JPS6433944A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS6433944A JPS6433944A JP18934387A JP18934387A JPS6433944A JP S6433944 A JPS6433944 A JP S6433944A JP 18934387 A JP18934387 A JP 18934387A JP 18934387 A JP18934387 A JP 18934387A JP S6433944 A JPS6433944 A JP S6433944A
- Authority
- JP
- Japan
- Prior art keywords
- amorphous
- film
- melting point
- heat treatment
- high melting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000010438 heat treatment Methods 0.000 abstract 4
- 230000008018 melting Effects 0.000 abstract 4
- 238000002844 melting Methods 0.000 abstract 4
- 229910021332 silicide Inorganic materials 0.000 abstract 4
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 abstract 4
- 230000001590 oxidative effect Effects 0.000 abstract 3
- 230000008021 deposition Effects 0.000 abstract 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 2
- 239000004020 conductor Substances 0.000 abstract 1
- 238000002513 implantation Methods 0.000 abstract 1
- 238000005468 ion implantation Methods 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 abstract 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract 1
- 230000003647 oxidation Effects 0.000 abstract 1
- 238000007254 oxidation reaction Methods 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- -1 silicon ions Chemical class 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Landscapes
- Local Oxidation Of Silicon (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18934387A JPS6433944A (en) | 1987-07-29 | 1987-07-29 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18934387A JPS6433944A (en) | 1987-07-29 | 1987-07-29 | Manufacture of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6433944A true JPS6433944A (en) | 1989-02-03 |
| JPH0587134B2 JPH0587134B2 (enrdf_load_stackoverflow) | 1993-12-15 |
Family
ID=16239744
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18934387A Granted JPS6433944A (en) | 1987-07-29 | 1987-07-29 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6433944A (enrdf_load_stackoverflow) |
-
1987
- 1987-07-29 JP JP18934387A patent/JPS6433944A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0587134B2 (enrdf_load_stackoverflow) | 1993-12-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |