JPS643952B2 - - Google Patents

Info

Publication number
JPS643952B2
JPS643952B2 JP17120084A JP17120084A JPS643952B2 JP S643952 B2 JPS643952 B2 JP S643952B2 JP 17120084 A JP17120084 A JP 17120084A JP 17120084 A JP17120084 A JP 17120084A JP S643952 B2 JPS643952 B2 JP S643952B2
Authority
JP
Japan
Prior art keywords
coating
powder
coating layer
metal substrate
resistant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17120084A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6152374A (ja
Inventor
Kunio Katsuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Usui Kokusai Sangyo Kaisha Ltd
Original Assignee
Usui Kokusai Sangyo Kaisha Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Usui Kokusai Sangyo Kaisha Ltd filed Critical Usui Kokusai Sangyo Kaisha Ltd
Priority to JP17120084A priority Critical patent/JPS6152374A/ja
Publication of JPS6152374A publication Critical patent/JPS6152374A/ja
Publication of JPS643952B2 publication Critical patent/JPS643952B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemically Coating (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
JP17120084A 1984-08-17 1984-08-17 耐熱・耐食性の被覆形成方法 Granted JPS6152374A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17120084A JPS6152374A (ja) 1984-08-17 1984-08-17 耐熱・耐食性の被覆形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17120084A JPS6152374A (ja) 1984-08-17 1984-08-17 耐熱・耐食性の被覆形成方法

Publications (2)

Publication Number Publication Date
JPS6152374A JPS6152374A (ja) 1986-03-15
JPS643952B2 true JPS643952B2 (cg-RX-API-DMAC10.html) 1989-01-24

Family

ID=15918871

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17120084A Granted JPS6152374A (ja) 1984-08-17 1984-08-17 耐熱・耐食性の被覆形成方法

Country Status (1)

Country Link
JP (1) JPS6152374A (cg-RX-API-DMAC10.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6805968B2 (en) 2001-04-26 2004-10-19 Tocalo Co., Ltd. Members for semiconductor manufacturing apparatus and method for producing the same
JP2013153029A (ja) 2012-01-25 2013-08-08 Hitachi High-Technologies Corp プラズマ処理装置及びプラズマ処理方法

Also Published As

Publication number Publication date
JPS6152374A (ja) 1986-03-15

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