JPS6465406A - Interferometer for flatness measurement - Google Patents
Interferometer for flatness measurementInfo
- Publication number
- JPS6465406A JPS6465406A JP22145887A JP22145887A JPS6465406A JP S6465406 A JPS6465406 A JP S6465406A JP 22145887 A JP22145887 A JP 22145887A JP 22145887 A JP22145887 A JP 22145887A JP S6465406 A JPS6465406 A JP S6465406A
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- semitransparent
- reflected light
- optical path
- mirrors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
PURPOSE:To inspect and measure the flatness of an object surface when the size of the object surface is large by providing two semitransparent-mirrors and two reflecting mirrors. CONSTITUTION:The interferometer is equipped with the two semitransparent mirrors and two total reflecting mirrors M1 and M2. Then the 1st semitransparent-mirror m1 is put in the optical path of projection light l0 which is parallel luminous flux incident slantingly on a sample surface S. Then alpha1st total reflecting mirrors M1 is provided at right angles to the optical path of reflected light l1 of the projection light l0 from the semitransparent-mirror m1. Then alpha 2nd total reflecting mirror M2 is provided on the optical path of reflected light l3 obtained by making the projection light l0 transmitted through the semitransparent-mirror m1 on the sample surface S. Lastly, the 2nd half- mirror m2 is put in the optical path of reflected light l2 after the reflected light l2 of the reflected light l1 from the total reflecting mirror M1 is transmitted through the semitransparent-mirror m1. Consequently, the flatness is inspected and measured even when the side of the object surface is large.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62221458A JPH0617787B2 (en) | 1987-09-04 | 1987-09-04 | Interferometer for flatness measurement |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62221458A JPH0617787B2 (en) | 1987-09-04 | 1987-09-04 | Interferometer for flatness measurement |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6465406A true JPS6465406A (en) | 1989-03-10 |
JPH0617787B2 JPH0617787B2 (en) | 1994-03-09 |
Family
ID=16767039
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62221458A Expired - Lifetime JPH0617787B2 (en) | 1987-09-04 | 1987-09-04 | Interferometer for flatness measurement |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0617787B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0650709A (en) * | 1992-06-15 | 1994-02-25 | Hughes Aircraft Co | Full-aperture interferometer for oblique- incident type optical system |
JP2002206914A (en) * | 2001-01-11 | 2002-07-26 | Fuji Photo Optical Co Ltd | Grazing incidence interferometer device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58127109A (en) * | 1982-01-25 | 1983-07-28 | Minolta Camera Co Ltd | Interferometer for measuring surface shape of mirror face |
-
1987
- 1987-09-04 JP JP62221458A patent/JPH0617787B2/en not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58127109A (en) * | 1982-01-25 | 1983-07-28 | Minolta Camera Co Ltd | Interferometer for measuring surface shape of mirror face |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0650709A (en) * | 1992-06-15 | 1994-02-25 | Hughes Aircraft Co | Full-aperture interferometer for oblique- incident type optical system |
JP2002206914A (en) * | 2001-01-11 | 2002-07-26 | Fuji Photo Optical Co Ltd | Grazing incidence interferometer device |
Also Published As
Publication number | Publication date |
---|---|
JPH0617787B2 (en) | 1994-03-09 |
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