JPS643349B2 - - Google Patents

Info

Publication number
JPS643349B2
JPS643349B2 JP55077413A JP7741380A JPS643349B2 JP S643349 B2 JPS643349 B2 JP S643349B2 JP 55077413 A JP55077413 A JP 55077413A JP 7741380 A JP7741380 A JP 7741380A JP S643349 B2 JPS643349 B2 JP S643349B2
Authority
JP
Japan
Prior art keywords
oxide film
transistor
sos
mos
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55077413A
Other languages
English (en)
Japanese (ja)
Other versions
JPS574163A (en
Inventor
Masao Fukuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP7741380A priority Critical patent/JPS574163A/ja
Publication of JPS574163A publication Critical patent/JPS574163A/ja
Publication of JPS643349B2 publication Critical patent/JPS643349B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Element Separation (AREA)
JP7741380A 1980-06-09 1980-06-09 Manufacture of sos/mos transistor Granted JPS574163A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7741380A JPS574163A (en) 1980-06-09 1980-06-09 Manufacture of sos/mos transistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7741380A JPS574163A (en) 1980-06-09 1980-06-09 Manufacture of sos/mos transistor

Publications (2)

Publication Number Publication Date
JPS574163A JPS574163A (en) 1982-01-09
JPS643349B2 true JPS643349B2 (enrdf_load_stackoverflow) 1989-01-20

Family

ID=13633239

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7741380A Granted JPS574163A (en) 1980-06-09 1980-06-09 Manufacture of sos/mos transistor

Country Status (1)

Country Link
JP (1) JPS574163A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW274628B (enrdf_load_stackoverflow) * 1994-06-03 1996-04-21 At & T Corp

Also Published As

Publication number Publication date
JPS574163A (en) 1982-01-09

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