from cracking or peeling by repeated heating cooling, by specifying bulk density and surface roughness of a graphite substrate and thickness of the coating layer in producing the titled article using graphite as the substrate. CONSTITUTION:The surface of a graphite substrate is coated with boron nitride by a chemical vapor pyrolytic method using a boron halide gas and ammonia gas as raw materials. In the process, a graphite substrate having 1.70-1.95g/cm<3> bulk density and >=10mu surface roughness (Rmax) is used as the graphite substrate and the thickness of the pyrolytic boron nitride coating layer is 10-300mu. In this case, if the bulk density of the graphite substrate is beyond the afore- mentioned range, adhesive force of the above-mentioned coating layer to the graphite substrate is reduced to <2.0MPa. If the surface roughness if <10mu, the adhesive force cannot be increased to >=2.0MPa, possibly resulting in natural peeling. Furthermore, the thickness of the afore-mentioned coating layer is <10mu, the graphite readily diffuses through the coating layer to emerge into the outside and reduce resistance to heating.cooling cycle. On the other hand, if the thickness exceeds 300mu, residual stress in the coating layer is increased to readily cause natural peeling.
JP20082487A 1987-08-13 1987-08-13 Method for producing pyrolytic boron nitride coated article Expired - Lifetime JPH0798708B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20082487A JPH0798708B2 (en) 1987-08-13 1987-08-13 Method for producing pyrolytic boron nitride coated article

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20082487A JPH0798708B2 (en) 1987-08-13 1987-08-13 Method for producing pyrolytic boron nitride coated article

Publications (2)

Publication Number Publication Date
JPS6445792A true JPS6445792A (en) 1989-02-20
JPH0798708B2 JPH0798708B2 (en) 1995-10-25

Family

ID=16430815

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20082487A Expired - Lifetime JPH0798708B2 (en) 1987-08-13 1987-08-13 Method for producing pyrolytic boron nitride coated article

Country Status (1)

Country Link
JP (1) JPH0798708B2 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05270925A (en) * 1992-03-23 1993-10-19 Ngk Insulators Ltd Refractory material for ceramic burning
US5293032A (en) * 1992-02-10 1994-03-08 Sydney Urshan Digital data optical recording and playback system
US5319182A (en) * 1992-03-04 1994-06-07 Welch Allyn, Inc. Integrated solid state light emitting and detecting array and apparatus employing said array
AU745467B2 (en) * 1998-03-31 2002-03-21 Takara Bio Inc. Process for producing lysosphingolipids
JP2011507795A (en) * 2007-12-31 2011-03-10 モーメンティブ パフォーマンス マテリアルズ インコーポレイテッド Low thermal conductivity low density pyrolytic boron nitride material, manufacturing method and article manufactured therefrom
CN111945129A (en) * 2020-07-22 2020-11-17 山东国晶新材料有限公司 Protection method for graphite component of vacuum furnace

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5293032A (en) * 1992-02-10 1994-03-08 Sydney Urshan Digital data optical recording and playback system
US5319182A (en) * 1992-03-04 1994-06-07 Welch Allyn, Inc. Integrated solid state light emitting and detecting array and apparatus employing said array
JPH05270925A (en) * 1992-03-23 1993-10-19 Ngk Insulators Ltd Refractory material for ceramic burning
AU745467B2 (en) * 1998-03-31 2002-03-21 Takara Bio Inc. Process for producing lysosphingolipids
JP2011507795A (en) * 2007-12-31 2011-03-10 モーメンティブ パフォーマンス マテリアルズ インコーポレイテッド Low thermal conductivity low density pyrolytic boron nitride material, manufacturing method and article manufactured therefrom
CN111945129A (en) * 2020-07-22 2020-11-17 山东国晶新材料有限公司 Protection method for graphite component of vacuum furnace

Also Published As

Publication number Publication date
JPH0798708B2 (en) 1995-10-25

Similar Documents

Publication Publication Date Title
US4275095A (en) Composite article and method of making same
US4397901A (en) Composite article and method of making same
CA2269862A1 (en) Apparatus and process for controlled atmosphere chemical vapor deposition
KR900006474A (en) Plasma processing method and products thereof
EP0353052A3 (en) Process for producing fibres composed of or coated with carbides or nitrides
GB1346938A (en) Reactors and method of manufacture of semiconductor devices using such a reactor
JPS6456867A (en) Method for metallizing aln ceramic
EP0310043A3 (en) Oxidation resistant, high temperature thermal cycling resistant coating on silicon-based substrates and process for the production thereof
JPS6445792A (en) Production of article coated with pyrolytic boron nitride
JPH0826863A (en) Formed body of pyrolized boron nitride-coated double layers and method for producing the same
WO1989004549A3 (en) Annealing method for iii-v deposition
EP0335248A3 (en) Graphite brazing fixture coated with composite layers of titanium carbide and titanium nitride
CA2067145A1 (en) Process for forming crack-free pyrolytic boron nitride on a carbon structure and article
JPS6447019A (en) Glassy carbon coated susceptor
JPS54157779A (en) Production of silicon single crystal
GB2357779A (en) Process for the production of improved boron coatings onto graphite and article obtained in this process
JP2763239B2 (en) Multi-layer ceramic crucible
JPS57192260A (en) Coated cemented carbide tool
JPS57171659A (en) Production of coated superhard alloy tool
JPS6462457A (en) Coating method with diamond film
WO2000067311A3 (en) Method for producing a wafer support in a high-temperature cvd reactor
JPS563670A (en) Tool product coated with ceramic
USRE34825E (en) Composite article and method of making same
KR950013981A (en) Silicon carbide coated graphite jig for semiconductor wafer processing with improved thermal shock resistance and manufacturing method thereof
JP3606473B2 (en) Pyrolytic boron nitride container