JPS6435306A - Incidence angle determining method for refractive index and film thickness measurement - Google Patents
Incidence angle determining method for refractive index and film thickness measurementInfo
- Publication number
- JPS6435306A JPS6435306A JP19239687A JP19239687A JPS6435306A JP S6435306 A JPS6435306 A JP S6435306A JP 19239687 A JP19239687 A JP 19239687A JP 19239687 A JP19239687 A JP 19239687A JP S6435306 A JPS6435306 A JP S6435306A
- Authority
- JP
- Japan
- Prior art keywords
- thetaj
- incidence
- angles
- refractive index
- reflection factors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19239687A JPS6435306A (en) | 1987-07-31 | 1987-07-31 | Incidence angle determining method for refractive index and film thickness measurement |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19239687A JPS6435306A (en) | 1987-07-31 | 1987-07-31 | Incidence angle determining method for refractive index and film thickness measurement |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6435306A true JPS6435306A (en) | 1989-02-06 |
Family
ID=16290611
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19239687A Pending JPS6435306A (en) | 1987-07-31 | 1987-07-31 | Incidence angle determining method for refractive index and film thickness measurement |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6435306A (ja) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4001506A1 (de) * | 1989-01-20 | 1990-08-02 | Ricoh Kk | Verfahren zum bestimmen des einfallwinkels eines lichtstrahls bei der messung eines brechungsindex und einer schichtdicke |
JPH0712936A (ja) * | 1993-06-28 | 1995-01-17 | Nec Corp | 光波測距装置 |
US5572314A (en) * | 1994-09-19 | 1996-11-05 | Hyman, Jr.; Mark | Brewster angle refractometer |
EP0760459A2 (en) * | 1995-08-28 | 1997-03-05 | Hewlett-Packard Company | System for measuring the thickness and index refraction of a film |
US7102753B2 (en) | 2003-02-27 | 2006-09-05 | National Institute Of Advanced Industrial Science And Technology | Optical system for measurement |
JP2013228396A (ja) * | 2006-05-05 | 2013-11-07 | Agc Flat Glass North America Inc | 角度に対する色度測定(angularcolorimetry)のための装置及びその方法 |
CN113340818A (zh) * | 2021-06-02 | 2021-09-03 | 天津大学 | 一种自洽验证差分光谱仪及测量方法 |
-
1987
- 1987-07-31 JP JP19239687A patent/JPS6435306A/ja active Pending
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4001506A1 (de) * | 1989-01-20 | 1990-08-02 | Ricoh Kk | Verfahren zum bestimmen des einfallwinkels eines lichtstrahls bei der messung eines brechungsindex und einer schichtdicke |
DE4001506C2 (de) * | 1989-01-20 | 1996-11-21 | Ricoh Kk | Drei Verfahren zum Bestimmen des einzustellenden Meß-Einfallswinkels eines monochromatischen Meß-Lichtstrahls bei der Messung des Brechungsindex und der Dicke einer dünnen Schicht |
JPH0712936A (ja) * | 1993-06-28 | 1995-01-17 | Nec Corp | 光波測距装置 |
US5572314A (en) * | 1994-09-19 | 1996-11-05 | Hyman, Jr.; Mark | Brewster angle refractometer |
EP0760459A2 (en) * | 1995-08-28 | 1997-03-05 | Hewlett-Packard Company | System for measuring the thickness and index refraction of a film |
EP0760459A3 (en) * | 1995-08-28 | 1997-11-26 | Hewlett-Packard Company | System for measuring the thickness and index refraction of a film |
US7102753B2 (en) | 2003-02-27 | 2006-09-05 | National Institute Of Advanced Industrial Science And Technology | Optical system for measurement |
JP2013228396A (ja) * | 2006-05-05 | 2013-11-07 | Agc Flat Glass North America Inc | 角度に対する色度測定(angularcolorimetry)のための装置及びその方法 |
JP2015200664A (ja) * | 2006-05-05 | 2015-11-12 | エージーシー・フラット・グラス・ノース・アメリカ, インコーポレイテッド | 角度に対する色度測定(angularcolorimetry)のための装置及びその方法 |
CN113340818A (zh) * | 2021-06-02 | 2021-09-03 | 天津大学 | 一种自洽验证差分光谱仪及测量方法 |
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