JPS6445044A - Process of ion implantation - Google Patents

Process of ion implantation

Info

Publication number
JPS6445044A
JPS6445044A JP62200001A JP20000187A JPS6445044A JP S6445044 A JPS6445044 A JP S6445044A JP 62200001 A JP62200001 A JP 62200001A JP 20000187 A JP20000187 A JP 20000187A JP S6445044 A JPS6445044 A JP S6445044A
Authority
JP
Japan
Prior art keywords
emitter
alloy
arsenic
boron
ion implantation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62200001A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0555968B2 (cg-RX-API-DMAC7.html
Inventor
Hisashi Fukuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP62200001A priority Critical patent/JPS6445044A/ja
Priority to US07/227,255 priority patent/US4892752A/en
Priority to DE3855897T priority patent/DE3855897T2/de
Priority to EP88307442A priority patent/EP0303486B1/en
Priority to KR1019880010320A priority patent/KR920005348B1/ko
Publication of JPS6445044A publication Critical patent/JPS6445044A/ja
Priority to US07/371,976 priority patent/US4946706A/en
Publication of JPH0555968B2 publication Critical patent/JPH0555968B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP62200001A 1987-08-12 1987-08-12 Process of ion implantation Granted JPS6445044A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP62200001A JPS6445044A (en) 1987-08-12 1987-08-12 Process of ion implantation
US07/227,255 US4892752A (en) 1987-08-12 1988-08-02 Method of ion implantation
DE3855897T DE3855897T2 (de) 1987-08-12 1988-08-11 Verfahren zur Ionenimplantation
EP88307442A EP0303486B1 (en) 1987-08-12 1988-08-11 Method of ion implantation
KR1019880010320A KR920005348B1 (ko) 1987-08-12 1988-08-12 이온주입방법
US07/371,976 US4946706A (en) 1987-08-12 1989-06-27 Method of ion implantation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62200001A JPS6445044A (en) 1987-08-12 1987-08-12 Process of ion implantation

Publications (2)

Publication Number Publication Date
JPS6445044A true JPS6445044A (en) 1989-02-17
JPH0555968B2 JPH0555968B2 (cg-RX-API-DMAC7.html) 1993-08-18

Family

ID=16417144

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62200001A Granted JPS6445044A (en) 1987-08-12 1987-08-12 Process of ion implantation

Country Status (1)

Country Link
JP (1) JPS6445044A (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0722730U (ja) * 1993-10-07 1995-04-25 源重 加藤 手障害者用盆

Also Published As

Publication number Publication date
JPH0555968B2 (cg-RX-API-DMAC7.html) 1993-08-18

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term