JPS6435505A - Production of rectangular light guide made of iii-v group compound semiconductor having flush structure - Google Patents
Production of rectangular light guide made of iii-v group compound semiconductor having flush structureInfo
- Publication number
- JPS6435505A JPS6435505A JP62190420A JP19042087A JPS6435505A JP S6435505 A JPS6435505 A JP S6435505A JP 62190420 A JP62190420 A JP 62190420A JP 19042087 A JP19042087 A JP 19042087A JP S6435505 A JPS6435505 A JP S6435505A
- Authority
- JP
- Japan
- Prior art keywords
- light guide
- iii
- production
- rectangular light
- compound semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Optical Integrated Circuits (AREA)
Abstract
PURPOSE:To produce a light guide having rectangular flush structure with good controllability by forming a clad layer utilizing the transformation of superlattice to mixed crystals after etching. CONSTITUTION:At least the lower clad layer 2 and a core layer 3 consisting of the superlattice are successively crystal-grown on a substrate crystal 1 and are etched down to the prescribed depth of the core layer 3 in such a manner that striped projecting parts of a desired width are formed. The front faces of the projecting parts are masked. An impurity is thereafter diffused from the etched side faces and base. The clad layer 2 and the core layer 3 are partly removed by etching and thereafter, the impurity is diffused therein, by which the shape is controlled with the good controllability and the rectangular light guide is produced.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62190420A JPS6435505A (en) | 1987-07-31 | 1987-07-31 | Production of rectangular light guide made of iii-v group compound semiconductor having flush structure |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62190420A JPS6435505A (en) | 1987-07-31 | 1987-07-31 | Production of rectangular light guide made of iii-v group compound semiconductor having flush structure |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6435505A true JPS6435505A (en) | 1989-02-06 |
Family
ID=16257838
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62190420A Pending JPS6435505A (en) | 1987-07-31 | 1987-07-31 | Production of rectangular light guide made of iii-v group compound semiconductor having flush structure |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6435505A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5020748A (en) * | 1990-04-25 | 1991-06-04 | Pioneer Electronic Corporation | Mounting structure for mounting an instrument on a supporting member of a motor vehicle |
-
1987
- 1987-07-31 JP JP62190420A patent/JPS6435505A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5020748A (en) * | 1990-04-25 | 1991-06-04 | Pioneer Electronic Corporation | Mounting structure for mounting an instrument on a supporting member of a motor vehicle |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE2543471A1 (en) | LIGHT DIODE ARRANGEMENT WITH CURVED STRUCTURE | |
JPS6435405A (en) | Light waveguide mutual connection circuit | |
JPS6489491A (en) | Surface luminous semiconductor laser | |
DE69133388T2 (en) | Manufacturing method of semiconductor structures with quantum source lines | |
JPS6435505A (en) | Production of rectangular light guide made of iii-v group compound semiconductor having flush structure | |
JPS5493378A (en) | Manufacture for semiconductor device | |
JPS57167655A (en) | Manufacture of insulating isolation substrate | |
DE2820646A1 (en) | LASER WITH A DOUBLE HETERO STRUCTURE SUITABLE FOR DIRECT COUPLING TO A FIBER OPTIC | |
JPS5773984A (en) | Manufacture of photodetector | |
JPS5687383A (en) | Manufacture of gallium nitride light emitting element array | |
JPS6421989A (en) | Manufacture of semiconductor light-emitting device | |
JPS6430285A (en) | Manufacture of semiconductor laser | |
JPS5643791A (en) | Semiconductor laser and method of producing thereof | |
JPS57157540A (en) | Semiconductor device | |
JPS5717189A (en) | Semiconductor light-emitting element | |
JPS5671987A (en) | Semiconductor laser | |
JPS55105392A (en) | Semiconductor laser device and its manufacture | |
DE2644940A1 (en) | Levelling monocrystalline silicon surfaces - by anisotropic etching with basic etchant | |
JPS6484779A (en) | Semiconductor laser and manufacture thereof | |
JPS57199288A (en) | Laser diode | |
JPS6482615A (en) | Manufacture of semiconductor element | |
JPS6464386A (en) | Manufacture of optical integrated circuit | |
JPS5574195A (en) | Manufacturing semiconductor laser | |
JPS5574192A (en) | Manufacturing semiconductor laser | |
JPS5642393A (en) | Semiconductor laser |